# US 9,520,549 B2 · Piezoelectric material, piezoelectric element, and electronic apparatus

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- Number: US 9,520,549 B2
- Document ID: US9520549B2
- Status: Granted
- Kind: B2
- Application number: 14/139,776
- Filed: 2013-12-23
- Published: 2014-07-03
- Granted: 2016-12-13
- Earliest claimed: 2012-12-28
- Assignees: Canon Kabushiki Kaisha
- Applicants: Canon Kabushiki Kaisha
- Inventors: Hidenori Tanaka; Shinya Koyama; Jumpei Hayashi; Hiroshi Saito
- Web page: https://patentgrep.com/patent/US9520549B2

## CPC

- H10N 30/8536: {Alkaline earth metal based oxides, e.g. barium titanates}
- B41J 2/14201: {Structure of print heads with piezoelectric elements}
- B41J 2/14233: {of film type, deformed by bending and disposed on a diaphragm}
- H10N 30/097: by sintering
- B41J 2202/03: Specific materials used
- G02B 7/08: adapted to co-operate with a remote control mechanism
- H02N 2/163: {Motors with ring stator}
- H10N 30/045: by polarising
- H10N 30/2047: {Membrane type}
- H10N 30/50: having a stacked or multilayer structure
- H10N 30/877: {Conductive materials}
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- B41J: TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- H02N: ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR

## Abstract

A piezoelectric material includes, as a main component, a perovskite-type metal oxide represented by a general formula (Ba1-xCax)a(Ti1-y-zSnyZrz)O3 where 1.00≦a≦1.01, 0.125≦x≦0.300, 0≦y≦0.020, and 0.041≦z≦0.074, the perovskite-type metal oxide containing copper (Cu) and manganese (Mn). A Cu content relative to 100 parts by weight of the metal oxide is 0.02 parts by weight or more and 0.60 parts by weight or less on a metal basis, and a Mn content relative to 100 parts by weight of the metal oxide is 0.12 parts by weight or more and 0.40 parts by weight or less on a metal basis.

## Claims

### Claim 1

A piezoelectric material comprising:
a perovskite-type metal oxide represented by general formula (1),
(Ba1-xCax)a(Ti1-y-zSnyZrz)O3 (1),
copper (Cu), and
manganese (Mn),
where 1.00≦a≦1.01, 0.125≦x≦0.300, 0≦y≦0.020, and 0.041≦z≦0.074,
wherein a Cu content relative to 100 parts by weight of the metal oxide is 0.02 parts by weight or more and 0.60 parts by weight or less on a metal basis, and
a Mn content relative to 100 parts by weight of the metal oxide is 0.12 parts by weight or more and 0.40 parts by weight or less on a metal basis.

### Claim 2 (depends on 1)

The piezoelectric material according to claim 1, wherein, in general formula (1), the relationship y+z≦(11x/14)−0.037 is satisfied.

### Claim 3 (depends on 2)

The piezoelectric material according to claim 2, wherein, in general formula (1), the relationship z≦−2y+0.100 is satisfied.

### Claim 4 (depends on 3)

The piezoelectric material according to claim 3, wherein the piezoelectric material has a relative density of 93% or more and 100% or less.

### Claim 5 (depends on 1)

A piezoelectric element comprising:
a first electrode;
a piezoelectric material portion; and
a second electrode,
wherein the piezoelectric material portion comprises the piezoelectric material according to claim 1.

### Claim 6 (depends on 1)

A multilayered piezoelectric element comprising:
piezoelectric material layers; and
electrode layers including an internal electrode,
wherein the piezoelectric material layers and the electrode layers are alternately stacked, and
the piezoelectric material layers comprise the piezoelectric material according to claim 1.

### Claim 7 (depends on 6)

The multilayered piezoelectric element according to claim 6,
wherein the internal electrode contains Ag and Pd, and
a weight ratio M1/M2 of a Ag content M1 by weight to a Pd content M2 by weight satisfies the relationship 0.25≦M1/M2≦4.0.

### Claim 8 (depends on 6)

The multilayered piezoelectric element according to claim 6, wherein the internal electrode contains at least one of Ni and Cu.

### Claim 9 (depends on 5)

A liquid ejection head comprising:
a liquid chamber including a vibration unit that includes the piezoelectric element according to claim 5; and
an ejection port in communication with the liquid chamber.

### Claim 10 (depends on 9)

A liquid ejection apparatus comprising:
a placing unit of a transfer member; and
the liquid ejection head according to claim 9.

### Claim 11 (depends on 5)

An ultrasonic motor comprising:
a vibrating member that includes the piezoelectric element according to claim 5; and
a moving member that contacts the vibrating member.

### Claim 12 (depends on 11)

An optical apparatus comprising:
a driving unit including the ultrasonic motor according to claim 11.

### Claim 13 (depends on 5)

A vibration apparatus comprising:
a vibrating member including
a diaphragm, and
the piezoelectric element according to claim 5 disposed on the diaphragm.

### Claim 14 (depends on 13)

A dust removing device comprising:
a vibration unit including the vibration apparatus according to claim 13.

### Claim 15 (depends on 14)

An image pickup device comprising:
the dust removing device according to claim 14; and
an image pickup element unit,
wherein a diaphragm of the dust removing device is disposed on a light-receiving surface side of the image pickup element unit.

### Claim 16 (depends on 5)

An electronic apparatus comprising:
a piezoelectric acoustic component including the piezoelectric element according to claim 5.

### Claim 17 (depends on 6)

A liquid ejection head comprising:
a liquid chamber including a vibration unit that includes the multilayered piezoelectric element according to claims 6; and
an ejection port in communication with the liquid chamber.

### Claim 18 (depends on 17)

A liquid ejection apparatus comprising:
a placing unit of a transfer member; and
the liquid ejection head according to claim 17.

### Claim 19 (depends on 6)

An ultrasonic motor comprising:
a vibrating member that includes the multilayered piezoelectric element according to claim 6; and
a moving member that contacts the vibrating member.

### Claim 20 (depends on 19)

An optical apparatus comprising:
a driving unit including the ultrasonic motor according to claim 19.

### Claim 21 (depends on 6)

A vibration apparatus comprising:
a vibrating member including
a diaphragm, and
the multilayered piezoelectric element according to claim 6 disposed on the diaphragm.

### Claim 22 (depends on 21)

A dust removing device comprising:
a vibration unit including the vibration apparatus according to claim 21.

### Claim 23 (depends on 22)

An image pickup device comprising:
the dust removing device according to claim 22; and
an image pickup element unit,
wherein a diaphragm of the dust removing device is disposed on a light-receiving surface side of the image pickup element unit.

### Claim 24 (depends on 6)

An electronic apparatus comprising:
a piezoelectric acoustic component including the multilayered piezoelectric element according to claim 6.

### Claim 25

A piezoelectric material comprising:
an oxide containing Ba, Ca, Ti, Sn, Zr, Cu, and Mn; or
an oxide containing Ba, Ca, Ti, Zr, Cu, and Mn,
wherein x that is a ratio of a Ca content (mol) to a sum of a Ba content and the Ca content (mol) satisfies 0.125≦x≦0.300,
wherein y that is a ratio of a Sn content (mol) to a sum of a Ti content, the Sn content, and a Zr content (mol) satisfies 0≦y≦0.020,
wherein z that is a ratio of the Zr content (mol) to the sum of the Ti content, the Sn content, and the Zr content (mol) satisfies 0.041≦z≦0.074,
wherein the Cu content (parts by weight) relative to 100 parts by weight of the oxide containing Ba, Ca, Ti, Sn, Zr, Cu, and Mn, or the Cu content (parts by weight) relative to 100 parts by weight of the oxide containing Ba, Ca, Ti, Zr, Cu, and Mn is 0.02 parts by weight or more and 0.60 parts by weight or less, and
wherein the Mn content (parts by weight) relative to 100 parts by weight of the oxide containing Ba, Ca, Ti, Sn, Zr, Cu, and Mn, or the Mn content (parts by weight) relative to 100 parts by weight of the oxide containing Ba, Ca, Ti, Zr, Cu, and Mn is 0.12 parts by weight or more and 0.40 parts by weight or less.

### Claim 26 (depends on 25)

A piezoelectric element comprising:
a first electrode;
a piezoelectric material portion; and
a second electrode,
wherein the piezoelectric material portion comprises the piezoelectric material according to claim 25.

### Claim 27 (depends on 25)

A multilayered piezoelectric element comprising:
piezoelectric material layers; and
electrode layers including an internal electrode,
wherein the piezoelectric material layers and the electrode layers are alternately stacked, and
the piezoelectric material layers comprise the piezoelectric material according to claim 25.

### Claim 28 (depends on 26)

An electronic apparatus comprising the piezoelectric element according to claim 26.

### Claim 29 (depends on 27)

An electronic apparatus comprising the multilayered piezoelectric element according to claim 27.