# US 9,520,485 B2 · 3D independent double gate flash memory on bounded conductor layer

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- Number: US 9,520,485 B2
- Document ID: US9520485B2
- Status: Granted
- Kind: B2
- Application number: 14/460,328
- Filed: 2014-08-14
- Published: 2015-11-26
- Granted: 2016-12-13
- Earliest claimed: 2014-05-21
- Assignees: Macronix International Co., Ltd.
- Applicants: Macronix International Co., Ltd.
- Inventors: Hang-Ting Lue
- Web page: https://patentgrep.com/patent/US9520485B2

## CPC

- H10D 30/0413: {of FETs having charge-trapping gate insulators, e.g. MNOS transistors}
- G11C 16/10: Programming or data input circuits
- H10B 41/20: characterised by three-dimensional [3D] arrangements, e.g. with cells on different height levels
- H10B 43/20: characterised by three-dimensional [3D] arrangements, e.g. with cells on different height levels
- H10B 43/27: the channels comprising vertical portions, e.g. U-shaped channels
- H10B 53/20: characterised by the three-dimensional [3D] arrangements, e.g. with cells on different height levels
- H10D 30/6735: {having gates fully surrounding the channels, e.g. gate-all-around}
- H10D 48/30: Devices controlled by electric currents or voltages
- H10D 64/037: {comprising charge-trapping insulators}
- H10D 89/10: Integrated device layouts
- G11C 11/5671: {using charge trapping in an insulator}
- G11C 16/0466: {comprising cells with charge storage in an insulating layer, e.g. metal-nitride-oxide-silicon [MNOS], silicon-oxide-nitride-oxide-silicon [SONOS] (G11C16/0483, G11C16/0491 take precedence)}
- G11C 16/0483: {comprising cells having several storage transistors connected in series}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- G11C: STATIC STORES (semiconductor memory devices H10B)
- H10B: ELECTRONIC MEMORY DEVICES

## Abstract

A memory device configurable for independent double gate cells, storing multiple bits per cell, includes multilayer stacks of conductive strips configured as word lines. Active pillars are disposed between pairs of first and second stacks, each active pillar comprising a vertical channel structure extending from an underlying bounded conductive layer, a charge storage layer and an insulating layer. The insulating layer in a frustum of an active pillar contacts a first arcuate edge of a first conductive strip in a layer of the first stack and a second arcuate edge of a second conductive strip in a same layer of the second stack. The conductive strips can comprise a metal. The active pillar can be generally elliptical with a major axis parallel with the first and second conductive strips.

## Claims

### Claim 1

A memory device, comprising:
first and second multilayer stacks of conductive strips;
a plurality of active pillars between the first and second stacks, each active pillar comprising a vertical channel structure, a charge storage layer and an insulating layer, the insulating layer in a frustum of an active pillar contacting a first edge of a first conductive strip in a layer of the first stack and a second edge of a second conductive strip in a same layer of the second stack;
isolation pillars separating adjacent active pillars between the first and second stacks, wherein the isolation pillars contact the adjacent active pillars along arcuate edges;
a bounded conductive layer configured as a common source of reference potential, below and in electrical communication with the plurality of active pillars; and
a source line conductor over the first and second stacks, and an interlayer connector adjacent the first and second stacks, and connecting the source line conductor to the bounded conductive layer below the first and second stacks.

### Claim 2 (depends on 1)

The memory device of claim 1, wherein a cross section of the active pillar in the at least one frustum is generally elliptical with a major axis and a minor axis, the major axis being generally parallel with the first and second conductive strips.

### Claim 3 (depends on 2)

The memory device of claim 2, wherein the major axis of the elliptical cross section is substantially longer than the minor axis.

### Claim 4 (depends on 1)

The memory device of claim 1, including:
linking elements over the stacks connecting respective active pillars in the plurality of active pillars to bit line circuitry.

### Claim 5 (depends on 1)

The memory device of claim 1, including:
string select switches at a top frustum of the active pillars, and source line bias circuitry coupled to the bounded conductive layer on a substrate.

### Claim 6 (depends on 1)

The memory device of claim 1, wherein the conductive strips in the first and second multilayer stacks of conductive strips comprise a metal.

### Claim 7 (depends on 1)

The memory device of claim 1, including circuitry to store multiple bits of data in cells at cross points of the first and second conductive strips in the same layer with the plurality of the active pillars.

### Claim 8 (depends on 1)

The memory device of claim 1, further comprising:
word line driver circuits configured for independent biasing of the conductive strips in the first and second multilayer stacks of conductive strips.

### Claim 9 (depends on 1)

The memory device of claim 1, further comprising:
a first multilayer stack of landing pad elements, the landing pad elements in the first multilayer stack connected to conductive strips in corresponding layers of the first multilayer stack of conductive strips; and
a second multilayer stack of landing pad elements, the landing pad elements in the second multilayer stack connected to conductive strips in corresponding layers of the second multilayer stack of conductive strips; and
word line driver circuits connected to the first and second conductive strips via landing pad elements in the first and second multilayer stacks of landing pad elements,
wherein the plurality of active pillars is disposed between the first multilayer stack of landing pad elements and the second multilayer stack of landing pad elements.

### Claim 10 (depends on 1)

The memory device of claim 1, wherein the vertical channel structure has a central seam.

### Claim 11

A memory device, comprising:
a plurality of word line layers, a word line layer in the plurality including a first word line structure comprising a first landing pad element and a plurality of even word lines extending away from the first landing pad element, and a second word line structure comprising a second landing pad element and a plurality of odd word lines extending away from the second landing pad element and interdigitated with the plurality of even word lines;
a plurality of rows of active pillars and insulating pillars extending through the plurality of word line layers, the rows in the plurality disposed between corresponding even word lines and odd word lines, the active pillars in a row in the plurality of rows comprising respectively a vertical channel structure, a charge storage layer and an outside insulating layer; the insulating pillars in the row separating the even and odd word lines between the active pillars; and
a bounded conductive layer configured as a common source of reference potential for the plurality of rows of active pillars, below and in electrical communication with the active pillars in the plurality of rows of active pillars.

### Claim 12 (depends on 11)

The memory device of claim 11, including:
string select switches at top frustums of the active pillars in the plurality of rows, ground select switches at bottom frustums of the active pillars in the plurality of rows, and source line bias circuitry coupled to the bounded conductive layer.

### Claim 13 (depends on 11)

The memory device of claim 11, including:
a source line conductor over the plurality of word line layers, and an interlayer connector adjacent the plurality of word line layers, and connecting the source line conductor to the bounded conductive layer below the plurality of layers.

### Claim 14 (depends on 11)

The memory device of claim 11, including circuitry to store multiple bits of data in cells at cross points of the even and odd word lines with the active pillars in a row of active pillars.

### Claim 15 (depends on 11)

The memory device of claim 11, wherein a cross section of the active pillar in a frustum is arranged so that an average radius of curvature of on sides adjacent the word lines is greater than an average radius of curvature of the frustum adjacent the insulating pillar at the same layer.

### Claim 16 (depends on 11)

The memory device of claim 11, including:
global bit lines connecting respective columns of active pillars in the plurality of rows to a page buffer.

### Claim 17 (depends on 11)

The memory device of claim 11, further comprising:
word line driver circuits configured for independent biasing of the first and second word line structures in the plurality of layers.

### Claim 18 (depends on 11)

The memory device of claim 11, wherein the vertical channel structure has a central seam.