# US 9,520,481 B2 · Electronic devices

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- Number: US 9,520,481 B2
- Document ID: US9520481B2
- Status: Granted
- Kind: B2
- Application number: 14/378,920
- Filed: 2013-02-13
- Published: 2016-01-21
- Granted: 2016-12-13
- Earliest claimed: 2012-02-14
- Assignees: Pragmatic Printing Ltd.
- Applicants: Pragmatic Printing Ltd
- Inventors: John James Gregory; Richard David Price
- Web page: https://patentgrep.com/patent/US9520481B2

## CPC

- H10D 30/021: {of FETs having insulated gates [IGFET]}
- H10D 30/0314: {of lateral top-gate TFTs comprising only a single gate}
- H10D 30/0316: {of lateral bottom-gate TFTs comprising only a single gate}
- H10D 30/0321: {comprising silicon, e.g. amorphous silicon or polysilicon}
- H10D 30/6757: {characterised by the structure of the channel, e.g. transverse or longitudinal shape or doping profile (TFTs having channel structures for preventing kink or snapback effects H10D30/6708; TFTs having lightly-doped source or drain extensions H10D30/6715)}
- H10D 86/0214: {using temporary substrates}
- H10D 86/0231: {using masks, e.g. half-tone masks}
- H10D 99/00: Subject matter not provided for in other groups of this subclass
- G03F 7/2022: {Multi-step exposure, e.g. hybrid; backside exposure; blanket exposure, e.g. for image reversal; edge exposure, e.g. for edge bead removal; corrective exposure}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)

## Abstract

A method of manufacturing an electronic device comprising a first terminal (e.g. a source terminal), a second terminal (e.g. a drain terminal), a semiconductor channel connecting the first and second terminals and a gate terminal to which a potential may be applied to control a conductivity of the channel. The method comprises a first exposure of a photoresist from above the substrate using a mask and a second exposure from below, wherein in the second exposure the first and second terminals shield a part of the photoresist from exposure. An intermediate step reduces the solubility of the photoresist exposed in the first exposure. A window is formed in the photoresist at the location which was shielded by the mask, but exposed to radiation from below. Semiconductor material, dielectric material and conductor material are deposited inside the window to form a semiconductor channel, gate dielectric, and a gate terminal, respectively.

## Claims

### Claim 1

A method of manufacturing an electronic device comprising a first terminal, a second terminal, a semiconductor channel connecting the first and second terminals and through which electrical current may flow between the first and second terminals, a gate terminal to which a potential may be applied to control a conductivity of the semiconductor channel, and a gate dielectric separating the gate terminal and the channel, the method comprising the steps of:
a) providing at least a substrate and said first and second terminals supported, either directly or indirectly, by the substrate, the first and second terminals being separated by a gap, and the first and second terminals and the gap being located over a first region of the substrate and within a perimeter of the first region;
b) forming a covering of photoresist material over at least the first region of the substrate so as to cover the first and second terminals, the gap, and any portion or portions of the first region of the substrate not located beneath the gap or the first and second terminals;
c) forming a mask on a surface of the covering of photoresist material, the mask covering at least a portion of the gap extending from the first terminal to the second terminal, at least a portion of the first terminal immediately adjacent said portion of the gap, and at least a portion of the second terminal immediately adjacent said portion of the gap;
d) exposing the structure resulting from step (c) to electromagnetic radiation from above such that the mask shields a portion of the photoresist covering under the mask from said electromagnetic radiation;
e) processing the structure resulting from step (d) to reduce a solubility of the photoresist material exposed to said electromagnetic radiation from above;
f) exposing the structure resulting from step (e) to electromagnetic radiation from below, such that the first and second terminals shield parts of the previously unexposed portion of photoresist covering from the electromagnetic radiation from below but another part of the previously unexposed portion of photoresist covering is exposed;
g) processing the photoresist material to remove photoresist material that was shielded by the mask from the electromagnetic radiation from above but exposed to electromagnetic radiation from below, to form a window in the covering of photoresist material; and
h) depositing at least one of: a layer of semiconductor material; a layer of dielectric material; and a layer of conductor material, at least inside said window, to form at least one of: the semiconductor channel, gate dielectric, and gate terminal, respectively;
wherein step (a) comprises providing said substrate, a layer of semiconductor material supported by the substrate, and said first and second terminals supported directly by the layer of semiconductor material;
wherein step (h) comprises depositing a layer of dielectric material and a layer of conductor material, at least inside said window, to form the gate dielectric and the gate terminal.

### Claim 2 (depends on 1)

A method in accordance with claim 1, further comprising removing said mask before step (g).

### Claim 3 (depends on 2)

A method in accordance with claim 2, wherein step (d) comprises a sub-step of removing said mask after exposing the structure resulting from step (c).

### Claim 4 (depends on 1)

A method in accordance with claim 1, further comprising removing remaining material of the photoresist covering after step (h).

### Claim 5 (depends on 1)

A method in accordance with claim 1, wherein step (a) comprises providing said substrate, a layer of semiconductor material supported by the substrate, said first and second terminals supported directly by the layer of semiconductor material, and a layer of dielectric material covering at least the semiconductor material under said gap.

### Claim 6 (depends on 5)

A method in accordance with claim 5, wherein step (h) comprises depositing a layer of conductor material, at least inside said window, to form the gate terminal.

### Claim 7 (depends on 1)

A method in accordance with claim 1, wherein step (a) comprises providing said substrate, said first and second terminals supported directly by the substrate, a layer of semiconductor material covering at least said gap, and a layer of dielectric material covering at least the semiconductor material covering said gap.

### Claim 8 (depends on 7)

A method in accordance with claim 7, wherein step (h) comprises depositing a layer of conductor material, at least inside said window, to form the gate terminal.

### Claim 9 (depends on 1)

A method in accordance with claim 1, wherein said covering of photoresist material comprises a plurality of layers of photoresist material.

### Claim 10 (depends on 9)

A method in accordance with claim 9, wherein said covering of photoresist material comprises a first layer of a first photoresist material, and a second layer of a second, different photoresist material.

### Claim 11 (depends on 10)

A method in accordance with claim 10, wherein said first photoresist material is a lift-off resist material.

### Claim 12 (depends on 10)

A method in accordance claim 10, further comprising forming an undercut in the first layer of photoresist material inside said window before step (h).

### Claim 13 (depends on 1)

A method in accordance with claim 1, wherein said processing to reduce a solubility comprises baking.

### Claim 14 (depends on 1)

A method in accordance with claim 1, wherein said photoresist material is an image-reversal photoresist material.

### Claim 15

A method of manufacturing an electronic device comprising a first terminal, a second terminal, a semiconductor channel connecting the first and second terminals and through which electrical current may flow between the first and second terminals, a gate terminal to which a potential may be applied to control a conductivity of the semiconductor channel, and a gate dielectric separating the gate terminal and the channel, the method comprising the steps of:
a) providing at least a substrate and said first and second terminals supported, either directly or indirectly, by the substrate, the first and second terminals being separated by a gap, and the first and second terminals and the gap being located over a first region of the substrate and within a perimeter of the first region;
b) forming a covering of photoresist material over at least the first region of the substrate so as to cover the first and second terminals, the gap, and any portion or portions of the first region of the substrate not located beneath the gap or the first and second terminals;
c) forming a mask on a surface of the covering of photoresist material, the mask covering at least a portion of the gap extending from the first terminal to the second terminal, at least a portion of the first terminal immediately adjacent said portion of the gap, and at least a portion of the second terminal immediately adjacent said portion of the gap;
d) exposing the structure resulting from step (c) to electromagnetic radiation from above such that the mask shields a portion of the photoresist covering under the mask from said electromagnetic radiation;
e) processing the structure resulting from step (d) to reduce a solubility of the photoresist material exposed to said electromagnetic radiation from above;
f) exposing the structure resulting from step (e) to electromagnetic radiation from below, such that the first and second terminals shield parts of the previously unexposed portion of photoresist covering from the electromagnetic radiation from below but another part of the previously unexposed portion of photoresist covering is exposed;
g) processing the photoresist material to remove photoresist material that was shielded by the mask from the electromagnetic radiation from above but exposed to electromagnetic radiation from below, to form a window in the covering of photoresist material; and
h) depositing at least one of: a layer of semiconductor material; a layer of dielectric material; and a layer of conductor material, at least inside said window, to form at least one of: the semiconductor channel, gate dielectric, and gate terminal, respectively;
wherein step (a) comprises providing said substrate, a layer of semiconductor material supported by the substrate, and said first and second terminals supported directly by the layer of semiconductor material;
further comprising using the gate terminal as a mask in a processing step to remove semiconductor material and/or dielectric material not covered by the gate terminal.

### Claim 16

A method of manufacturing an electronic device comprising a first terminal, a second terminal, a semiconductor channel connecting the first and second terminals and through which electrical current may flow between the first and second terminals, a gate terminal to which a potential may be applied to control a conductivity of the semiconductor channel, and a gate dielectric separating the gate terminal and the channel, the method comprising the steps of:
a) providing at least a substrate and said first and second terminals supported, either directly or indirectly, by the substrate, the first and second terminals being separated by a gap, and the first and second terminals and the gap being located over a first region of the substrate and within a perimeter of the first region;
b) forming a covering of photoresist material over at least the first region of the substrate so as to cover the first and second terminals, the gap, and any portion or portions of the first region of the substrate not located beneath the gap or the first and second terminals;
c) forming a mask on a surface of the covering of photoresist material, the mask covering at least a portion of the gap extending from the first terminal to the second terminal, at least a portion of the first terminal immediately adjacent said portion of the gap, and at least a portion of the second terminal immediately adjacent said portion of the gap;
d) exposing the structure resulting from step (c) to electromagnetic radiation from above such that the mask shields a portion of the photoresist covering under the mask from said electromagnetic radiation;
e) processing the structure resulting from step (d) to reduce a solubility of the photoresist material exposed to said electromagnetic radiation from above;
f) exposing the structure resulting from step (e) to electromagnetic radiation from below, such that the first and second terminals shield parts of the previously unexposed portion of photoresist covering from the electromagnetic radiation from below but another part of the previously unexposed portion of photoresist covering is exposed;
g) processing the photoresist material to remove photoresist material that was shielded by the mask from the electromagnetic radiation from above but exposed to electromagnetic radiation from below, to form a window in the covering of photoresist material; and
h) depositing at least one of: a layer of semiconductor material; a layer of dielectric material; and a layer of conductor material, at least inside said window, to form at least one of: the semiconductor channel, gate dielectric, and gate terminal, respectively;
wherein step (a) comprises providing said substrate, and said first and second terminals supported directly by said substrate;
wherein step (h) comprises depositing a layer of semiconductor material; a layer of dielectric material; and a layer of conductor material, at least inside said window, to form the semiconductor channel, gate dielectric, and gate terminal, respectively.

### Claim 17

A method of manufacturing an electronic device comprising a first terminal, a second terminal, a semiconductor channel connecting the first and second terminals and through which electrical current may flow between the first and second terminals, a gate terminal to which a potential may be applied to control a conductivity of the semiconductor channel, and a gate dielectric separating the gate terminal and the channel, the method comprising the steps of:
a) providing at least a substrate, said gate terminal, a layer of semiconductor material, and a layer of dielectric material separating the gate terminal from the layer of semiconductor material, the gate terminal being supported, either directly or indirectly, by the substrate, the layer of semiconductor material comprising a channel portion, arranged over said gate terminal, a first end portion, extending from a first end of the channel portion beyond an edge of the gate terminal, and a second end portion, extending from a second end of the channel portion beyond an edge of the gate terminal, the channel portion providing said semiconductor channel and the layer of dielectric material providing said gate dielectric, and the gate terminal and the layer of semiconductor material being located over a first region of the substrate and within a perimeter of the first region;
b) forming a covering of photoresist material over at least the first region of the substrate so as to cover the gate terminal and the layer of semiconductor material and any portion or portions of the first region of the substrate not located beneath the gate or the layer of semiconductor material;
c) forming a mask on a surface of the covering of photoresist material, the mask covering the channel portion, at least part of the first end portion, and at least part of the second end portion;
d) exposing the structure resulting from step (c) to electromagnetic radiation from above such that the mask shields a portion of the photoresist covering under the mask from said electromagnetic radiation;
e) processing the structure resulting from step (d) to reduce a solubility of the photoresist material exposed to said electromagnetic radiation from above;
f) exposing the structure resulting from step (e) to electromagnetic radiation from below, such that the gate terminal shields a part of the previously unexposed portion of photoresist covering from the electromagnetic radiation from below but other parts of the previously unexposed portion of photoresist covering are exposed;
g) processing the photoresist material to remove photoresist material that was shielded by the mask from the electromagnetic radiation from above but exposed to electromagnetic radiation from below, to form a first window in the covering of photoresist material, the first window exposing at least part of the first end portion, and a second window in the covering of photoresist material, the second window exposing at least part of the second end portion; and
h) depositing conductor material, at least inside said first and second windows, to form said first and second terminals respectively, the first terminal being in contact with the first end portion and the second terminal being in contact with the second end portion.

### Claim 18 (depends on 17)

A method in accordance with claim 17, further comprising removing said mask before step (g).

### Claim 19 (depends on 18)

A method in accordance with claim 18, wherein step (d) comprises a sub-step of removing said mask after exposing the structure resulting from step (c).

### Claim 20 (depends on 17)

A method in accordance with claim 17, further comprising removing remaining material of the photoresist covering after step (h).

### Claim 21 (depends on 17)

A method in accordance with claim 17, wherein said covering of photoresist material comprises a plurality of layers of photoresist material.

### Claim 22 (depends on 21)

A method in accordance with claim 21, wherein said covering of photoresist material comprises a first layer of a first photoresist material, and a second layer of a second, different photoresist material.

### Claim 23 (depends on 22)

A method in accordance with claim 22, wherein said first photoresist material is a lift-off resist material.

### Claim 24 (depends on 22)

A method in accordance with claim 22, further comprising forming an undercut in the first layer of photoresist material inside each window before step (h).

### Claim 25

A method of manufacturing an electronic device comprising a first terminal, a second terminal, a semiconductor channel connecting the first and second terminals and through which electrical current may flow between the first and second terminals, a gate terminal to which a potential may be applied to control a conductivity of the semiconductor channel, and a gate dielectric separating the gate terminal and the channel, the method comprising the steps of:
a) providing a structure comprising a substrate, said first and second terminals supported, either directly or indirectly, by the substrate, and separated by a gap, a layer of semiconductor material providing the semiconductor channel extending across said gap, a layer of dielectric material covering the layer of semiconductor material to provide the gate dielectric, and a layer gate material covering the first and second terminals and the layers of semiconductor material and dielectric material;
b) forming a covering of photoresist material covering at least the layer of gate material;
c) forming a mask on a surface of the covering of photoresist material, the mask extending at least fully across a width of the semiconductor channel and covering a portion of the first terminal and a portion of the second terminal;
d) exposing the structure resulting from step (c) to electromagnetic radiation from above such that the mask shields a portion of the photoresist covering under the mask from said electromagnetic radiation;
e) processing the structure resulting from step (d) to remove the photoresist material exposed to said electromagnetic radiation from above;
f) exposing the structure resulting from step (e) to electromagnetic radiation, to which the gate material is substantially transparent, from below, such that the first and second terminals shield parts of the previously unexposed portion of photoresist covering from the electromagnetic radiation from below but another part of the previously unexposed portion of photoresist covering is exposed;
g) processing the structure resulting from step (f) to reduce the solubility of the photoresist material shielded from said electromagnetic radiation from above but exposed to said electromagnetic radiation from below;
h) exposing the structure resulting from step (g) to electromagnetic radiation from above so as to increase a solubility of the previously unexposed photoresist material;
i) processing the photoresist material to remove photoresist material that was shielded by the mask from the electromagnetic radiation from above, shielded by the first and second terminals from the electromagnetic radiation from below, and then exposed to electromagnetic radiation from above, so as to expose all of the layer of transparent gate material except for a portion of the layer of gate material covered by the portion of photoresist material having been processed to reduce its solubility; and
j) removing gate material not covered by said portion of photoresist material,
the method further comprising removing the mask before step (h).

### Claim 26 (depends on 25)

A method in accordance with claim 25, wherein removing the mask is a sub-step of one of steps (d), (e), (f), and (g).

### Claim 27 (depends on 26)

A method in accordance with claim 26, wherein removing the mask is a sub-step of step (d), performed after exposing said structure resulting from step (c).

### Claim 28

A method of manufacturing an electronic device comprising a first terminal, a second terminal, a semiconductor channel connecting the first and second terminals and through which electrical current may flow between the first and second terminals, a gate terminal to which a potential may be applied to control a conductivity of the semiconductor channel, and a gate dielectric separating the gate terminal and the channel, the method comprising the steps of:
a) providing at least a substrate, said gate terminal, a layer of semiconductor material, and a layer of dielectric material separating the gate terminal from the layer of semiconductor material, the gate terminal being supported, either directly or indirectly, by the substrate, the layer of semiconductor material comprising a channel portion, arranged over said gate terminal, a first end portion, extending from a first end of the channel portion beyond an edge of the gate terminal, and a second end portion, extending from a second end of the channel portion beyond an edge of the gate terminal, the channel portion providing said semiconductor channel and the layer of dielectric material providing said gate dielectric, and the gate terminal and the layer of semiconductor material being located over a first region of the substrate and within a perimeter of the first region;
b) forming a layer of conductor material over the first region of the substrate to cover the gate terminal, layer of dielectric material, and the layer of semiconductor material;
c) forming a covering of photoresist material covering the layer of conductor material;
d) forming a mask on a surface of the covering of photoresist material, the mask covering the channel portion, at least part of the first end portion, and at least part of the second end portion;
e) exposing the structure resulting from step (d) to electromagnetic radiation from above such that the mask shields a portion of the photoresist covering under the mask from said electromagnetic radiation;
f) processing the structure resulting from step (e) to remove the photoresist material exposed to said electromagnetic radiation from above and expose conductor material not located under said mask;
g) exposing the structure resulting from step (f) to electromagnetic radiation, to which the conductor material is substantially transparent, from below, such that the gate terminal shield a part of the previously unexposed portion of photoresist covering from the electromagnetic radiation from below but other parts of the previously unexposed portion of photoresist covering are exposed;
h) processing the structure resulting from step (g) to reduce the solubility of the photoresist material shielded from said electromagnetic radiation from above but exposed to said electromagnetic radiation from below;
i) exposing the structure resulting from step (h) to electromagnetic radiation from above so as to increase a solubility of the previously unexposed photoresist material;
j) processing the photoresist material to remove photoresist material that was shielded by the mask from the electromagnetic radiation from above, shielded by the gate terminal from the electromagnetic radiation from below, and then exposed to electromagnetic radiation from above, so as to form a window in the layer of photoresist material exposing the surface of a portion of the layer of conductor material over the gate terminal; and
removing exposed conductor material,
the method further comprising removing said mask before step (i).

### Claim 29 (depends on 28)

A method in accordance with claim 28, wherein removing the mask is a sub-step of one of steps (e), (f), (g), and (h).

### Claim 30 (depends on 29)

A method in accordance with claim 29, wherein removing the mask is a sub-step of step (e), performed after exposing said structure resulting from step (d).