# US 9,520,431 B2 · Self-aligned isolation structures and light filters > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,520,431 B2 - Document ID: US9520431B2 - Status: Granted - Kind: B2 - Application number: 14/505,923 - Filed: 2014-10-03 - Published: 2016-04-07 - Granted: 2016-12-13 - Earliest claimed: 2014-10-03 - Assignees: OmniVision Technologies, Inc. - Applicants: Omnivision Technologies, Inc. - Inventors: Wei Zheng; Chia-Ying Liu; Chun-Yung Ai; Wu-Zang Yang; Chih-Wei Hsiung; Chen-Wei Lu - Web page: https://patentgrep.com/patent/US9520431B2 ## CPC - H10F 39/807: {Pixel isolation structures} - H10F 39/024: {of coatings or optical elements} - H10F 39/182: {Colour image sensors} - H10F 39/805: {Coatings} - H10F 39/8053: {Colour filters} - H10F 39/8057: {Optical shielding} - H10F 39/8063: {Microlenses} - H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION ## Abstract An image sensor includes a semiconductor layer with a plurality of photodiodes. A plurality of isolation structures is disposed in the back side of the semiconductor layer between individual photodiodes in the plurality of photodiodes. The plurality of isolation structures extend into the back side of the semiconductor layer a first depth and extend out of the back side of the semiconductor layer a first length. A plurality of light filters is disposed proximate to the back side of the semiconductor layer such that the plurality of isolation structures is disposed between individual light filters in the plurality of light filters. An antireflection coating is also disposed between the semiconductor layer and the plurality of light filters. ## Claims ### Claim 1 An image sensor, the image sensor comprising: a semiconductor layer including a plurality of photodiodes, wherein the semiconductor layer has a front side and a back side; a plurality of isolation structures disposed in the back side of the semiconductor layer between individual photodiodes in the plurality of photodiodes, wherein the plurality of isolation structures extends into the back side of the semiconductor layer a first depth and extends out of the back side of the semiconductor layer a first length; a plurality of light filters disposed proximate to the back side of the semiconductor layer, wherein the plurality of isolation structures is disposed between individual light filters in the plurality of light filters; and an antireflection coating disposed between the semiconductor layer and the plurality of light filters. ### Claim 2 (depends on 1) The image sensor of claim 1, wherein the antireflection coating is disposed between the plurality of isolation structures and the plurality of light filters. ### Claim 3 (depends on 1) The image sensor of claim 1, wherein the plurality of isolation structures includes at least one of metal, metal oxide, semiconductor, semiconductor oxide, semiconductor nitride, or semiconductor oxynitride. ### Claim 4 (depends on 1) The image sensor of claim 1, further comprising an interlayer disposed between the plurality of isolation structures and the plurality of light filters, wherein the interlayer is shaped to direct light into the plurality of photodiodes. ### Claim 5 (depends on 4) The image sensor of claim 4, wherein the interlayer has an increasing width in a direction toward the semiconductor layer. ### Claim 6 (depends on 1) The image sensor of claim 1, wherein the plurality of light filters includes at least one of red light filters, green light filters, blue light filters, clear light filters, or infrared light filters. ### Claim 7 (depends on 1) The image sensor of claim 1, further comprising a microlens layer disposed proximate to the plurality of light filters, wherein the plurality of light filters is disposed between the semiconductor layer and the microlens layer. ### Claim 8 An imaging system, the imaging system comprising: a semiconductor layer including a plurality of photodiodes, wherein the plurality of photodiodes is arranged into an array, and wherein the semiconductor layer has a front side and a back side; a plurality of isolation structures disposed in the back side of the semiconductor layer between individual photodiodes in the plurality of photodiodes, wherein the plurality of isolation structures extends into the back side of the semiconductor layer a first depth and extends out of the back side of the semiconductor layer a first length; and a plurality of light filters disposed proximate to the back side of the semiconductor layer, wherein the plurality of isolation structures is disposed between individual light filters in the plurality of light filters. ### Claim 9 (depends on 8) The imaging system of claim 8, further comprising an antireflection coating disposed between the semiconductor layer and the plurality of light filters. ### Claim 10 (depends on 8) The imaging system of claim 8, further comprising control circuitry and readout circuitry, wherein the control circuitry is coupled to control the operation of the plurality of photodiodes and the readout circuitry is coupled to readout image charge from the plurality of photodiodes. ### Claim 11 (depends on 10) The imaging system of claim 10, further comprising function logic coupled to the readout circuitry to manipulate the image charge readout from the plurality of photodiodes. ### Claim 12 (depends on 10) The imaging system of claim 10, further comprising one or more light shield layers disposed to prevent photons incident on the imaging system from reaching the control circuitry and readout circuitry. ### Claim 13 A method of image sensor fabrication, the method comprising: forming a plurality of photodiodes in a semiconductor layer, wherein the semiconductor layer has a front side and a back side; forming a plurality of isolation structures in the back side of the semiconductor layer; wherein individual isolation structures in the plurality of isolation structures are disposed between individual photodiodes in the plurality of photodiodes, and wherein the plurality of isolation structures extend into the back side of the semiconductor layer a first depth and extend out of the back side of the semiconductor layer a first length; depositing an antireflection coating on the semiconductor layer; forming a plurality of light filters disposed proximate to the back side of the semiconductor layer, wherein the plurality of isolation structures is disposed between individual light filters in the plurality of light filters. ### Claim 14 (depends on 13) The method of claim 13, wherein forming the plurality of isolation structures in the back side of the semiconductor layer includes: depositing a sacrificial layer disposed proximate to the back side of the semiconductor layer; etching trenches into the sacrificial layer and the semiconductor layer; depositing the plurality of isolation structures in the trenches; and removing the sacrificial layer. ### Claim 15 (depends on 13) The method of claim 13, wherein the plurality of isolation structures includes at least one of metal, metal oxide, semiconductor, semiconductor oxide, semiconductor nitride, or semiconductor oxynitride. ### Claim 16 (depends on 13) The method of claim 13, wherein the antireflection coating is deposited before forming the plurality of isolation structures. ### Claim 17 (depends on 13) The method of claim 13, wherein the antireflection coating is deposited after forming the plurality of isolation structures. ### Claim 18 (depends on 13) The method of claim 13, further comprising forming an interlayer disposed between the plurality of isolation structures and the plurality of light filters, wherein the interlayer is shaped to direct light into the plurality of photodiodes. ### Claim 19 (depends on 18) The method of claim 18, wherein the interlayer has an increasing width in a direction toward the semiconductor layer. ### Claim 20 (depends on 13) The method of claim 13, further comprising forming a microlens layer disposed proximate to the plurality of light filters, wherein the plurality of light filters is disposed between the semiconductor layer and the microlens layer. ### Claim 21 (depends on 13) The method of claim 13, further comprising depositing a light shield layer disposed proximate to the semiconductor layer, wherein the light shield layer prevents light incident on the image sensor from reaching logic circuitry.