# US 9,520,429 B2 · Image sensor with protection layer having convex-shaped portions over the air spacers between the plurality of filters

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- Number: US 9,520,429 B2
- Document ID: US9520429B2
- Status: Granted
- Kind: B2
- Application number: 14/663,146
- Filed: 2015-03-19
- Published: 2016-06-16
- Granted: 2016-12-13
- Earliest claimed: 2014-12-15
- Assignees: SK hynix Inc.
- Applicants: SK hynix Inc.
- Inventors: Sang-Sik Kim
- Web page: https://patentgrep.com/patent/US9520429B2

## CPC

- H10F 39/8053: {Colour filters}
- H10F 39/024: {of coatings or optical elements}
- H10F 39/182: {Colour image sensors}
- H10F 39/8063: {Microlenses}
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION

## Abstract

An image sensor includes a plurality of filters, an air spacer formed between the plurality of filters, and a protection layer including a first part formed on the plurality of filters and a second part formed on the air spacer. The second part of the protection layer may have a convex lens shape that protrudes over the plurality of filters.

## Claims

### Claim 1

An image sensor comprising:
a plurality of filters;
an air spacer formed between the plurality of filters; and
a protection layer including a first part formed on the plurality of filters and a second part formed on the air spacer,
wherein the second part of the protection layer has a convex lens shape which protrudes over the air spacer.

### Claim 2 (depends on 1)

The image sensor according to claim 1, further comprising:
micro lenses formed on the first part of the protection layer to correspond to the plurality of filters, respectively.

### Claim 3 (depends on 2)

The image sensor according to claim 2, wherein the micro lens has the same refractive index as the protection layer, or a refractive index lower than the protection layer.

### Claim 4 (depends on 2)

The image sensor according to claim 2, wherein the micro lenses are separated from one another by the second part of the protection layer.

### Claim 5 (depends on 1)

The image sensor according to claim 1, wherein each of the plurality of filters includes a single filter selected from a group consisting of a red filter, a green filter, a blue filter, a cyan filter, a yellow filter, a magenta filter, a white filter, a black filter, an infrared pass filter, an infrared cutoff filter and a band pass filter passing a determined bandwidth, or a multi-filter which includes two or more filters selected from the group.

### Claim 6 (depends on 1)

The image sensor according to claim 1, wherein the plurality of filters have a higher refractive index than the air spacer.

### Claim 7 (depends on 1)

The image sensor according to claim 1, wherein the air spacers have a form of a mesh.

### Claim 8 (depends on 1)

The image sensor according to claim 1, wherein the protection layer has a lower refractive index than the plurality of filters and a higher refractive index than the air spacer.

### Claim 9 (depends on 1)

The image sensor according to claim 1, wherein the protection layer includes a thermosetting material.