# US 9,520,423 B2 · Image sensors including non-aligned grid patterns

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- Number: US 9,520,423 B2
- Document ID: US9520423B2
- Status: Granted
- Kind: B2
- Application number: 14/966,587
- Filed: 2015-12-11
- Published: 2016-06-16
- Granted: 2016-12-13
- Earliest claimed: 2014-12-11
- Assignees: Samsung Electronics Co., Ltd.
- Applicants: Samsung Electronics Co., Ltd.
- Inventors: Yun Ki Lee; Joonkyoung Lee
- Web page: https://patentgrep.com/patent/US9520423B2

## CPC

- H10F 39/182: {Colour image sensors}
- H10F 39/199: {Back-illuminated image sensors}
- H10F 39/8023: {Disposition of the elements in pixels, e.g. smaller elements in the centre of the imager compared to larger elements at the periphery}
- H10F 39/8027: {Geometry of the photosensitive area}
- H10F 39/803: {Pixels having integrated switching, control, storage or amplification elements}
- H10F 39/805: {Coatings}
- H10F 39/8053: {Colour filters}
- H10F 39/8063: {Microlenses}
- H10F 39/8067: {Reflectors}
- H10F 39/807: {Pixel isolation structures}
- H10F 39/809: {of hybrid image sensors}
- H10F 39/811: {Interconnections}
- H10F: INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION

## Abstract

An image sensor includes a substrate including a first surface and a second surface, a first device isolation layer disposed in the substrate and defining a plurality of pixels in the substrate, and having a lower surface adjacent the first surface of the substrate and an upper surface adjacent the second surface of the substrate. Each of the pixels includes a photoelectric conversion element, a floating diffusion region adjacent the first surface of the substrate, and a grid pattern on the second surface of the substrate. At least one of the grid patterns is not vertically aligned with the first device isolation layer.

## Claims

### Claim 1

An image sensor comprising:
a substrate including a first surface and a second surface opposite the first surface; and
a first device isolation layer in the substrate and defining a plurality of pixels in the substrate;
wherein each of the plurality of pixels comprises:
a photoelectric conversion element;
a floating diffusion region adjacent the first surface of the substrate;
a grid pattern on the second surface of the substrate; and
a color filter on the second surface of the substrate, the color filter corresponding to the photoelectric conversion element,
wherein at least one grid pattern is laterally offset from the first device isolation layer, and
wherein at least one color filter is laterally offset from a corresponding one of the pixels.

### Claim 2 (depends on 1)

The image sensor of claim 1,
wherein the first device isolation layer includes a lower surface proximate to the first surface of the substrate and an upper surface proximate to the second surface of the substrate, and
wherein the lower surface of the first device isolation layer and the upper surface of the first device isolation layer are opposite to each other.

### Claim 3 (depends on 1)

The image sensor of claim 1, wherein the laterally offset grid pattern vertically overlaps a partial region of the photoelectric conversion element that is adjacent to the first device isolation layer.

### Claim 4 (depends on 1)

The image sensor of claim 1, further comprising:
an interconnection structure on the first surface of the substrate; and
a micro-lens disposed on the color filter.

### Claim 5 (depends on 1)

The image sensor of claim 1,
wherein the pixels include a first pixel and a second pixel, and
wherein the color filter is disposed between the grid pattern of the first pixel and the grid pattern of the second pixel to cover the photoelectric conversion element of the first pixel and a partial region of the photoelectric conversion element of the second pixel.

### Claim 6 (depends on 4)

The image sensor of claim 4, wherein the micro-lens includes a first point and a second point at which a top surface and a bottom surface of the micro-lens meet each other, and
wherein the first point is aligned with one sidewall of the color filter and the second point is aligned with another sidewall of the color filter.

### Claim 7 (depends on 4)

The image sensor of claim 4,
wherein the pixels include a first pixel and a second pixel,
wherein the micro-lens includes a first point and a second point at which a top surface and a bottom surface of the micro-lens meet each other, and
wherein the first point is disposed on a top surface of the color filter disposed in the first pixel and the second point is disposed on a top surface of the color filter disposed in the second pixel.

### Claim 8 (depends on 1)

The image sensor of claim 1, wherein the pixels include a first pixel and a second pixel, and
wherein the color filter covers a top surface of the grid pattern disposed in each of the pixels, the image sensor further comprising:
an isolation member between the color filter of the first pixel and the color filter of the second pixel.

### Claim 9 (depends on 1)

The image sensor of claim 1, wherein a shortest distance between a center of the grid pattern and the second surface of the substrate is smaller than a shortest distance between the center of the grid pattern and a midpoint of the upper surface of the first device isolation layer.

### Claim 10 (depends on 1)

The image sensor of claim 1, wherein the substrate comprises: a central region; a first edge region surrounding a first side of the central region and a third side of the central region adjacent to the first side; and a second edge region surrounding a second side of the central region and a fourth side of the central region adjacent to the second side,
wherein the pixels comprise: a first pixel disposed in the first edge region; a second pixel disposed in the central region; and a third pixel disposed in the second edge region,
wherein the grid pattern disposed in the first pixel is laterally offset from the first device isolation layer, and
wherein the color filter of the first pixel is laterally offset from the first pixel.

### Claim 11 (depends on 10)

The image sensor of claim 10,
wherein the grid pattern disposed in the second pixel vertically overlaps with the first device isolation layer, and
wherein the color filter of the second pixel vertically overlaps the second pixel.

### Claim 12 (depends on 11)

The image sensor of claim 11,
wherein the grid pattern disposed in the third pixel is laterally offset from the first device isolation layer, and
wherein the color filter of the third pixel is laterally offset from the third pixel.

### Claim 13 (depends on 12)

The image sensor of claim 12, wherein the grid pattern disposed in the first pixel vertically overlaps a partial region of the photoelectric conversion element that is adjacent to the first device isolation layer,
wherein the partial region of the photoelectric conversion element of the first pixel is spaced away from the floating diffusion region of the first pixel, and
wherein the grid pattern in the third pixel vertically overlaps the floating diffusion region of the third pixel which is adjacent to the first device isolation layer.

### Claim 14 (depends on 12)

The image sensor of claim 12, wherein shortest distances from centers of the grid patterns to midpoints of the upper surface of the first device isolation layers are gradually increased from the central region toward the first edge region and are gradually increased from the central region toward the second edge region.

### Claim 15 (depends on 14)

The image sensor of claim 14, wherein a distance by which the grid pattern of the first pixel is shifted from the upper surface of the first device isolation layer of the first pixel in a first direction is greater than a distance by which the grid pattern of the second pixel is shifted from the upper surface of the first device isolation layer of the second pixel in the first direction,
wherein a distance by which the grid pattern of the third pixel is shifted from the upper surface of the first device isolation layer of the third pixel in a second direction opposite to the first direction is greater than a distance by which the grid pattern of the second pixel is shifted from the upper surface of the first device isolation layer of the second pixel in the second direction, and
wherein the first and second directions are parallel to the second surface of the substrate.

### Claim 16

An image sensor comprising:
a substrate;
first and second pixels in the substrate;
a device isolation layer between the first and second pixels;
first and second color filters on the substrate above the first and second pixels, respectively; and
a grid pattern on the substrate between the first and second color filters;
wherein the grid pattern is laterally offset from the device isolation layer, and
wherein the first color filter is laterally offset from the first pixel.

### Claim 17 (depends on 16)

The image sensor of claim 16, wherein the grid pattern does not vertically overlap the device isolation layer.

### Claim 18 (depends on 16)

The image sensor of claim 16, wherein the grid pattern overlaps a partial region of a photoelectric conversion element in the first pixel.

### Claim 19

An image sensor comprising:
a substrate;
a plurality of pixels in the substrate, each of the plurality of pixels comprising a photoelectric conversion element;
a plurality of device isolation layers between respective ones of the plurality of pixels;
a plurality of color filters on the substrate above respective ones of the plurality of pixels; and
a plurality of grid patterns on the substrate and disposed between respective ones of the color filters and exposing the photoelectric conversion elements of the plurality of pixels;
wherein the plurality of grid patterns are laterally offset from the plurality of device isolation layers, and
wherein the plurality of color filters are laterally offset from the respective ones of the plurality of pixels.

### Claim 20 (depends on 19)

The image sensor of claim 19, wherein the plurality of grid patterns overlap partial regions of photoelectric conversion elements of the plurality of pixels.