# US 9,520,356 B1 · Circuit with reduced noise and controlled frequency

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- Number: US 9,520,356 B1
- Document ID: US9520356B1
- Status: Granted
- Kind: B1
- Application number: 14/849,395
- Filed: 2015-09-09
- Granted: 2016-12-13
- Earliest claimed: 2015-09-09
- Assignees: Analog Devices, Inc.
- Applicants: Analog Devices, Inc.
- Inventors: John A. Chiesa; Cemin Zhang; Byungmoo Min; Ekrem Oran; John N. Poelker
- Web page: https://patentgrep.com/patent/US9520356B1

## CPC

- H10W 20/42: Vias, e.g. via plugs
- H01P 3/00: Waveguides; Transmission lines of the waveguide type
- H03L 7/24: using a reference signal directly applied to the generator
- H10W 40/228: {the projecting parts being wire-shaped or pin-shaped}
- H10W 42/20: protecting against electromagnetic or particle radiation, e.g. light, X-rays, gamma-rays or electrons
- H10W 44/20: at high-frequency [HF] or radio frequency [RF]
- H10W 46/00: Marks applied to devices, e.g. for alignment or identification
- H10W 70/635: {Through-vias}
- H10W 70/65: Shapes or dispositions of interconnections
- H10W 44/251: {for monolithic microwave integrated circuits [MMIC]}
- H10W 46/101: {characterised by the type of information, e.g. logos or symbols}
- H10W 46/301: {for alignment}
- H10W 46/607: {Located on parts of packages, e.g. on encapsulations or on package substrates}
- H10W 74/114: {by a substrate and the encapsulations}
- H10W 90/724: {between a chip and a stacked insulating package substrate, interposer or RDL}
- H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
- H01P: WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE (operating at optical frequencies G02B)
- H03L: AUTOMATIC CONTROL, STARTING, SYNCHRONISATION OR STABILISATION OF GENERATORS OF ELECTRONIC OSCILLATIONS OR PULSES (generation of oscillations H03B)

## Abstract

A die is packaged by flip-chip mounting the die with the active side facing a low loss substrate. A ground plane is coupled to the active side of the die by vias through the low loss substrate. The ground plane is positioned to concentrate high frequency electromagnetic fields in the low loss substrate. A tuning height can be adjusted to tune the center frequency of a circuit in the die.

## Claims

### Claim 1

A packaged chip comprising:
a packaging substrate comprising a first side and a second side, the second side opposing the first side;
a die comprising:
a semiconductor substrate that is more lossy than the packaging substrate; and
a resonator circuit comprising microstrip lines, on an active side of the die, the active side facing the first side of the packaging substrate; and
a ground plane that is external to the die, the ground plane being separated from the resonator circuit by at least a portion of the packaging substrate, and the ground plane being electrically coupled to the die.

### Claim 2 (depends on 1)

The packaged chip of claim 1, wherein the ground plane is the nearest ground plane to the resonator circuit.

### Claim 3 (depends on 1)

The packaged chip of claim 1, wherein the die does not include any ground planes.

### Claim 4 (depends on 1)

The packaged chip of claim 1, wherein the ground plane is positioned relative to the resonator circuit so as to concentrate radio frequency electromagnetic fields more in at least a portion of the packaging substrate than in the semiconductor substrate.

### Claim 5 (depends on 1)

The packaged chip of claim 1, wherein the ground plane and the die are disposed on the opposite sides of the packaging substrate.

### Claim 6 (depends on 1)

The packaged chip of claim 1, further comprising a packaging material in physical contact with a back side of the die, the back side of the die opposing the active side of the die.

### Claim 7 (depends on 1)

The packaged chip of claim 1 further comprising a bump coupled to the active side of the die such that the active side of the die is separated from the packaging substrate.

### Claim 8 (depends on 1)

The packaged chip of claim 1, wherein the packaging substrate is a laminate substrate.

### Claim 9 (depends on 1)

The packaged chip of claim 1, wherein the packaging substrate comprises at least one of a glass material, a ceramic material, or a ferrite material.

### Claim 10 (depends on 1)

The packaged chip of claim 1, wherein the semiconductor substrate comprises a doped silicon material, and wherein the resonator circuit is a strip resonator.

### Claim 11 (depends on 1)

The packaged chip of claim 1, wherein the die comprises a microwave monolithic integrated circuit comprising a voltage controlled oscillator that comprises the resonator.

### Claim 12

An electronic system comprising:
a resonator circuit on an active side of a microwave monolithic integrated circuit (MMIC) that comprises a semiconductor substrate;
a packaging substrate that is less lossy than the semiconductor substrate; and
a ground plane;
wherein a positioning of the ground plane relative to the resonator circuit is configured to concentrate microwave frequency electromagnetic fields more in at least a portion of the packaging substrate than in the semiconductor substrate.

### Claim 13 (depends on 12)

The system of claim 12, wherein the MMIC is flip chip mounted so that the active side of the die faces the packaging substrate.

### Claim 14 (depends on 12)

The system of claim 12, wherein the ground plane separated from the resonator circuit by at least a part of the packaging substrate.

### Claim 15 (depends on 14)

The system of claim 14, wherein the ground plane and the resonator circuit are positioned on opposite sides of the packaging substrate.

### Claim 16 (depends on 12)

The system of claim 12, further comprising a via extending through at least a portion of the packaging substrate, the via providing an electrical connection between the ground plane and the resonator circuit.

### Claim 17 (depends on 12)

The system of claim 12, further comprising a bump coupled between the active side of the MMIC and the packaging substrate.

### Claim 18 (depends on 12)

The system of claim 12, wherein the MMIC comprises a voltage controlled oscillator (VCO) that receives a signal from the resonator circuit, the VCO configured to output a signal that oscillates at a frequency that varies based, at least in part, on a voltage of an input signal.

### Claim 19

A chip assembly method comprising:
providing a die comprising a resonator; and
flip chip mounting the die on a packaging substrate such that an active side of the die is electrically coupled to a ground plane external to the die by way of a via in the packaging substrate, wherein the packaging substrate has a lower loss than a semiconductor substrate of the die, wherein a distance from the ground plane to the resonator impacts a center frequency of the resonator, and wherein the ground plane is the nearest ground plane to the resonator.

### Claim 20 (depends on 19)

The method of claim 19, further comprising:
providing a second die that is substantially the same as the die; and
flip-chip mounting the second die on a second packaging substrate such that an active side of the second die is electrically coupled to a second ground plane external to the second die by way of a via in the second packaging substrate, wherein the second packaging substrate has a lower loss than a semiconductor substrate of the second die, and wherein a second distance that separates a resonator of the second die from the second ground plane is different than the distance such that the resonator of the second die has a second center frequency that is different than the center frequency.