# US 9,520,316 B2 · Separation device and pickup system

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- Number: US 9,520,316 B2
- Document ID: US9520316B2
- Status: Granted
- Kind: B2
- Application number: 14/493,034
- Filed: 2014-09-22
- Published: 2015-03-26
- Granted: 2016-12-13
- Earliest claimed: 2013-09-26
- Assignees: Tesec Corporation
- Applicants: TESEC Corporation
- Inventors: Takashi Kurakane
- Web page: https://patentgrep.com/patent/US9520316B2

## CPC

- H10P 72/7402: {Wafer tapes, e.g. grinding or dicing support tapes}
- H10P 72/0442: {Apparatus for placing on an insulating substrate, e.g. tape}
- H10P 72/78: using vacuum or suction, e.g. Bernoulli chucks
- B32B 2457/14: Semiconductor wafers
- H10P 72/7414: {the auxiliary support including means facilitating the selective separation of some of a plurality of devices from the auxiliary support}
- H10P 72/7442: {Separation by peeling}
- Y10S 156/932: with poking during delaminating, e.g. jabbing release sheet backing to remove wafer
- Y10S 156/943: with poking delaminating means, e.g. jabbing means
- Y10T 156/1132: Using vacuum directly against work during delaminating
- Y10T 156/1944: Vacuum delaminating means [e.g., vacuum chamber, etc.]
- Y10T 156/1978: Delaminating bending means
- Y10T 156/1983: Poking delaminating means
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- B32B: LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION

## Abstract

A separation device includes a mount table, projecting portion, and drawing port. The mount table includes a mount surface on which a pressure sensitive adhesive sheet, on which an electronic component is stuck, is mounted. The electronic component is stuck on one surface of the pressure sensitive adhesive sheet, and the mount surface is in contact with the other surface of the pressure sensitive adhesive sheet. The projecting portion is formed on the mount surface and projects toward the pressure sensitive adhesive sheet mounted on the mount surface. The drawing port is open near the projecting portion on the mount surface, and when a negative pressure is applied, draws the pressure sensitive adhesive sheet.

## Claims

### Claim 1

A separation device comprising:
a mount table including a mount surface on which a pressure sensitive adhesive sheet, on which an electronic component is stuck, is mounted, the electronic component being stuck on one surface of the pressure sensitive adhesive sheet and the mount surface being in contact with the other surface of the pressure sensitive adhesive sheet;
a holding device, which holds the pressure sensitive adhesive sheet and moves the pressure sensitive adhesive sheet in a first direction parallel to the mount surface;
a projecting portion, which is fixed onto the mount surface and projects toward the pressure sensitive adhesive sheet mounted on the mount surface, the projecting portion having a length in the first direction longer than a length of the projecting portion in a second direction parallel to the mount surface and perpendicular to the first direction; and
a drawing port which is open near the projecting portion on the mount surface, and when a negative pressure is applied, draws the pressure sensitive adhesive sheet.

### Claim 2 (depends on 1)

The device according to claim 1, wherein an area of a region of the projecting portion where the projecting portion is face to face with the electronic component via the pressure sensitive adhesive sheet is smaller than an area of a base of the projecting portion.

### Claim 3 (depends on 2)

The device according to claim 2, wherein the projecting portion extends in the first direction, and the projecting portion includes a sloped portion of which an amount of projection increases in the first direction.

### Claim 4 (depends on 3)

The device according to claim 3, wherein the projecting portion includes a portion of which the length in the second direction decreases in the first direction.

### Claim 5 (depends on 2)

The device according to claim 2, wherein the drawing port includes a first opening and a second opening which are formed on two sides of the projecting portion extending in the first direction.

### Claim 6 (depends on 1)

The device according to claim 1, further comprising a push-up pin which is formed on the mount table and pushes up the electronic component via the pressure sensitive adhesive sheet.

### Claim 7

A pickup system comprising:
a pressure sensitive adhesive sheet having one surface on which an electronic component is stuck;
a holding device, which movably holds the pressure sensitive adhesive sheet;
a separation device, which separates the electronic component from the pressure sensitive adhesive sheet; and
a suction device, which sucks the electronic component separated by the separation device,
the separation device including:
a mount table including a mount surface on which the pressure sensitive adhesive sheet is mounted to bring the other surface of the pressure sensitive adhesive sheet into contact with the mount surface;
a projecting portion, which is fixed onto the mount surface and projects toward the pressure sensitive adhesive sheet mounted on the mount surface, the projecting portion having a length in a first direction parallel to the mount surface longer than that of the electronic component and the projecting portion having a length in a second direction parallel to the mount surface and perpendicular to the first direction shorter than that of the electronic component; and
a drawing port which is open near the projecting portion on the mount surface, and when a negative pressure is applied, draws the pressure sensitive adhesive sheet,
wherein the holding device is configured to move the pressure sensitive adhesive sheet in the first direction.