# US 9,520,264 B2 · Method and apparatus for clamping and cooling a substrate for ion implantation > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,520,264 B2 - Document ID: US9520264B2 - Status: Granted - Kind: B2 - Application number: 13/424,286 - Filed: 2012-03-19 - Published: 2013-09-19 - Granted: 2016-12-13 - Earliest claimed: 2012-03-19 - Assignees: Varian Semiconductor Equipment Associates, Inc. - Applicants: Jeffrey E. Krampert; Richard J. Hertel; John Robert Fairhurst - Inventors: Jeffrey E. Krampert; Richard J. Hertel; John Robert Fairhurst - Web page: https://patentgrep.com/patent/US9520264B2 ## CPC - H01J 37/20: Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support - C23C 14/221: {Ion beam deposition (C23C14/46, C23C14/48 take precedence)} - C23C 14/50: Substrate holders - C23C 14/541: {Heating or cooling of the substrates} - H01J 37/3171: {for ion implantation} - H10P 72/0434: {mainly by convection} - H10P 72/7608: {characterised by a plurality of separate clamping members, e.g. clamping fingers} - H10P 72/7626: {characterised by the construction of the shaft} - H01J 2237/2001: Maintaining constant desired temperature - Y10T 29/49998: Work holding - H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H) - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract A system and method are disclosed for holding and cooling substrates during processing. A substrate clamp has an engagement portion for engaging a substrate about the inside diameter as well as a portion of the substrate surface immediately adjacent to the inside diameter. The clamp has a retracted position which enables the engagement portion to fit through the substrate ID, and an expanded position which enables the engagement portion to engage the substrate ID and the substrate surface immediately adjacent to the inside diameter. The clamp can include a conformal coating to enhance engagement between the substrate and the engagement portion. The clamp can also include an energy absorbing coating on one or more surfaces to maximize the absorption of radiative energy emitted from the substrate. Other embodiments are described and claimed. ## Claims ### Claim 1 A substrate clamping assembly for holding a substrate having an inside diameter (ID) during processing, the clamping assembly comprising: a substrate support portion configured to support a portion of the bottom face of the substrate disposed immediately adjacent to the ID; a clamp portion configured to releasably engage a top face of the substrate disposed immediately adjacent to the ID; and a clamp actuator disposed for reciprocal movement between first and second positions within the clamp portion; wherein the first position of the clamp actuator corresponds to an engaged configuration of the clamping assembly, and the second position of the clamp actuator corresponds to a non-engaged configuration of the clamping assembly; and wherein the substrate is clamped between the substrate support portion and the clamp portion when the clamping assembly is in the engaged configuration, and the substrate is removable from the substrate support portion when the clamping assembly is in the non-engaged configuration, wherein the clamp portion comprises a cylindrical member having a plurality of slots, the clamp portion being inwardly biased so that an outer diameter of a first end of the clamp portion in the non-engaged configuration is smaller than an outer diameter of the first end of the clamp portion in the engaged configuration, and wherein the clamp portion comprises a cylindrical member having a plurality of slots, the clamp portion being inwardly biased so that an outer diameter of a first end of the clamp portion in the non-engaged configuration is smaller than an outer diameter of the first end of the clamp portion in the engaged configuration. ### Claim 2 (depends on 1) The clamping assembly of claim 1, wherein the substrate support portion and the clamp portion are engageable with the substrate on respective engagement surfaces, the engagement surfaces comprising a resilient polymer. ### Claim 3 (depends on 1) The clamping assembly claim 1, further comprising a base member, the support portion received within a recess in the base member and the clamp portion received within a recess in the support portion, wherein at least one of the base member, the support portion and the clamp portion include at least one coolant channel for receiving coolant fluid flow. ### Claim 4 (depends on 1) The clamping assembly of claim 1, further comprising a base member, the support portion received by the base member, the base member having a surface disposed adjacent to the bottom face of the substrate, the surface comprising a black body emitter coating for maximizing absorption of radiative heat energy from the substrate and for minimizing reflection of radiative heat energy from the substrate. ### Claim 5 (depends on 4) The clamping assembly of claim 4, wherein the black body emitter coating comprises a ceramic material. ### Claim 6 A substrate clamping assembly for holding and cooling a substrate having an inside diameter (ID) during processing, the clamping assembly comprising: a substrate support portion configured to support a first portion of the bottom face of the substrate; a clamp portion configured to releasably engage a second portion of the top face of the substrate; a clamp actuator disposed for reciprocal movement between first and second positions within the clamp portion, the first position of the clamp actuator corresponding to an engaged configuration of the clamping assembly, and the second position of the clamp actuator corresponding to a non-engaged configuration of the clamping assembly; and a cooling arrangement thermally coupled to at least one of the substrate support portion, the clamp portion and the clamp actuator; wherein the substrate is clamped between the substrate support portion and the clamp portion when the clamping assembly is in the engaged configuration; and wherein the first portion of the bottom face and the second portion of the top face comprise an annular surface region surrounding the substrate ID to enable conductive cooling of the substrate via the cooling arrangement. ### Claim 7 (depends on 6) The substrate clamping assembly of claim 6, wherein the cooling arrangement includes at least one coolant channel disposed in at least one of the substrate support portion, the clamp portion or the clamp actuator. ### Claim 8 (depends on 6) The substrate clamping assembly of claim 6, wherein the cooling arrangement includes a reservoir for receiving a coolant fluid. ### Claim 9 (depends on 6) The substrate clamping assembly of claim 6, wherein the clamp portion comprises a cylindrical member having a plurality of slots, the clamp portion being inwardly biased so that an outer diameter of a first end of the clamp portion in the non-engaged configuration is smaller than an outer diameter of the first end of the clamp portion in the engaged configuration. ### Claim 10 (depends on 9) The substrate clamping assembly of claim 9, wherein the clamp actuator comprises an actuating portion received within the clamp portion such that movement of the actuating portion towards the first end of the clamp portion expands the clamp portion to configure the clamp portion in the engaged configuration. ### Claim 11 (depends on 9) The substrate clamping assembly of claim 9, further comprising a base member, the support portion received by the base member, the base member having a surface disposed adjacent to the bottom face of the substrate, the surface comprising a black body emitter coating for maximizing absorption of radiative heat energy from the substrate and for minimizing reflection of radiative heat energy from the substrate. ### Claim 12 (depends on 6) The substrate clamping assembly of claim 6, wherein the substrate support portion and the clamp portion are engageable with the substrate on respective engagement surfaces, the engagement surfaces comprising a resilient polymer. ### Claim 13 A substrate clamping assembly for holding a substrate having an inside diameter (ID) during processing, the clamping assembly comprising: a substrate support portion configured to support a portion of the bottom face of the substrate disposed immediately adjacent to the ID; a clamp portion configured to releasably engage a top face of the substrate disposed immediately adjacent to the ID; and a clamp actuator disposed for reciprocal movement between first and second positions within the clamp portion; and a base member, the support portion received within a recess in the base member and the clamp portion received within a recess in the support portion, wherein at least one of the base member, the support portion and the clamp portion include at least one coolant channel for receiving coolant fluid flow, wherein the first position of the clamp actuator corresponds to an engaged configuration of the clamping assembly, and the second position of the clamp actuator corresponds to a non-engaged configuration of the clamping assembly; and wherein the substrate is clamped between the substrate support portion and the clamp portion when the clamping assembly is in the engaged configuration, and the substrate is removable from the substrate support portion when the clamping assembly is in the non-engaged configuration. ### Claim 14 A substrate clamping assembly for holding a substrate having an inside diameter (ID) during processing, the clamping assembly comprising: a substrate support portion configured to support a portion of the bottom face of the substrate disposed immediately adjacent to the ID; a clamp portion configured to releasably engage a top face of the substrate disposed immediately adjacent to the ID; and a clamp actuator disposed for reciprocal movement between first and second positions within the clamp portion; and a base member, the support portion received by the base member, the base member having a surface disposed adjacent to the bottom face of the substrate, the surface comprising a black body emitter coating for maximizing absorption of radiative heat energy from the substrate and for minimizing reflection of radiative heat energy from the substrate, wherein the first position of the clamp actuator corresponds to an engaged configuration of the clamping assembly, and the second position of the clamp actuator corresponds to a non-engaged configuration of the clamping assembly; and wherein the substrate is clamped between the substrate support portion and the clamp portion when the clamping assembly is in the engaged configuration, and the substrate is removable from the substrate support portion when the clamping assembly is in the non-engaged configuration. ### Claim 15 (depends on 14) The clamping assembly of claim 14, wherein the black body emitter coating comprises a ceramic material.