# US 9,519,225 B2 · Systems and methods for high-throughput and small-footprint scanning exposure for lithography

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- Number: US 9,519,225 B2
- Document ID: US9519225B2
- Status: Granted
- Kind: B2
- Application number: 14/962,266
- Filed: 2015-12-08
- Published: 2016-03-31
- Granted: 2016-12-13
- Earliest claimed: 2013-09-18
- Assignees: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicants: Taiwan Semiconductor Manufacturing Company, Ltd.
- Inventors: Burn Jeng Lin; Shy-Jay Lin; Jaw-Jung Shin; Wen-Chuan Wang
- Web page: https://patentgrep.com/patent/US9519225B2

## CPC

- G03F 7/70275: {Multiple projection paths, e.g. array of projection systems, microlens projection systems or tandem projection systems}
- G03F 7/70008: {Production of exposure light, i.e. light sources}
- G03F 7/7015: {Details of optical elements}
- G03F 7/70208: {Multiple illumination paths, e.g. radiation distribution devices, microlens illumination systems, multiplexers or demultiplexers for single or multiple projection systems}
- G03F 7/70358: {Scanning exposure, i.e. relative movement of patterned beam and workpiece during imaging}
- G03F 7/70716: {Stages}
- G03F 7/70725: {control}
- H10P 72/57: {Mask-wafer alignment}
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

The present disclosure provides a lithography system comprising a radiation source and an exposure tool including a plurality of exposure columns densely packed in a first direction. Each exposure column includes an exposure area configured to pass the radiation source. The system also includes a wafer carrier configured to secure and move one or more wafers along a second direction that is perpendicular to the first direction, so that the one or more wafers are exposed by the exposure tool to form patterns along the second direction. The one or more wafers are covered with resist layer and aligned in the second direction on the wafer carrier.

## Claims

### Claim 1

A lithography apparatus, comprising:
a wafer carrier configured to hold one or more wafers and move the one or more wafers along a scanning direction;
a radiation source configured to produce radiation;
a unit column assembly (UCA) that includes a plurality of exposure columns each configured to pass the radiation through a respective exposure area of the exposure column;
wherein the exposure columns are arranged in the UCA such that:
a first plurality of the exposure columns are disposed adjacent to one another in a stepping direction; and
a second plurality of the exposure columns are disposed adjacent to one another in the scanning direction, the scanning direction being different from the stepping direction; and
a controller that is configured to perform a “step-and-scan” exposure process in which the one or more wafers are scanned in the scanning direction and stepped in the stepping direction, and wherein a stepping distance in the “step-and-scan” exposure process is less than a dimension of the exposure area in the stepping direction.

### Claim 2 (depends on 1)

The lithography apparatus of claim 1, further comprising: metrology tools configured to measure positional information of the one or more wafers in both the stepping direction and the scanning direction.

### Claim 3 (depends on 1)

The lithography apparatus of claim 1, wherein the UCA is configured to expose more than one wafer during a single exposure operation without performing a wafer exchange.

### Claim 4 (depends on 1)

The lithography apparatus of claim 1, wherein the first plurality of the exposure columns are offset from one another in the stepping direction.

### Claim 5 (depends on 4)

The lithography apparatus of claim 4, wherein an offset between the first plurality of the exposure columns is substantially equal to a radius of the exposure column.

### Claim 6 (depends on 5)

The lithography apparatus of claim 5, further comprising: a plurality of unit column assemblies (UCAs) disposed along the scanning direction.

### Claim 7 (depends on 6)

The lithography apparatus of claim 6, wherein an offset in the stepping direction exists between adjacent UCAs, the offset being less than a radius of the exposure column.

### Claim 8 (depends on 1)

The lithography apparatus of claim 1, wherein the radiation source is configured to generate photons, electrons, or ions as the radiation.

### Claim 9

A lithography system, comprising:
a radiation source configured to produce radiation;
a wafer carrier configured to hold and move one or more wafers;
a controller configured to control the wafer carrier to move the one or more wafers along both a scanning direction and a stepping direction in a “step-and-scan” exposure process, the stepping direction different from the scanning direction; and
a plurality of unit column assemblies (UCAs) disposed along the scanning direction, the UCAs each including at least a first row and a second row of exposure columns, the exposure columns each being configured to pass the radiation through a respective exposure area of the exposure column, wherein the first and second rows each extend in the stepping direction and are disposed relative to one another in the scanning direction, and wherein adjacent UCAs are offset in the stepping direction by a distance that is less than a radius of the exposure column.

### Claim 10 (depends on 9)

The lithography system of claim 9, wherein a stepping distance in the “step-and-scan” exposure process is less than a dimension of the exposure area in the stepping direction.

### Claim 11 (depends on 9)

The lithography system of claim 9, further comprising: wafer metrology equipment configured to acquire positional data of the wafer carrier, or positional data of the UCA, or combinations thereof.

### Claim 12 (depends on 9)

The lithography system of claim 9, wherein a dimension of the UCA in the stepping direction exceeds a diameter of each of the one or more wafers.

### Claim 13 (depends on 9)

The lithography system of claim 9, wherein the first row is offset from the second row in the stepping direction by a distance that is substantially equal to a radius of the exposure column.

### Claim 14

A method of performing lithography, comprising:
providing a radiation source;
providing an exposure tool that includes one or more unit column assemblies (UCAs), each UCA including at least a first row and a second row of exposure columns, wherein the first and second rows each extend in a first direction and include a respective plurality of the exposure columns, and wherein the first and second rows are disposed relative to one another in a second direction different from the first direction; and
exposing, by passing the radiation source through an exposure area of each exposure column, one or more wafers in a “step-and-scan” process in which the one or more wafers are scanned along the second direction and stepped along the first direction, and wherein the exposing comprises configuring a stepping distance in the “step-and-scan” exposure process to be less than a dimension of the exposure area in the first direction.

### Claim 15 (depends on 14)

The method of claim 14, wherein the providing of the exposure tool is performed such that a dimension of each UCA in the first direction exceeds a diameter of each of the one or more wafers.

### Claim 16 (depends on 14)

The method of claim 14, wherein the providing of the exposure tool is performed such that the first row is offset from the second row in the first direction by a distance that is substantially equal to a radius of the exposure column.

### Claim 17 (depends on 1)

The lithography apparatus of claim 1, wherein a dimension of the UCA in the stepping direction exceeds a diameter of each of the one or more wafers.

### Claim 18 (depends on 14)

The method of claim 14, wherein the providing of the radiation source comprises generating photons, electrons, or ions as radiation.

### Claim 19 (depends on 14)

The method of claim 14, further comprising using metrology tools to measure positional information of the one or more wafers in both the first direction and the second direction.

### Claim 20 (depends on 14)

The method of claim 14, wherein the one or more UCAs comprise a plurality of UCAs that are disposed along the second direction.