# US 9,519,212 B2 · Mask inspection apparatus and method of controlling the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,519,212 B2 - Document ID: US9519212B2 - Status: Granted - Kind: B2 - Application number: 13/966,271 - Filed: 2013-08-13 - Published: 2014-06-19 - Granted: 2016-12-13 - Earliest claimed: 2012-12-14 - Assignees: Samsung Display Co., Ltd. - Applicants: Samsung Display Co., Ltd. - Inventors: Hun-Jung Park - Web page: https://patentgrep.com/patent/US9519212B2 ## CPC - G03F 1/84: Inspecting - G01N 21/94: Investigating contamination, e.g. dust (G01N21/85 takes precedence) - G01N 21/956: Inspecting patterns on the surface of objects {(contactless testing of electronic circuits G01R31/308; testing currency G07D; manufacturing processes per se of semiconductor devices implementing a measuring step H10P74/20)} - G01N 2021/95676: {Masks, reticles, shadow masks} - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) ## Abstract A mask inspection apparatus includes a mask transfer unit configured to transfer a mask in one of a first direction and a direction opposite to the first direction, a displacement sensor unit configured to measure a distance to a sheet of the mask transferred by the mask transfer unit, a photographic unit configured to photograph the sheet of the mask transferred by the mask transfer unit, a control unit configured to send a height control signal for controlling a height of the photographic unit according to the measured distance, and a height control unit configured to control the height of the photographic unit according to the height control signal sent by the control unit. ## Claims ### Claim 1 A mask inspection apparatus comprising: a mask transfer unit comprising at least one of a conveyor or a carrier to transfer a mask in one of a first direction and a direction opposite to the first direction; a displacement sensor unit comprising a displacement sensor, the displacement sensor unit being arranged above the conveyor or the carrier to measure a distance from the displacement sensor to an upper surface of a sheet of the mask transferred by the mask transfer unit; and a photographic unit comprising a camera, the camera being arranged above the conveyor or the carrier to photograph the upper surface of the sheet of the mask transferred by the mask transfer unit, a height of the photographic unit being controllable according to the distance measured by the displacement sensor. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein the at least one of the conveyor or the carrier is configured to transfer the mask in the first direction under the displacement sensor unit and then to the photographic unit. ### Claim 3 (depends on 2) The apparatus of claim 2, wherein the height of the photographic unit is continuously controllable according to the distance measured by the displacement sensor when the mask transfer unit transfers the mask in the first direction. ### Claim 4 (depends on 3) The apparatus of claim 3, wherein a distance from an area of the sheet of the mask photographed by the camera to the photographic unit is controllable within a set range. ### Claim 5 (depends on 1) The apparatus of claim 1, wherein a position of the displacement sensor unit in one of a second direction and a direction opposite to the second direction is controllable, the second direction intersecting a direction in which the height of the photographic unit is controllable and intersecting the first direction. ### Claim 6 (depends on 1) The apparatus of claim 1, wherein the displacement sensor unit comprises a plurality of displacement sensors separate from one another in a second direction, the second direction intersecting a direction in which the height of the photographic unit is controllable and intersecting the first direction. ### Claim 7 (depends on 6) The apparatus of claim 6, wherein a position of the photographic unit in one of the second direction and a direction opposite to the second direction is controllable. ### Claim 8 (depends on 7) The apparatus of claim 7, wherein the height of the photographic unit is continuously controllable according to the distance measured by the displacement sensor when the mask transfer unit transfers the mask in the first direction, wherein, the at least one of the conveyor or the carrier is configured to transfer the mask in the first direction under the displacement sensor unit and then to the photographic unit, wherein, after the mask transfer unit transfers the mask in the first direction, the position of the photographic unit in one of the second direction and the direction opposite to the second direction is controllable, and wherein, while the mask transfer unit is transferring the mask in the direction opposite to the first direction, the height of the photographic unit is controllable. ### Claim 9 (depends on 1) The apparatus of claim 1, wherein the photographic unit comprises a plurality of cameras separate from one another in a second direction, the second direction intersecting a direction in which the height of the photographic unit is controllable and intersects the first direction. ### Claim 10 (depends on 9) The apparatus of claim 9, wherein a height of each of the plurality of cameras is controllable. ### Claim 11 A method of controlling a mask inspection apparatus to manufacture a display, the method comprising: transferring a mask in a first direction using at least one of a conveyor or a carrier; measuring a distance from a displacement sensor of a displacement sensor unit to an upper surface of a sheet of the mask, wherein the displacement sensor is arranged above the conveyor or the carrier; controlling a height of a photographic unit according to the measured distance; and photographing the sheet of the mask using a camera of the photographic unit, wherein the camera is arranged above the conveyor or the carrier to photograph the upper surface of the sheet of the mask. ### Claim 12 (depends on 11) The method of claim 11, wherein, the transferring the mask in the first direction comprises transferring the mask under the displacement sensor unit and to the photographic unit. ### Claim 13 (depends on 12) The method of claim 12, wherein, in the transferring a mask in the first direction, the height of the photographic unit is continuously controlled according to the measured distance continuously obtained by the displacement sensor unit. ### Claim 14 (depends on 12) The method of claim 12, wherein the height of the photographic unit is controlled so that a distance from an area of the sheet of the mask photographed by the photographic unit to the photographic unit is controlled within a set range. ### Claim 15 (depends on 11) The method of claim 11, wherein, in the measuring the distance from a displacement sensor to an upper surface of a sheet of the mask, the distance from the displacement sensor to the upper surface of the sheet of the mask is obtained in a plurality of areas separate from one another in a second direction, the second direction intersecting a direction for controlling the height of the photographic unit and intersecting the first direction. ### Claim 16 (depends on 11) The method of claim 11, wherein the transferring the mask in the first direction comprises transferring the mask under the displacement sensor unit and to the photographic unit, the method further comprising: controlling a position of the photographic unit in one of a second direction and a direction opposite to the second direction, the second direction intersecting the direction for controlling the height of the photographic unit and intersecting the first direction; and transferring the mask in a direction opposite to the first direction, controlling the height of the photographic unit according to the measured distance. ### Claim 17 (depends on 11) The method of claim 11, wherein the photographic unit comprises a plurality of cameras separate from one another in a second direction, the second direction intersecting the direction for controlling the height of the photographic unit and intersecting the first direction, wherein the method further comprises: controlling the height of each of the plurality of cameras.