# US 9,519,210 B2 · Voltage contrast characterization structures and methods for within chip process variation characterization > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,519,210 B2 - Document ID: US9519210B2 - Status: Granted - Kind: B2 - Application number: 14/549,719 - Filed: 2014-11-21 - Published: 2016-05-26 - Granted: 2016-12-13 - Earliest claimed: 2014-11-21 - Assignees: International Business Machines Corporation - Applicants: International Business Machines Corporation - Inventors: Oliver D. Patterson; Yunsheng Song; Zhigang Song; Yongchun Xin - Web page: https://patentgrep.com/patent/US9519210B2 ## CPC - G03F 1/36: Masks having proximity correction features; Preparation thereof, e.g. optical proximity correction [OPC] design processes - G06F 30/39: Circuit design at the physical level (physical level design for reconfigurable circuits G06F30/347) - G06F 30/392: Floor-planning or layout, e.g. partitioning or placement - G06F 30/398: Design verification or optimisation, e.g. using design rule check [DRC], layout versus schematics [LVS] or finite element methods [FEM] (optical proximity correction [OPC] design processes G03F1/36) - H10P 74/27: {Structural arrangements therefor} - H10W 20/42: Vias, e.g. via plugs - G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G) - G06F: ELECTRIC DIGITAL DATA PROCESSING (computer systems based on specific computational models G06N) - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 ## Abstract A method for designing, a structure, method of inspecting and a computer system for designing voltage contrast integrated circuit characterization. The design method includes selecting a design level of a mask design shapes file; selecting a region of the design level having an open region having no design shapes and an adjacent circuit region having circuit design shapes; selecting a sub-region of the circuit region adjacent to the open region; copying design shapes of the sub-region to generate a characterization cell identical to the sub-region; modifying the characterization cell to generate a passive voltage contrast characterization cell; and placing the passive voltage contrast characterization cell into the open region adjacent to the sub-region to generate a modified design level. ## Claims ### Claim 1 A method, comprising: (a) selecting a design level of a mask design shapes file stored on a non-transitory memory unit of a computer; (b) after (a) selecting a region of said design level having an open region having no fill shapes or design shapes and an adjacent circuit region having circuit design shapes; (c) after (b) selecting a sub-region of said circuit region adjacent to said open region; (d) after (c) using said computer, copying circuit design shapes of said sub-region to generate a characterization cell identical to the circuit design shapes of said sub-region; (e) after (d) modifying said characterization cell to generate a passive voltage contrast characterization cell; and (f) before placing fill shapes and after (e) placing said passive voltage contrast characterization cell into said open region adjacent to said sub-region to generate a modified design level and storing said modified design level on said memory unit of said computer. ### Claim 2 (depends on 1) The method of claim 1, further including: after said placing said characterization cell into said open region performing optical proximity corrections to design shapes of both said circuit region and design shapes of said passive voltage contrast characterization cell. ### Claim 3 (depends on 2) The method of claim 2, further including: after said performing optical proximity corrections, adding design fill shapes to regions of said open region not containing a passive voltage contrast characterization cell; and after said adding design fill shapes, generating a mask dataset. ### Claim 4 (depends on 1) The method of claim 1, wherein said modifying said characterization cell comprises cropping the perimeter of said characterization cell. ### Claim 5 (depends on 4) The method of claim 4, wherein said modifying said characterization cell includes adding or removing design shapes to create a ground shape and shapes not connected to said ground shape. ### Claim 6 (depends on 1) The method of claim 1, further including: generating two or more identical copies of said passive voltage contrast characterization cell; modifying each of said two or more copies of said passive voltage contrast characterization cell to include a feature that is larger or smaller than a same feature of said passive voltage contrast characterization cell to generate two or more modified passive voltage contrast characterization cells; and placing said two or more modified passive voltage contrast characterization cell into said open region. ### Claim 7 (depends on 1) The method of claim 1, further including: selecting one or more additional design levels of said mask design shapes file; selecting additional sub-regions of said one or more additional design levels corresponding to said sub-region of said design level; copying design shapes of said additional sub-regions of said one or more design levels to one or more additional characterization cells; modifying said one or more characterization cells to generate one or more additional passive voltage contrast characterization cells; and placing said one or more additional passive voltage contrast characterization cells into additional open regions of one or more additional design levels that are adjacent to said additional sub-regions of one or more additional design levels; said passive voltage contrast characterization cell and said one or more additional passive voltage contrast characterization cells forming a single multi-layer passive voltage contrast characterization cell design. ### Claim 8 An integrated circuit chip, comprising: a first region having only circuit features; a second region having only a passive voltage contrast characterization cell, said passive voltage contrast characterization cell having first features duplicating the size and relative positions of circuit features of a sub-region of said first region and having second features interconnected to form a ground feature; a third region having only fill shapes; said fill shapes not connected to each other or to any shape of said first or second regions; and wherein said first and second features of said second region are not connected to said circuit features of said first region or to said fill shapes of said third region. ### Claim 9 (depends on 8) The integrated circuit of claim 8, wherein said ground feature of said passive voltage contrast characterization cell is a virtual ground not connected to any portion of said circuit features of said first region. ### Claim 10 (depends on 8) The integrated circuit of claim 8, wherein said passive voltage characterization cell is positioned adjacent to said sub-region. ### Claim 11 (depends on 8) The integrated circuit of claim 8, wherein(i) said circuit features and (ii) said first features and said second features of said passive voltage contrast cell, (iii) and said fill shapes comprise electrically conductive metal damascene wires. ### Claim 12 A method comprising: providing an integrated circuit chip comprising: a first region having circuit features; a second region having a passive voltage contrast characterization cell, said passive voltage contrast having first features duplicating the size and relative positions of circuit features of a sub-region of said first region and having second features interconnected to form a ground feature; a third region having fill shapes; said fill shapes not connected to each other or to any shape of said first or second regions; and wherein said first and second features of said second region are not connected to said circuit features of said first region or to said fill shapes of said third region; placing said integrated circuit chip in a scanning electron microscope (SEM); and using said SEM, performing an inspection of said passive voltage contrast characterization cell under voltage contrast conditions. ### Claim 13 (depends on 12) The method of claim 12, wherein said ground feature of said passive voltage contrast characterization cell is a virtual ground not connected to any portion of said circuit features of said first region. ### Claim 14 (depends on 12) The method of claim 12, wherein said ground feature is electrically connected to a ground of said integrated circuit. ### Claim 15 (depends on 12) The method of claim 12, wherein said passive voltage contrast characterization cell is positioned adjacent to said sub-region. ### Claim 16 (depends on 12) The method of claim 12, wherein (i) said circuit features and (ii) said first features and said second features of said passive voltage contrast cell, (iii) and said fill shapes comprise electrically conductive metal damascene wires. ### Claim 17 (depends on 12) The method of claim 12, wherein said passive voltage contrast characterization cell comprises electrically conductive vias connecting electrically conductive metal damascene wires in a first wiring level to electrically conductive metal damascene wires in second adjacent wiring level. ### Claim 18 (depends on 12) The method of claim 12, wherein said integrated circuit chip is partially fabricated and said inspection is performed while said integrated circuit chip is integral to a semiconductor wafer containing a multiplicity of individual integrated circuit chips. ### Claim 19 (depends on 12) The method of claim 12, wherein said integrated circuit chip is partially fabricated and said inspection is performed after a chemical-mechanical-polish process step and while said integrated circuit chip is integral to a semiconductor wafer containing a multiplicity of individual integrated circuit chips. ### Claim 20 A computer system comprising a processor, a memory coupled to the processor, and a computer readable storage device coupled to the processor, said storage device containing program code configured to be executed by the processor via the memory to implement a method for designing a voltage contrast characterization cell, said method comprising: (a) selecting a design level of a mask design shapes file stored on a non-transitory memory unit of the computer; (b) after (a) selecting a region of said design level having an open region having no fill shapes or design shapes and an adjacent circuit region having circuit design shapes; (c) after (b) selecting a sub-region of said circuit region adjacent to said open region; (d) after (c) using the computer, copying circuit design shapes of said sub-region to generate a characterization cell identical to the circuit design shapes of said sub-region; (e) after (d) modifying said characterization cell to generate a passive voltage contrast characterization cell; and (f) before placing fill shapes and after (e) placing said passive voltage contrast characterization cell into said open region adjacent to said sub-region to generate a modified design level and storing said modified design level on the memory unit of the computer. ### Claim 21 (depends on 20) The computer system of claim 20, the method further including the step of: after said placing said characterization cell into said open region performing optical proximity corrections to design shapes of both said circuit region and design shapes of said passive voltage contrast characterization cell. ### Claim 22 (depends on 21) The computer system of claim 21, the method further including the step of: after said performing optical proximity corrections, adding design fill shapes to regions of said open region not containing a passive voltage contrast characterization cell. ### Claim 23 (depends on 22) The computer system of claim 22, the method further including: after said adding design fill shapes, generating a mask dataset. ### Claim 24 (depends on 20) The computer system of claim 20, wherein said method step of modifying said characterization cell comprises cropping the perimeter of said characterization cell. ### Claim 25 (depends on 20) The computer system of claim 20, wherein said method step of modifying said characterization cell includes adding or removing design shapes to create a ground shape and shapes not connected to said ground shape.