# US 9,519,200 B2 · Optical control device

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 9,519,200 B2
- Document ID: US9519200B2
- Status: Granted
- Kind: B2
- Application number: 14/780,526
- Filed: 2014-03-26
- Published: 2016-02-25
- Granted: 2016-12-13
- Earliest claimed: 2013-03-26
- Assignees: Sumitomo Osaka Cement Co., Ltd.
- Applicants: Sumitomo Osaka Cement Co., Ltd.
- Inventors: Toshio Kataoka; Masayuki Motoya; Junichiro Ichikawa
- Web page: https://patentgrep.com/patent/US9519200B2

## CPC

- G02F 1/2255: {controlled by a high-frequency electromagnetic component in an electric waveguide structure}
- G02F 1/212: {Mach-Zehnder type}
- G02F 2201/122: having a particular pattern
- G02F 2201/127: travelling wave
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS

## Abstract

Provided is an optical control device including first and second optical waveguides, a first control signal electrode including a first input-side signal electrode, a second control signal electrode including a second input-side signal electrode, an inter-signal-electrode ground electrode, a first ground electrode, and a second ground electrode. The substrate has a first groove that is provided between the first input-side signal electrode and the inter-signal-electrode ground, a second groove that is provided between the first input-side signal electrode and the first ground electrode, a third groove that is provided between the second input-side signal electrode and the inter-signal-electrode ground electrode, and a fourth groove that is provided between the second input-side signal electrode and the second ground electrode.

## Claims

### Claim 1

An optical control device, comprising:
a substrate;
first and second optical waveguides provided on the substrate, and extending along a main surface of the substrate;
a first control signal electrode provided on the main surface of the substrate so as to change a refractive index of light propagating through the inside of the first optical waveguide on the basis of a first electrical signal supplied from an outer side, the first control signal electrode including a first operating electrode part extending along the first optical waveguide to apply an electrical field to the first optical waveguide, and a first input-side signal electrode extending along the main surface of the substrate to transmit the first electrical signal to the first operating electrode part;
a second control signal electrode provided on the main surface of the substrate so as to change a refractive index of light propagating through the inside of the second optical waveguide on the basis of a second electrical signal supplied from an outer side, the second control signal electrode including a second operating electrode part extending along the second optical waveguide to apply an electrical field to the second optical waveguide, and a second input-side signal electrode extending along the main surface of the substrate to transmit the second electrical signal to the second operating electrode part;
an inter-signal-electrode ground electrode provided on the main surface of the substrate between the first input-side signal electrode and the second input-side signal electrode, the inter-signal-electrode ground electrode being positioned to be spaced away from the first input-side signal electrode and the second input-side signal electrode in a plan view;
a first ground electrode provided on the main surface of the substrate on a side opposite to an inter-signal-electrode ground electrode side with the first input-side signal electrode interposed between the first ground electrode and the inter-signal-electrode ground electrode, the first ground electrode being positioned to be spaced away from the first input-side signal electrode in a plan view; and
a second ground electrode provided on the main surface of the substrate on a side opposite to an inter-signal-electrode ground electrode side with the second input-side signal electrode interposed between the second ground electrode and the inter-signal-electrode ground electrode, the second ground electrode being positioned to be spaced away from the second input-side signal electrode in a plan view,
wherein, in a plan view, the substrate includes a first groove provided between the first input-side signal electrode and the inter-signal-electrode ground electrode, a second groove provided between the first input-side signal electrode and the first ground electrode, a third groove provided between the second input-side signal electrode and the inter-signal-electrode ground electrode, and a fourth groove provided between the second input-side signal electrode and the second ground electrode,
one end of the first ground electrode, one end of the first input-side signal electrode, one end of the inter-signal-electrode ground electrode, one end of the second input-side signal electrode, and one end of the second ground electrode are arranged along a first direction along the main surface of the substrate in this order, and
when a spaced distance between the one end of the first input-side signal electrode and the one end of the second input-side signal electrode along the first direction is set as D, and a spaced distance between the one end of the first ground electrode and the one end of the inter-signal-electrode ground electrode along the first direction or a spaced distance between the one end of the second ground electrode and the one end of the inter-signal-electrode ground electrode along the first direction is set as K, a value of D/K is 3.0 or less.

### Claim 2 (depends on 1)

The optical control device according to claim 1,
wherein the depth of the first groove, the second groove, the third groove, and the fourth groove is 2 μm or more.

### Claim 3 (depends on 1)

The optical control device according to claim 1,
wherein the inter-signal-electrode ground electrode includes a main part, and a first small-thickness part provided on a first groove side in comparison to the main part and being thinner than the main part and/or a second small-thickness part provided on a third groove side in comparison to the main part and being thinner than the main part, and/or
wherein the first ground electrode includes a main part, and a small-thickness part provided on a second groove side in comparison to the main part and being thinner than the main part, and/or
wherein the second ground electrode includes a main part, and a small-thickness part provided on a fourth groove side in comparison to the main part and being thinner than the main part.

### Claim 4 (depends on 1)

The optical control device according to claim 1,
wherein the first control signal electrode includes a main part, and a first small-thickness part provided on a first groove side in comparison to the main part and being thinner than the main part, and/or a second small-thickness part provided on a second groove side in comparison to the main part and being thinner than the main part, and/or
wherein the second control signal electrode includes a main part, and a first small-thickness part provided on a third groove side in comparison to the main part and being thinner than the main part and/or a second small-thickness part provided on a fourth groove side in comparison to the main part and being thinner than the main part.

### Claim 5 (depends on 1)

The optical control device according to claim 1,
wherein at least one of the inter-signal-electrode ground electrode, the first ground electrode, and the second ground electrode has a through-hole.

### Claim 6 (depends on 1)

The optical control device according to claim 1, further comprising:
an in-first-groove ground electrode provided in the first groove and being electrically connected to the inter-signal-electrode ground electrode, and/or an in-second-groove ground electrode provided in the second groove and being electrically connected to the first ground electrode, and/or an in-third-groove ground electrode provided in the third groove and being electrically connected to the inter-signal-electrode ground electrode, and/or an in-fourth-groove ground electrode provided in the fourth groove and being electrically connected to the second ground electrode.

### Claim 7 (depends on 6)

The optical control device according to claim 6,
wherein at least one of the in-first-groove ground electrode, the in-second-groove ground electrode, the in-third-groove ground electrode, and the in-fourth-groove ground electrode has a through-hole.

### Claim 8 (depends on 1)

The optical control device according to claim 1,
wherein at least one of the inter-signal-electrode ground electrode, the first ground electrode, and the second ground electrode has a concave portion.