# US 9,519,175 B2 · Semiconductor device

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- Number: US 9,519,175 B2
- Document ID: US9519175B2
- Status: Granted
- Kind: B2
- Application number: 14/849,923
- Filed: 2015-09-10
- Published: 2015-12-31
- Granted: 2016-12-13
- Earliest claimed: 2003-03-12
- Assignees: Semiconductor Energy Laboratory Co., Ltd.
- Applicants: Semiconductor Energy Laboratory Co., Ltd.
- Inventors: Kiyoshi Kato; Toshihiko Saito
- Web page: https://patentgrep.com/patent/US9519175B2

## CPC

- G06F 3/0447: {Position sensing using the local deformation of sensor cells}
- G02F 1/13306: {Circuit arrangements or driving methods for the control of single liquid crystal cells (G02F1/132, G02F1/133382 take precedence)}
- G02F 1/133305: {Flexible substrates, e.g. plastics, organic film}
- G02F 1/133345: {Insulating layers (G02F1/1335, G02F1/1337, G02F1/135, G02F1/136 take precedence)}
- G02F 1/13338: {Input devices, e.g. touch panels}
- G02F 1/13439: {characterised by their electrical, optical, physical properties; materials therefor; method of making}
- G02F 1/13454: {Drivers integrated on the active matrix substrate (G02F1/136277 takes precedence)}
- G02F 1/136213: {Storage capacitors associated with the pixel electrode}
- G02F 1/1368: in which the switching element is a three-electrode device {(G02F1/136277 takes precedence)}
- G06F 3/0412: {Digitisers structurally integrated in a display}
- G06F 3/0445: {using two or more layers of sensing electrodes, e.g. using two layers of electrodes separated by a dielectric layer}
- G09G 3/36: using liquid crystals
- H10D 30/6715: {characterised by the doping profiles, e.g. having lightly-doped source or drain extensions}
- H10D 30/6733: {Multi-gate TFTs}
- H10D 30/674: {characterised by the active materials}
- H10D 86/411: {characterised by materials, geometry or structure of the substrates}
- H10D 86/441: {Interconnections, e.g. scanning lines}
- H10D 86/60: wherein the TFTs are in active matrices
- G02F 2201/123: pixel
- H10D 86/00: Integrated devices formed in or on insulating or conducting substrates, e.g. formed in silicon-on-insulator [SOI] substrates or on stainless steel or glass substrates
- H10D 86/0231: {using masks, e.g. half-tone masks}
- H10D 86/40: characterised by multiple TFTs
- H10D 86/481: {integrated with passive devices, e.g. auxiliary capacitors}
- H10D 86/80: characterised by multiple passive components, e.g. resistors, capacitors or inductors
- G06F: ELECTRIC DIGITAL DATA PROCESSING (computer systems based on specific computational models G06N)
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G09G: ARRANGEMENTS OR CIRCUITS FOR CONTROL OF INDICATING DEVICES USING STATIC MEANS TO PRESENT VARIABLE INFORMATION (arrangements for transferring data between digital computers and displays G06F3/14; static indicating arrangements comprising an association of a number of separate sources or light control cells G09F9/00; static indicating arrangements comprising integral associations of a number of light sources H01J, H01K, H10H, H05B33/12; scanning, transmission or reproduction of documents or the like, e.g. facsimile transmission, details thereof H04N1/00)
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

A variable capacitor is formed from a pair of electrodes and a dielectric interposed between the electrodes over a substrate, and an external input is detected by changing capacitance of the variable capacitor by a physical or electrical force. Specifically, a variable capacitor and a sense amplifier are provided over the same substrate, and the sense amplifier reads the change of capacitance of the variable capacitor and transmits a signal in accordance with the input to a control circuit.

## Claims

### Claim 1

A semiconductor device comprising:
a first substrate;
a plurality of sensors over the first substrate, each of the plurality of sensors comprising a first electrode;
a thin film transistor over the first substrate;
an insulating film over the thin film transistor;
a pixel electrode over the insulating film, the pixel electrode electrically connected to the thin film transistor;
a liquid crystal over the first electrode and the pixel electrode; and
a second substrate over the liquid crystal,
wherein the plurality of sensors are arranged in two-dimensions,
wherein each of the plurality of sensors outputs a capacitance change,
wherein each of the first electrode and the pixel electrode comprises a transparent electrode, and
wherein the first electrode is electrically connected to a first switch and a second switch.

### Claim 2 (depends on 1)

The semiconductor device according to claim 1, further comprising a second electrode of each of the plurality of sensors, wherein the second substrate comprises the second electrode.

### Claim 3 (depends on 1)

The semiconductor device according to claim 1, wherein the first substrate includes a plastic.

### Claim 4 (depends on 1)

The semiconductor device according to claim 1, further comprising a second electrode of each of the plurality of sensors, wherein the capacitance change is changed by pushing one of the first and second electrodes.

### Claim 5 (depends on 1)

The semiconductor device according to claim 1, further comprising a second electrode of each of the plurality of sensors, wherein the liquid crystal is interposed between the first and second electrodes.

### Claim 6 (depends on 1)

The semiconductor device according to claim 1, wherein the transparent electrode comprises ITO.

### Claim 7

A semiconductor device comprising:
a first substrate;
a sensor over the first substrate, the sensor comprising a first electrode;
a thin film transistor over the first substrate;
an insulating film over the thin film transistor;
a pixel electrode over the insulating film, the pixel electrode electrically connected to the thin film transistor;
a liquid crystal over the first electrode and the pixel electrode; and
a second substrate over the liquid crystal,
wherein the sensor outputs a capacitance change,
wherein each of the first electrode and the pixel electrode comprises a transparent electrode, and
wherein the first electrode is electrically connected to a first switch and a second switch.

### Claim 8 (depends on 7)

The semiconductor device according to claim 7, further comprising a second electrode of the sensor, wherein the second substrate comprises the second electrode.

### Claim 9 (depends on 7)

The semiconductor device according to claim 7, wherein the first substrate includes a plastic.

### Claim 10 (depends on 7)

The semiconductor device according to claim 7, further comprising a second electrode of the sensor, wherein the capacitance change is changed by pushing one of the first and second electrodes.

### Claim 11 (depends on 7)

The semiconductor device according to claim 7, further comprising a second electrode of the sensor, wherein the liquid crystal is interposed between the first and second electrodes.

### Claim 12 (depends on 7)

The semiconductor device according to claim 7, wherein the transparent electrode comprises ITO.

### Claim 13

A semiconductor device comprising:
a first substrate;
a plurality of sensors over the first substrate, each of the plurality of sensors comprising a first electrode;
a thin film transistor over the first substrate;
an insulating film over the thin film transistor;
a pixel electrode over the insulating film, the pixel electrode electrically connected to the thin film transistor;
a liquid crystal over the first electrode and the pixel electrode; and
a second substrate over the liquid crystal,
wherein each of the plurality of sensors outputs a capacitance change,
wherein each of the first electrode and the pixel electrode comprises a transparent electrode, and
wherein the first electrode is electrically connected to a first switch and a second switch.

### Claim 14 (depends on 13)

The semiconductor device according to claim 13, further comprising a second electrode of each of the plurality of sensors, wherein the second substrate comprises the second electrode.

### Claim 15 (depends on 13)

The semiconductor device according to claim 13, wherein the first substrate includes a plastic.

### Claim 16 (depends on 13)

The semiconductor device according to claim 13, further comprising a second electrode of each of the plurality of sensors, wherein the capacitance change is changed by pushing one of the first and second electrodes.

### Claim 17 (depends on 13)

The semiconductor device according to claim 13, further comprising a second electrode of each of the plurality of sensors, wherein the liquid crystal is interposed between the first and second electrodes.

### Claim 18 (depends on 1)

The semiconductor device according to claim 1, wherein the transparent electrode comprises ITO.
