# US 9,519,167 B2 · Method of forming patterns and methods of manufacturing display panels using methods of forming patterns

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- Number: US 9,519,167 B2
- Document ID: US9519167B2
- Status: Granted
- Kind: B2
- Application number: 14/745,997
- Filed: 2015-06-22
- Published: 2016-03-24
- Granted: 2016-12-13
- Earliest claimed: 2014-09-19
- Assignees: Samsung Display Co., Ltd.
- Applicants: Samsung Display Co., Ltd.
- Inventors: Jung-Mi Choi; Dae-Hyun Noh
- Web page: https://patentgrep.com/patent/US9519167B2

## CPC

- G02F 1/133: Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements (arrangements or circuits for control of liquid crystal elements in a matrix, not structurally associated with these elements G09G3/36)
- G03F 7/0007: {Filters, e.g. additive colour filters; Components for display devices}
- G03F 7/0035: {Multiple processes, e.g. applying a further resist layer on an already in a previously step, processed pattern or textured surface}
- G03F 7/203: {comprising an imagewise exposure to electromagnetic radiation or corpuscular radiation}
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)

## Abstract

A method of forming a pattern may include: disposing a first material layer; disposing a first photoresist film including first shot regions; exposing the first shot regions to light, wherein an overlapping region between first shot regions may be overlappingly exposed to light exposures onto the first shot regions; forming a first photoresist pattern by developing the first photoresist film; forming a first pattern by etching the first material layer using the first photoresist pattern as an etching mask; disposing a second material layer on the first pattern; disposing a second photoresist film including second shot regions; exposing the second shot regions, wherein a boundary region between second shot regions may be disposed spaced apart from the overlapping region; forming a second photoresist pattern by developing the second photoresist film; and forming a second pattern by etching the second material layer using the second photoresist pattern as an etching mask.

## Claims

### Claim 1

A method of forming a pattern, comprising:
disposing a first material layer on a substrate comprising an active region;
disposing a first photoresist film on the first material layer, the first photoresist film comprising at least two first shot regions;
exposing each of the at least two first shot regions of the first photoresist film to light, wherein an overlapping region at a boundary between adjacent first shot regions is overlappingly exposed to light exposures onto the adjacent first shot regions;
forming a first photoresist pattern on the first material layer by developing the first photoresist film;
forming a first pattern on the substrate by etching the first material layer using the first photoresist pattern as an etching mask;
disposing a second material layer on the first pattern;
disposing a second photoresist film on the second material layer, the second photoresist film comprising at least two second shot regions;
exposing the at least two second shot regions of the second photoresist film to light, wherein a boundary region between adjacent second shot regions is disposed spaced apart from the overlapping region;
forming a second photoresist pattern on the second material layer by developing the second photoresist film; and
forming a second pattern on the first pattern by etching the second material layer using the second photoresist pattern as an etching mask,
wherein forming the first photoresist pattern comprises:
exposing a first shot onto the first photoresist film using a first mask comprising a first main-transmissive pattern, a first sub-transmissive pattern, and a first light blocking pattern; and
exposing a second shot onto the first photoresist film using a second mask comprising a second main-transmissive pattern, a second sub-transmissive pattern, and a second light blocking pattern.

### Claim 2 (depends on 1)

The method of claim 1, further comprising:
disposing a third material layer on the second pattern;
disposing a third photoresist film on the third material layer, the third photoresist film comprising at least two third shot regions;
exposing each of the at least two third shot regions of the third photoresist film to light, wherein a boundary region between adjacent third shot regions is spaced apart from the boundary region between adjacent second shot regions and the overlapping region;
forming a third photoresist pattern on the third material layer by developing the third photoresist film; and
forming a third pattern on the second pattern by etching the second material layer using the third photoresist pattern as an etching mask.

### Claim 3 (depends on 2)

The method of claim 2, wherein the first pattern comprises:
a first main pattern formed by the first main-transmissive pattern of the first mask;
a first sub-pattern formed by the first sub-transmissive pattern of the first mask;
a second main pattern formed by the second main-transmissive pattern of the second mask; and
a second sub-pattern formed by the second sub-transmissive pattern of the second mask, and
wherein the first sub-pattern and the second sub-pattern are mutually complimentary, and the first pattern disposed in the overlapping region is formed by a combination of the first sub-pattern and the second sub-pattern.

### Claim 4 (depends on 2)

The method of claim 2, wherein the number of the first sub-patterns gradually decreases in the overlapping region along a direction from the first shot region toward the second shot region.

### Claim 5 (depends on 4)

The method of claim 4, wherein the number of the second sub-patterns gradually increases in the overlapping region along a direction from the first shot region toward the second shot region.

### Claim 6 (depends on 2)

The method of claim 2, wherein the first shot and the second shot are exposed substantially simultaneously onto the first photoresist film.

### Claim 7 (depends on 2)

The method of claim 2, wherein the number of the shots partially exposing the first photoresist film to light, the number of the shots partially exposing the second photoresist film to light, and the number of the shots partially exposing the third photoresist film to light are different from one another.

### Claim 8 (depends on 2)

The method of claim 2, wherein the number of the masks used in exposing the first photoresist film to light, the number of the masks used in exposing the second photoresist film to light, and the number of the masks used in exposing the third photoresist film to light are different from one another.

### Claim 9 (depends on 2)

The method of claim 2, wherein each of the first mask and the second mask have a size smaller than the active region.

### Claim 10 (depends on 2)

The method of claim 2, wherein each of the first pattern and the third pattern has a stripe shape, and the second pattern has an island shape.

### Claim 11 (depends on 2)

The method of claim 2, wherein each of the first pattern, the second pattern, and the third pattern is selected from a group consisting of a metal pattern and a resin pattern.

### Claim 12 (depends on 2)

The method of claim 2, wherein the boundary region between adjacent second shot regions is overlappingly exposed to light exposures onto the adjacent second shot regions of the second photoresist film.

### Claim 13 (depends on 12)

The method of claim 12, wherein the second pattern has a stripe shape.

### Claim 14 (depends on 2)

The method of claim 2, wherein the boundary region between adjacent third shot regions is overlappingly exposed to light exposures onto the adjacent third shot regions of the third photoresist film.

### Claim 15

A method of manufacturing a display panel, comprising:
disposing a black matrix formation layer on a substrate comprising an active region;
disposing a first photoresist film on the black matrix formation layer, the first photoresist film comprising at least two first shot regions;
exposing each of the at least two first shot regions of the first photoresist film to light, wherein an overlapping region at a boundary between adjacent first shot regions is overlappingly exposed to light exposures onto the adjacent first shot regions;
forming a first photoresist pattern on the black matrix formation layer by developing the first photoresist film;
forming a black matrix pattern on the substrate by etching the black matrix formation layer using the first photoresist pattern as an etching mask;
disposing a color filter formation layer on the first pattern;
disposing a second photoresist film on the color filter formation layer, the second photoresist film comprising at least two second shot regions;
exposing the at least two second shot regions of the second photoresist film to light, wherein a boundary region between adjacent second shot regions is disposed spaced apart from the overlapping region;
forming a second photoresist pattern on the color filter formation layer by developing the second photoresist film;
forming a first to a third color filters on the black matrix pattern by etching the color filter formation layer using the second photoresist pattern as an etching mask;
disposing an overcoat formation layer on the second pattern;
disposing a third photoresist film on the overcoat formation layer, the third photoresist film comprising at least two third shot regions;
exposing each of the at least two third shot regions of the third photoresist film to light, wherein a boundary region between adjacent third shot regions is disposed spaced apart from the boundary region between adjacent second shot regions and the overlapping regions;
forming a third photoresist pattern on the overcoat formation layer by developing the third photoresist film; and
forming an overcoat layer on the second pattern by etching the overcoat formation layer using the third photoresist pattern as an etching mask,
wherein exposing the first photoresist film comprises:
exposing a first shot onto the first photoresist film using a first mask comprising a first main-transmissive pattern, a first sub-transmissive pattern and a first light blocking pattern; and
exposing a second shot onto the first photoresist film using a second mask comprising a second main-transmissive pattern, a second sub-transmissive pattern and a second light blocking pattern.

### Claim 16 (depends on 15)

The method of claim 15, wherein the black matrix pattern comprises:
a first main black matrix pattern formed by the first main-transmissive pattern of the first mask;
a first sub-black matrix pattern formed by the first sub-transmissive pattern of the first mask;
a second main black matrix pattern formed by the second main-transmissive pattern of the second mask; and
a second sub-black matrix pattern formed by the second sub-transmissive pattern of the second mask, and
wherein the first sub-black matrix pattern and the second sub-black matrix pattern is mutually complimentary, and the black matrix pattern disposed in the overlapping region is formed by a combination of the first sub-pattern and the second sub-pattern.

### Claim 17 (depends on 16)

The method of claim 16, wherein the number of the first sub-black matrix patterns gradually decreases in the overlapping region along a direction from the first shot region toward the second shot region, and the number of the second sub-black matrix patterns gradually increases in the overlapping region along the direction from the first shot region toward the second shot region.

### Claim 18 (depends on 15)

The method of claim 15, further comprising:
forming a polarization member beneath a bottom face of the substrate.