# US 9,519,131 B2 · Electronic device and electronic apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,519,131 B2 - Document ID: US9519131B2 - Status: Granted - Kind: B2 - Application number: 14/556,733 - Filed: 2014-12-01 - Published: 2015-06-04 - Granted: 2016-12-13 - Earliest claimed: 2013-12-02 - Assignees: Seiko Epson Corporation - Applicants: Seiko Epson Corporation - Inventors: Hideo Imai; Yasushi Matsuno - Web page: https://patentgrep.com/patent/US9519131B2 ## CPC - G02B 26/001: {based on interference in an adjustable optical cavity (interference filters G02B5/28; devices or arrangements using multiple reflections in spectrometry or monochromators G01J3/26)} - B81B 7/0067: {for controlling the passage of optical signals through the package} - G02B 7/006: {Filter holders} - B81B 2201/042: Micromirrors, not used as optical switches - B81C 2203/0145: Hermetically sealing an opening in the lid - G02B: OPTICAL ELEMENTS, SYSTEMS OR APPARATUS - B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00) - B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01) ## Abstract An electronic device includes a variable wavelength interference filter, and a package adapted to house the variable wavelength interference filter. The package includes a base substrate provided with a light passage hole through which light passes, and a base substrate side light transmissive substrate adapted to block the light passage hole and having a light transmissive property. The base substrate is formed of a laminated body having a plurality of layers stacked on each other, and the light passage hole is formed so that a second opening located on an opposite side to the variable wavelength interference filter is larger in area than a first opening located on the variable wavelength interference filter side. ## Claims ### Claim 1 An electronic device comprising: a functional element; and a package adapted to house the functional element, wherein the package includes: a base substrate adapted to fix the functional element and provided with a light passage hole through which light passes, an external terminal formed on a surface of the base substrate that is opposite to the functional element, and a light transmissive substrate adapted to block the light passage hole and provided with a light transmissive property, the base substrate is formed of a laminated body having a plurality of layers stacked on each other, the light passage hole is formed so that a second opening located on an opposite side to the functional element is larger in area than a first opening located on the functional element side, and the light passage hole includes: a first light passage hole, a second passage hole located nearer to the second opening than the first light passage hole, and larger than the first light passage hole, and a step section provided to a connection section between the first light passage hole and the second light passage hole, wherein the light transmissive substrate is fixed to the base substrate via a bonding material provided to the step section, the step section has a tip portion curved toward the second opening, and a thickness of the bonding material gradually decreases toward the tip portion of the step section. ### Claim 2 (depends on 1) The electronic device according to claim 1, wherein the light transmissive substrate is located nearer to the second opening than the step section. ### Claim 3 (depends on 2) The electronic device according to claim 2, wherein the light transmissive substrate is located inside the second light passage hole, and has an outer edge portion located outside the first light passage hole in a planar view of the base substrate. ### Claim 4 (depends on 3) The electronic device according to claim 3, wherein the light transmissive substrate is at least partially located inside the second light passage hole. ### Claim 5 (depends on 4) The electronic device according to claim 4, wherein the light transmissive substrate is located between both principal surfaces of the base substrate in a cross-sectional view of the base substrate. ### Claim 6 (depends on 1) The electronic device according to claim 1, wherein the bonding material is located outside the first light passage hole in a planar view of the base substrate. ### Claim 7 (depends on 1) The electronic device according to claim 1, wherein the base substrate has a sealing hole adapted to seal an internal space of the package adapted to house the functional element. ### Claim 8 (depends on 1) The electronic device according to claim 1, wherein the functional element is an optical interference filter including a first substrate, a second substrate opposed to the first substrate, a first reflecting film provided to the first substrate, and a second reflecting film provided to the second substrate and opposed to the first reflecting film via an inter-reflecting film gap, and having an optical interference region where the first reflecting film and the second reflecting film overlap each other, and the light passage hole is disposed corresponding to the optical interference region. ### Claim 9 An electronic apparatus comprising: a functional element; and a package adapted to house the functional element, wherein the package includes: a base substrate adapted to fix the functional element and provided with a light passage hole through which light passes, an external terminal formed on a surface of the base substrate that is opposite to the functional element, and a light transmissive substrate adapted to block the light passage hole and provided with a light transmissive property, the base substrate is formed of a laminated body having a plurality of layers stacked on each other, and the light passage hole is formed so that a second opening located on an opposite side to the functional element is larger in area than a first opening located on the functional element side, and the light passage hole includes: a first light passage hole, a second passage hole located nearer to the second opening than the first light passage hole, and larger than the first light passage hole, and a step section provided to a connection section between the first light passage hole and the second light passage hole, wherein the light transmissive substrate is fixed to the base substrate via a bonding material provided to the step section, the step section has a tip portion curved toward the second opening, and a thickness of the bonding material gradually decreases toward the tip portion of the step section.