# US 9,519,033 B2 · High throughput hot testing method and system for high-brightness light-emitting diodes

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- Number: US 9,519,033 B2
- Document ID: US9519033B2
- Status: Granted
- Kind: B2
- Application number: 14/589,728
- Filed: 2015-01-05
- Published: 2015-05-07
- Granted: 2016-12-13
- Earliest claimed: 2011-11-14
- Assignees: KLA-Tencor Corporation
- Applicants: KLA-Tencor Corporation
- Inventors: Richard W. Solarz
- Web page: https://patentgrep.com/patent/US9519033B2

## CPC

- G01R 31/44: Testing lamps
- G01N 21/66: electrically excited, e.g. electroluminescence
- G01N 21/71: thermally excited
- H05B 33/10: Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
- H10H 20/825: containing nitrogen, e.g. GaN
- H10H 20/84: Coatings, e.g. passivation layers or antireflective coatings
- G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12)
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- H05B: ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H10H: INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS

## Abstract

A method of performing a hot test of a packaged phosphor converted light-emitting diode (pc-LED) includes selectively heating portions of the phosphor layer using a laser to provide a predetermined temperature gradient in the phosphor layer. The selective heating can directly heat the silicone in a silicone-based phosphor layer, or directly heat the active ion(s) of the phosphor in a Lumiramic™-based phosphor or even the active ion(s) of a silicone-based phosphor layer. A current is applied to the InGaN film to establish a predetermined temperature at the InGaN film junction, the film junction being adjacent to the phosphor layer. Photometric measurements are performed on the LED after the selective heating and during the applied electroluminescent current. This method quickly establishes the temperatures and temperature gradients in the LED consistent with those of an operating, product-level LED, thereby ensuring accurate binning of the LED.

## Claims

### Claim 1

A method of performing a hot test of a light-emitting diode (LED), the LED including an indium-gallium-nitride (InGaN) film, and a phosphor layer formed on the InGaN film, the method comprising:
selectively heating portions of the phosphor layer using a laser to provide a predetermined temperature gradient in the phosphor layer;
applying an electric current to the InGaN film to establish a predetermined temperature in the InGaN film; and
performing photometric measurements on the LED while the phosphor layer is heated to the predetermined temperature gradient and while the InGaN film is heated to the predetermined temperature.

### Claim 2 (depends on 1)

The method of claim 1, wherein the selectively heating directly heats silicone in the phosphor layer.

### Claim 3 (depends on 1)

The method of claim 1, wherein the selectively heating is performed with a mid-infra-red (mid-IR) laser.

### Claim 4 (depends on 1)

The method of claim 1, wherein the selectively heating is performed with a coherent laser.

### Claim 5 (depends on 1)

The method of claim 1, wherein the selectively heating directly heats active phosphor ions.

### Claim 6 (depends on 1)

The method of claim 1, wherein the selectively heating is performed with an InGaN laser to excite absorption bands near 460 nm.

### Claim 7

A system for hot testing of light-emitting diodes (LEDs), each LED including an indium-gallium-nitride (InGaN) film, and a phosphor layer formed on the InGaN film, the system comprising:
a laser positioned to direct its light onto an LED, the laser configured to selectively heat portions of the phosphor layer;
a probe tester configured to apply an electric current to the InGaN film of the LED to establish a predetermined temperature in the InGaN film and to provide electroluminescence;
an integrating sphere configured to collect light emitted by the LED during testing; and
a spectrometer system configured to perform photometric measurements on light collected by the integrating sphere while said portions of the phosphor layer are heated by the laser and while the InGaN film is heated to the predetermined temperature.

### Claim 8 (depends on 7)

The system of claim 7, further including timing electronics coupled to the laser and the probe tester to synchronize operation of the laser and the probe tester.

### Claim 9 (depends on 7)

The system of claim 7, wherein the laser is positioned to direct its light through the integrating sphere onto the LED.

### Claim 10 (depends on 7)

The system of claim 7, wherein the integrating sphere includes a collar configured to minimize entry of extraneous light into the integrating sphere during testing and to collect a totality of light emitted by the LED.

### Claim 11 (depends on 7)

The system of claim 7, further including a moveable carrier for positioning the LED.

### Claim 12

A method of performing a hot test of a light-emitting diode (LED), the LED including an indium-gallium-nitride (InGaN) film, and a phosphor layer formed on the InGaN film, the method comprising:
using a laser to selectively heat portions of the phosphor layer to a predetermined temperature gradient;
using an electric current source to establish a predetermined temperature in the InGaN film; and
performing photometric measurements on the LED while the phosphor layer is heated to the predetermined temperature gradient and while the InGaN film is at the predetermined temperature.

### Claim 13 (depends on 12)

The method of claim 12, wherein using the laser includes targeting excitation of silicone used as a binder in the phosphor layer.

### Claim 14 (depends on 12)

The method of claim 12, wherein using the laser includes targeting excitation of active phosphor ions in the phosphor layer.

### Claim 15 (depends on 12)

The method of claim 12, wherein using the laser includes using an optical light source to selectively excite vibrational modes of silicone in the phosphor layer, thereby generating a temperature gradient in the phosphor layer.

### Claim 16 (depends on 12)

The method of claim 12, wherein using the laser includes using an optical light source to selectively excite vibrational modes of one of methanol and a hydrocarbon wetting agent in the phosphor layer, thereby generating a temperature gradient in the phosphor layer.

### Claim 17 (depends on 12)

The method of claim 12, wherein the electric current includes applying an electric current to the InGaN film.

### Claim 18

A system for hot testing of light-emitting diodes (LEDs), each LED including an indium-gallium-nitride (InGaN) film, and a phosphor layer formed on the InGaN film, the system comprising:
a laser configured to selectively heat portions of the phosphor layer to a predetermined temperature gradient;
an electric current source configured to establish a predetermined temperature in the InGaN film;
an integrating sphere for positioning over the LED, the integrating sphere configured to collect light emitted by the LED during testing and
a spectrometer system configured to perform photometric measurements on light collected by the integrating sphere while the phosphor layer is heated to the predetermined temperature gradient and while the InGaN film is at the predetermined temperature.

### Claim 19 (depends on 18)

The system of claim 18, wherein the laser includes one of an optical parametric oscillator and a Cr+3 insulating crystal laser configured to excite silicone used as a binder in the phosphor layer.

### Claim 20 (depends on 18)

The system of claim 18, wherein the laser includes an InGaN laser configured to excite active phosphor ions in the phosphor layer.

### Claim 21 (depends on 18)

The system of claim 18, wherein the laser includes a coherent light source configured to excite active phosphor ions in the phosphor layer.

### Claim 22 (depends on 18)

The system of claim 18, wherein a wavelength of coherent light generated by the laser is between 2.0 microns and 3.5 microns, and an average power of the coherent light is between 100 watts and 12 watts for selectively exciting either one of silicone and methanol dopant wetting agents of the phosphor layer.

### Claim 23 (depends on 18)

The system of claim 18, wherein a wavelength of coherent light generated by the laser is between 0.45 microns and 0.53 microns, and an average power of the coherent light is between 100 watts and 12 watts.

### Claim 24 (depends on 18)

The system of claim 18, further including a plurality of lasers, which in combination provide an average coherent power of 12 watts.

### Claim 25 (depends on 18)

The system of claim 18, wherein the electric current includes an electrical probe tester.

### Claim 26 (depends on 18)

The system of claim 18, further including a plurality of electric currents.