# US 9,519,006 B2 · Hybrid microprobe for electrochemical and SERS monitoring, scanning and feedback stimulation and the preparation method thereof

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- Number: US 9,519,006 B2
- Document ID: US9519006B2
- Status: Granted
- Kind: B2
- Application number: 14/007,824
- Filed: 2011-03-29
- Published: 2014-01-16
- Granted: 2016-12-13
- Earliest claimed: 2011-03-29
- Assignees: Seoul National University R&Db Foundation
- Applicants: Taek Dong Chung; Beom Jin Kim
- Inventors: Taek Dong Chung; Beom Jin Kim
- Web page: https://patentgrep.com/patent/US9519006B2

## CPC

- G01Q 70/16: Probe manufacture
- G01N 21/658: {enhancement Raman, e.g. surface plasmons}
- G01Q 30/02: Non-SPM analysing devices, e.g. SEM [Scanning Electron Microscope], spectrometer or optical microscope
- G01Q 60/60: SECM [Scanning Electro-Chemical Microscopy] or apparatus therefor, e.g. SECM probes
- B82Y 15/00: Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
- B82Y 35/00: Methods or apparatus for measurement or analysis of nanostructures
- H01J 2237/2803: characterised by the imaging method
- G01Q: SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

The present disclosure relates to a probe capable of electrochemical and Raman spectroscopic monitoring wherein a Raman-active gold microshell having conductivity is attached to the tip of a glass microcapillary tube in which a conductive material is coated on an inner wall thereof by electroless plating. By coupling the probe with a system capable of moving the probe, the activities of various catalyst materials can be detected quickly and information of intermediate products moving from and adsorbed on the surface can be provided.

## Claims

### Claim 1

A method for preparing a probe, comprising (a) preparing a metallic microshell by coating a first metallic material on the surface of a spherical template, (b) preparing a conductive capillary tube by coating a conductive material on the inner wall of a capillary tube, (c) trapping the metallic microshell in a tip of the conductive capillary tube and (d) coating a second metallic material on the inner wall of the conductive capillary tube wherein the metallic microshell is trapped.

### Claim 2 (depends on 1)

The method for preparing a probe according to claim 1, wherein the template is selected from polystyrene, poly(methyl methacrylate), silica and a mixture thereof, the first metallic material is selected from Au, Ag, Pt, Pd, Cu and a mixture thereof, the conductive material is selected from Ru, Pt, Cu, Co, Ni and a mixture thereof and the second metallic material, which may be identical to or different from the first metallic material, is selected from Au, Ag, Pt, Pd, Cu and a mixture thereof.

### Claim 3 (depends on 1)

The method for preparing a probe according to claim 1, wherein the metallic microshell has a diameter of 1-3 μm and the tip of the capillary tube has a diameter corresponding to 50-99% of the diameter of the metallic microshell.

### Claim 4 (depends on 1)

The method for preparing a probe according to claim 1, wherein (a) is performed by electroless plating using (i) a precursor of the first metallic material selected from potassium tetrachloroaurate hydrate, sodium tetrachloroaurate hydrate, chloroauric acid, hydrogen hexachloroplatinate(IV) hydrate, silver nitrate and a mixture thereof and (ii) a first reducing agent selected from formaldehyde, ascorbic acid, hydroquinone, ammonium hydroxide and a mixture thereof.

### Claim 5 (depends on 4)

The method for preparing a probe according to claim 4, wherein (a) is performed by repeating the electroless plating 2-20 times such that SERS activity and Raman effect can be maximized.

### Claim 6 (depends on 1)

The method for preparing a probe according to claim 1, wherein (b) is performed by atomic layer deposition at 250-350° C. under a pressure of 1-5 Torr using a precursor selected from bis(ethylcylcopentadienyl)ruthenium, a halide compound of the conductive material, an alkyl or alkoxide compound of the conductive material, an organometallic compound such as a cyclopentadienyl complex or an alkyl or silyl amide and a mixture thereof.

### Claim 7 (depends on 1)

The method for preparing a probe according to claim 1, wherein (c) is performed by applying a negative pressure to the capillary tube.

### Claim 8 (depends on 7)

The method for preparing a probe according to claim 7, wherein (c) is performed in a solution of a precursor of the second metallic material selected from potassium tetrachloroaurate hydrate, sodium tetrachloroaurate hydrate, chloroauric acid, hydrogen hexachloroplatinate(IV) hydrate and a mixture thereof and a part of the solution of the precursor of the second metallic material is sucked into the capillary tube.

### Claim 9 (depends on 1)

The method for preparing a probe according to claim 1, wherein (d) is performed by electroless plating using (i) a precursor of the second metallic material selected from potassium tetrachloroaurate hydrate, sodium tetrachloroaurate hydrate, chloroauric acid, hydrogen hexachloroplatinate(IV) hydrate and a mixture thereof and (ii) a second reducing agent selected from potassium ferrocyanide (K4[Fe(CN)6]), ruthenium(II) hexamine chloride, iridium(III) chloride and a mixture thereof.

### Claim 10 (depends on 9)

The method for preparing a probe according to claim 9, wherein (d) is performed in a solution of the second reducing agent.

### Claim 11 (depends on 7, 9)

The method for preparing a probe according to claim 7 or 9, which further comprises, between (c) and (d), (c-1) diluting the solution of the precursor of the first metallic material and (c-2) adding a second reducing agent or a solution thereof to the diluted solution of the precursor of the first metallic material, wherein all of (c), (c-1), (c-2) and (d) are performed with the capillary tube in a solution.

### Claim 12

A probe comprising (i) a capillary tube and (ii) a metallic microshell attached to a tip of the capillary tube,
wherein
a conductive material is coated on the inner wall of the capillary tube,
the metallic microshell comprises a first metallic material coated on the surface of a spherical template,
a second metallic material is coated on a layer of the first metallic material of the metallic microshell, which is exposed in the tip of the capillary tube to which the metallic microshell is attached, and
the conductive material and the first metallic material are electrically connected.

### Claim 13 (depends on 12)

The probe according to claim 12, wherein the template is selected from polystyrene, poly(methyl methacrylate), silica and a mixture thereof, the first metallic material is selected from Au, Ag, Pt, Pd, Cu and a mixture thereof, the conductive material is selected from Ru, Pt, Cu, Co, Ni and a mixture thereof and the second metallic material is selected from Au, Ag, Pt, Pd, Cu and a mixture thereof.

### Claim 14 (depends on 12)

The probe according to claim 12, wherein the metallic microshell has a diameter of 1-3 μm and the tip of the capillary tube has a diameter corresponding to 50-99% of the diameter of the metallic microshell.

### Claim 15 (depends on 12)

The probe according to claim 12, wherein the first metallic material is coated on the spherical template such that SERS activity and Raman effect can be maximized.

### Claim 16 (depends on 13)

The probe according to claim 13, wherein the first metallic material is coated on the spherical template by repeating electroless plating 2-10 times such that SERS activity and Raman effect can be maximized.

### Claim 17

A probe comprising:
(i) a capillary tube comprising a conductive material inside thereof;
(ii) a metallic microshell comprising a first metallic material coated on the surface of a spherical template and attached to a tip of the capillary tube; and
(iii) a second metallic material disposed between the capillary tube and the metallic microshell,
wherein the conductive material and the first metallic material are electrically connected via the second metallic material.

### Claim 18 (depends on 17)

The probe according to claim 17, wherein the capillary tube comprising the conductive material is prepared by pulling a glass tube comprising a metal wire.

### Claim 19

A method for preparing a probe, comprising:
(a) preparing a metallic microshell by coating a first metallic material on the surface of a spherical template;
(b) preparing a capillary tube comprising a conductive material inside thereof;
(c) insert a second metallic material into a tip of the capillary tube; and
(d) attaching the metallic microshell to a tip of the capillary tube through the second metallic material.

### Claim 20 (depends on 6)

The method for preparing a probe according to claim 6, wherein the halide compound is a chloride compound.