# US 9,518,927 B2 · Surface-enhanced raman scattering substrate and manufacturing method thereof > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,518,927 B2 - Document ID: US9518927B2 - Status: Granted - Kind: B2 - Application number: 14/548,286 - Filed: 2014-11-20 - Published: 2016-03-03 - Granted: 2016-12-13 - Earliest claimed: 2014-08-29 - Assignees: National Taiwan University - Applicants: National Taiwan University - Inventors: Hsuen-Li Chen; Sin-Yi Chou; Chen-Chieh Yu; Yu-Ting Yen - Web page: https://patentgrep.com/patent/US9518927B2 ## CPC - G01N 21/658: {enhancement Raman, e.g. surface plasmons} - C22F 1/14: of noble metals or alloys based thereon - C23C 14/205: {by cathodic sputtering} - C23C 14/5813: {using lasers} - C23C 14/5873: {Removal of material} - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) - C22F: CHANGING THE PHYSICAL STRUCTURE OF NON-FERROUS METALS AND NON-FERROUS ALLOYS (surface treatment of metallic material involving at least one process provided for in class C23 and at least one process covered by this subclass, C23F17/00) - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) ## Abstract In a Surface-Enhanced Raman Scattering (SERS) substrate and the manufacturing method thereof, the SERS substrate includes a low thermal conductivity base and a plurality of metal nanoparticles (NPs). The surface of the low thermal conductivity substrate has a first surface, and the first surface has a plurality of ripple micro/nano structures. The plurality of metal NPs are non-continuously densely arranged on the ripple micro/nano structures of the first surface. The metal NPs have a height difference along the ripple micro/nano structures, and form a 3D electric field enhanced region. The manufacturing methods includes sputtering a metal nano-thin film on a surface of a low thermal conductivity base, and the surface of the low thermal conductivity base has a plurality of ripple micro/nano structures; using laser to ablate the metal nano-thin film; and forming a plurality of metal NPs, which are non-continuously densely arranged. ## Claims ### Claim 1 A surface-enhanced Raman scattering substrate, comprising: a low thermal conductivity substrate having a first surface and a second surface, and the first surface having a plurality of ripple micro/nano structures; and a plurality of metal nanoparticles non-continuously and densely arranged on the ripple micro/nano structures of the first surface, wherein the metal nanoparticles have a height difference along the ripple micro/nano structures, and the metal nanoparticles form a 3D electric field enhanced region, wherein the 3D electric field enhanced region decreases from the first surface toward the second surface. ### Claim 2 (depends on 1) The surface-enhanced Raman scattering substrate as claimed in claim 1, wherein the space density distribution of the plurality of metal nanoparticles decreases from the first surface toward the second surface, and an electric field enhanced intensity of the 3D electric field enhanced region decreases toward the second surface. ### Claim 3 (depends on 1) The surface-enhanced Raman scattering substrate as claimed in claim 1, wherein the height difference of the ripple micro/nano structures is 100 nm-10 um. ### Claim 4 (depends on 1) The surface-enhanced Raman scattering substrate as claimed in claim 1, wherein a thermal conductivity of the low thermal conductivity substrate is 0.15 W/mK. ### Claim 5 (depends on 4) The surface-enhanced Raman scattering substrate as claimed in claim 4, wherein the low thermal conductivity substrate is paper or oxide substrate. ### Claim 6 (depends on 4) The surface-enhanced Raman scattering substrate as claimed in claim 4, wherein the low thermal conductivity substrate is paper and has a plurality of fiber structures. ### Claim 7 (depends on 1) The surface-enhanced Raman scattering substrate as claimed in claim 1, further comprising a plurality of non-enhanced metal nanoparticles not distributed in the 3D electric field enhanced region, the amount of a plurality of enhanced metal nanoparticles distributed in the 3D electric field enhanced region is larger than the non-enhanced metal nanoparticles. ### Claim 8 (depends on 1) The surface-enhanced Raman scattering substrate as claimed in claim 1, wherein the plurality of metal nanoparticles distributed in the 3D electric field enhanced region has the effect of localized surface plasmon resonance. ### Claim 9 (depends on 8) The surface-enhanced Raman scattering substrate as claimed in claim 8, wherein the plurality of metal nanoparticles comprise metal oxides and combinations thereof, wherein the metals of the metal oxides is selected from a group consisting of gold, silver, platinum, aluminum, and copper.