# US 9,518,885 B2 · Carbon nanotube temperature and pressure sensors

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- Number: US 9,518,885 B2
- Document ID: US9518885B2
- Status: Granted
- Kind: B2
- Application number: 14/035,112
- Filed: 2013-09-24
- Published: 2014-01-16
- Granted: 2016-12-13
- Earliest claimed: 2009-08-26
- Assignees: UT-Battelle, LLC
- Applicants: Ut-Battelle LLC
- Inventors: Ilia N. Ivanov; David B. Geohegan
- Web page: https://patentgrep.com/patent/US9518885B2

## CPC

- G01L 19/00: Details of, or accessories for, apparatus for measuring steady or quasi-steady pressure of a fluent medium insofar as such details or accessories are not special to particular types of pressure gauges
- B82Y 30/00: Nanotechnology for materials or surface science, e.g. nanocomposites
- G01K 7/00: Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat (giving results other than momentary value of temperature G01K3/00) {; Power supply therefor, e.g. using thermoelectric elements}
- G01K 7/021: {Particular circuit arrangements (G01K7/026, G01K7/12, G01K7/14 take precedence)}
- G01K 7/028: {using microstructures, e.g. made of silicon}
- G01K 7/18: the element being a linear resistance, e.g. platinum resistance thermometer (G01K7/26 takes precedence)
- G01L 1/20: by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids (of piezo-resistive materials G01L1/18); by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L 9/00: Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements {(G01L11/004 takes precedence)}; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means (measuring differences of two or more pressure values G01L13/00; measuring two or more pressure values simultaneously G01L15/00)
- G01L 9/0001: {Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means (G01L9/0026, G01L9/0033, G01L9/0082, G01L9/0089, G01L9/0091 take precedence)}
- G01L 9/0002: {using variations in ohmic resistance (G01L9/0051 takes precedence)}
- G01L 9/0005: {using variations in capacitance (G01L9/0072 takes precedence)}
- B82Y 15/00: Nanotechnology for interacting, sensing or actuating, e.g. quantum dots as markers in protein assays or molecular motors
- G01K 2211/00: Thermometers based on nanotechnology
- Y10S 977/742: Carbon nanotubes, CNTs
- Y10S 977/955: Of thermal property
- Y10S 977/956: Of mechanical property
- G01L: MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE (weighing G01G)
- B82Y: SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- G01K: MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR (radiation pyrometry G01J5/00)
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

## Abstract

The present invention, in one embodiment, provides a method of measuring pressure or temperature using a sensor including a sensor element composed of a plurality of carbon nanotubes. In one example, the resistance of the plurality of carbon nanotubes is measured in response to the application of temperature or pressure. The changes in resistance are then recorded and correlated to temperature or pressure. In one embodiment, the present invention provides for independent measurement of pressure or temperature using the sensors disclosed herein.

## Claims

### Claim 1

A temperature sensor comprising:
a thermocouple body comprising a first carbon nanotube and a second carbon nanotube, wherein the first carbon nanotube and the second carbon nanotubes comprise a junction at a first end of the thermocouple body, wherein the first carbon nanotube and the second carbon nanotube have dissimilar electrical properties, and wherein the first carbon nanotube has a greater number of defects than the second carbon nanotube; and
a voltmeter in electrical communication with the first carbon nanotube and the second carbon nanotube, wherein application of temperature to the first end of the thermocouple body produces a current in a circuit composed of the first carbon nanotube and the second carbon nanotube that is proportional to the temperature.

### Claim 2 (depends on 1)

The temperature sensor of claim 1, wherein the current in the circuit composed of the first carbon nanotube and the second carbon nanotube is linearly proportional to the temperature that is applied to the first end of the thermocouple.

### Claim 3 (depends on 1)

The temperature sensor of claim 1, wherein the voltmeter is electrically connected to the first carbon nanotube and the second carbon nanotube at a second end of the thermocouple body, wherein the second end of the thermocouple body is opposite the first end of the thermocouple body.

### Claim 4 (depends on 1)

The temperature sensor of claim 1, wherein the temperature sensor measures values ranging from about −200° C. to about +1200° C.

### Claim 5 (depends on 1)

The temperature sensor of claim 1, wherein the temperature sensor is configured to be connectable to a load, and wherein the current produced by the circuit powers the load.

### Claim 6 (depends on 1)

The temperature sensor of claim 1, wherein measured voltage is correlated to temperature.

### Claim 7 (depends on 6)

The temperature sensor of claim 6, wherein the first carbon nanotube and the second carbon nanotube are configured for a measure voltage change of about 41 μV/° C.