# US 9,518,866 B2 · Spectrometer with variable beam power and shape > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,518,866 B2 - Document ID: US9518866B2 - Status: Granted - Kind: B2 - Application number: 14/466,839 - Filed: 2014-08-22 - Published: 2016-02-25 - Granted: 2016-12-13 - Earliest claimed: 2014-08-22 - Assignees: SpectraSensors, Inc. - Applicants: SpectraSensors, Inc. - Inventors: Alfred Feitisch; Xiang Liu; Chih-Husan Chang; Hsu-Hung Huang - Web page: https://patentgrep.com/patent/US9518866B2 ## CPC - G01J 3/0229: {using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters} - G01J 3/0291: {Housings; Spectrometer accessories; Spatial arrangement of elements, e.g. folded path arrangements} - G01J 3/0237: {Adjustable, e.g. focussing} - G01J 3/027: {Control of working procedures of a spectrometer; Failure detection; Bandwidth calculation} - G01J 3/42: Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry (beam switching arrangements G01J3/08) - G01J: MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY (light sources F21, H01J, H01K, H05B; investigating properties of materials by optical means G01N) ## Abstract At least one light source is configured to emit at least one beam into a sample volume of an absorbing medium. In addition, at least one detector is positioned to detect at least a portion of the beam emitted by the at least one light source. Further, at least one beam modification element is positioned between the at least one detector and the at least one light source to selectively change at least one of (i) a power intensity of, or (ii) a shape of the beam emitted by the at least one light source as detected by the at least one detector. A control circuit is coupled to the beam modification element. Related apparatus methods, articles of manufacture, systems, and the like are described. ## Claims ### Claim 1 An apparatus comprising: at least one light source of a spectrometer configured to emit at least one beam into a sample volume of an absorbing medium; at least one detector of the spectrometer positioned to detect at least a portion of the beam emitted by the light source; a beam modification element positioned between the detector and the light source to selectively change at least one of (i) a power intensity of, or (ii) a shape of the beam emitted by the light source as detected by the at least one detector; and a control circuit coupled to the beam modification element; the control circuit configured to perform operations comprising: making a determination that the power intensity and/or the shape of the beam emitted by the light source should be changed based on the power intensity and/or the shape of the beam emitted by the light source as detected by the detector, the determination comprising identifying a correction for an accuracy offset of the spectrometer resulting from aging of one or more spectrometer components and/or one or more environmental factors; and causing the beam modification element to selectively change the power intensity and/or the shape of the beam to improve calibration fidelity of the spectrometer. ### Claim 2 (depends on 1) The apparatus of claim 1, wherein the absorbing medium comprises gas. ### Claim 3 (depends on 1) The apparatus of claim 1, wherein the absorbing medium comprises liquid. ### Claim 4 (depends on 1) The apparatus of claim 1 further comprising: a housing defining the sample volume. ### Claim 5 (depends on 1) The apparatus of claim 1, wherein the sample volume forms part of an open path system. ### Claim 6 (depends on 1) The apparatus of claim 1, wherein the beam modification element comprises an optical filter or an optical diffuser. ### Claim 7 (depends on 1) The apparatus of claim 1, wherein the beam modification element comprises an optical lens. ### Claim 8 (depends on 1) The apparatus of claim 1, wherein the beam modification element comprises a transmissive diffusor or a reflective diffusor. ### Claim 9 (depends on 1) The apparatus of claim 1, wherein the beam modification element comprises a reflector with a selectively adjustable surface. ### Claim 10 (depends on 1) The apparatus of claim 1, wherein the beam modification element comprises a liquid crystal optical element. ### Claim 11 (depends on 1) The apparatus of claim 1, wherein the beam modification element comprises an adjustable aperture. ### Claim 12 (depends on 1) The apparatus of claim 1, wherein the beam modification element comprises a tunable filter. ### Claim 13 (depends on 12) The apparatus of claim 12, wherein the tunable filter comprises a thermal optical tuner. ### Claim 14 (depends on 12) The apparatus of claim 12, wherein the tunable filter comprises a quantum well tuning element. ### Claim 15 (depends on 1) The apparatus of claim 1, wherein the beam modification element comprises a neutral density (ND) filter. ### Claim 16 (depends on 1) The apparatus of claim 1, wherein the beam modification element comprises a rotatable or translatable optical interference filter. ### Claim 17 (depends on 1) The apparatus of claim 1, wherein the beam modification element comprises a filter wheel having two or more different optical filters that are selectively movable within the beam path. ### Claim 18 (depends on 1) The apparatus of claim 1, wherein the beam modification element comprises a filter wedge. ### Claim 19 (depends on 1) The apparatus of claim 1, wherein the beam modification element comprises at least one element selected from a group consisting of: saturable absorbers, optical fibers, spatial filters, waveguides, films made from at least one layer of dielectric material, films made from organic material which can be rotated, Bragg gratings, light valves, polarizers, light power actuators, transmissive optical elements with diffractive optical structures which alter the beam profile, transmissive optical elements with rough polishing, reflective optical elements with surface structure which causes scattering of an incident laser beam or alters the beam profile, diffractive optical elements, Fresnel type optical elements, films or optical elements made from hydrocarbon materials, or beam splitting devices. ### Claim 20 (depends on 1) The apparatus of claim 1 further comprising at least one actuation element that is coupled to at least one of (i) the at least one beam modification element, (ii) the at least one light source, or (iii) the at least one detector, that is and configured to selectively move a position and/or angle of the beam modification element along at least one axis. ### Claim 21 (depends on 20) The apparatus of claim 20, wherein the at least one actuation element is selected from a group consisting of: piezo actuators, stepper motors, electro-optical actuators, acousto-optical actuators, a micro-electro-mechanical systems (MEMS) actuation devices, an inch-worm, a mechanical actuator, a magnetic actuator, an electrostatic actuator, an inductive actuator, a rotary actuator, a heated actuator, a pressure actuator, a stress and strain actuator, or an analog motor. ### Claim 22 (depends on 1) The apparatus of claim 1, wherein the at least one light source is coupled to the control circuit. ### Claim 23 (depends on 1) The apparatus of claim 1, wherein the at least one detector is coupled to the control circuit and comprises an array of photoreceivers. ### Claim 24 (depends on 23) The apparatus of claim 23, wherein the array of photoreceivers comprises a quad cell detector. ### Claim 25 (depends on 1) The apparatus of claim 1, wherein the control circuit causes the beam modification element to change a shape and/or power intensity of the beam detected by the at least one detector in response to a position and/or angle that such beam is detected by at least one photodetector. ### Claim 26 (depends on 1) The apparatus of claim 1, wherein the light source comprises at least one of a tunable diode laser, a tunable semiconductor laser, a quantum cascade laser, an intra-band cascade laser (ICL) a vertical cavity surface emitting laser (VCSEL), a horizontal cavity surface emitting laser (HCSEL), a distributed feedback laser, a light emitting diode (LED), a super-luminescent diode, an amplified spontaneous emission (ASE) source, a gas discharge laser, a liquid laser, a solid state laser, a fiber laser, a color center laser, an incandescent lamp, a discharge lamp, a thermal emitter, or a device capable of generating frequency tunable light through nonlinear optical interactions. ### Claim 27 (depends on 1) The apparatus of claim 1, wherein the at least one detector comprises at least one of an indium gallium arsenide (InGaAs) detector, an indium arsenide (InAs) detector, an indium phosphide (InP) detector, a silicon (Si) detector, a silicon germanium (SiGe) detector, a germanium (Ge) detector, a mercury cadmium telluride detector (HgCdTe or MCT), a lead sulfide (PbS) detector, a lead selenide (PbSe) detector, a thermopile detector, a multi-element array detector, a single element detector, or a photo-multiplier. ### Claim 28 (depends on 4) The apparatus of claim 4, wherein the housing defines a sample cell that comprises at least one of a multiple-pass configuration in which the light is reflected between one or more optically reflective mirrors while the light remains inside the sample cell, a multiple-pass configuration in which the light is refracted by one or more optical elements while the light remains inside the sample cell, a Herriot Cell, an off-axis optical resonator, a parabolic light collector, a spherical light collector, a White cell, an optical cavity, a hollow core light guide, or a single pass configuration in which the light is not being reflected while the light remains inside the sample cell. ### Claim 29 A method comprising: emitting, by at least one light source forming part of a spectrometer, at least one beam into a sample volume comprising an absorbing medium; detecting, by at least one detector, at least a portion of the beam emitted by the at least one light source; determining, based on the detected at least a portion of the beam and by a controller, that at least one of (i) a power intensity, or (ii) a shape of the beam should be changed, the determining comprising identifying a correction for an accuracy offset of the spectrometer resulting from aging of one or more spectrometer components and/or one or more environmental factors; and selectively changing, by at least one beam modification element under control of the controller, at least one of the (i) power intensity or (ii) shape of the beam emitted by the at least one light source as detected by the at least one detector to improve calibration fidelity of the spectrometer. ### Claim 30 A method comprising: causing at least one light source forming part of a spectrometer to emit at least one beam into a sample volume comprising an absorbing medium; receiving a signal from at least one detector characterizing detection of at least a portion of the beam emitted by the light source; determining, based on the received signal, that at least one of (i) a power intensity, or (ii) as shape of the beam should be changed, the determining comprising identifying a correction for an accuracy offset of the spectrometer resulting from aging of one or more spectrometer components and/or one or more environmental factors; and causing at least one beam modification element to change at least one of (i) the power intensity or (ii) the shape of the beam emitted by the at least one light source as detected by the at least one detector to improve calibration fidelity of the spectrometer.