# US 9,518,863 B2 · Elastic wave element and elastic wave sensor using same

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- Number: US 9,518,863 B2
- Document ID: US9518863B2
- Status: Granted
- Kind: B2
- Application number: 14/414,792
- Filed: 2013-10-01
- Published: 2015-06-18
- Granted: 2016-12-13
- Earliest claimed: 2012-10-01
- Assignees: Panasonic Intellectual Property Management Co., Ltd.
- Applicants: Panasonic Intellectual Property Management Co., Ltd.
- Inventors: Shigeru Tsuzuki; Kazunori Nishimura; Hiroyuki Nakamura; Tomohiro Iwasaki
- Web page: https://patentgrep.com/patent/US9518863B2

## CPC

- G01H 17/00: Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves, not provided for in the other groups of this subclass
- B06B 1/0622: {on one surface}
- G01D 5/12: using electric or magnetic means (G01D5/06 takes precedence)
- G01N 29/022: {Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices (microdevices per se B81B)}
- G01N 29/036: by measuring frequency or resonance of acoustic waves
- G01N 33/5438: {Electrodes}
- H03H 9/02637: {Details concerning reflective or coupling arrays}
- H03H 9/02787: {having wave guide like arrangements}
- H03H 9/14505: {Unidirectional SAW transducers}
- H03H 9/1455: {constituted of N parallel or series transducers}
- G01N 2291/011: Velocity or travel time
- G01N 2291/015: Attenuation, scattering
- G01N 2291/0255: (Bio)chemical reactions, e.g. on biosensors
- G01N 2291/0256: Adsorption, desorption, surface mass change, e.g. on biosensors
- G01N 2291/0423: Surface waves, e.g. Rayleigh waves, Love waves
- G01H: MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- B06B: METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, {e.g.} FOR PERFORMING MECHANICAL WORK IN GENERAL (for particular applications, see the relevant subclasses, e.g. B07B1/40, B23Q17/12, B24B31/06; measurement of mechanical vibrations G01H; in direction finding, locating, distance or velocity measuring G01S; {generating seismic energy G01V1/02}; control of mechanical vibrations in general G05D; sound-producing devices, e.g. bells, sirens, whistles G10K, {e.g. methods or devices for transmitting, conducting, or directing sound in general G10K11/00}; generation of electrical oscillations H03B; electromechanical resonators in general H03H; electromechanical transducers {for communication techniques, e.g. microphones, speakers} H04R)
- G01D: MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q)
- H03H: IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS (waveguides, resonators, lines or other devices of the waveguide type H01P)

## Abstract

An acoustic wave element includes a piezoelectric substrate, an excitation electrode configured to excite and output a main acoustic wave on the piezoelectric substrate, a receiving electrode configured to receive the main acoustic wave, a propagation path configured to allow the main acoustic wave to propagate along the piezoelectric substrate between the excitation electrode and the receiving electrode, and a sensing portion configured to react to an object substance. The propagation path is configured to allow the main acoustic wave to pass plural times through the sensing portion along the propagation path. This acoustic wave element has high sensitivity to the object substance.

## Claims

### Claim 1

An acoustic wave element comprising:
a piezoelectric substrate having an upper surface;
a first excitation electrode configured to excite and output a first main acoustic wave on the upper surface of the piezoelectric substrate;
a first receiving electrode configured to receive the first main acoustic wave;
a first propagation path configured to allow the first main acoustic wave to propagate along the upper surface of the piezoelectric substrate from the first excitation electrode to the first receiving electrode;
a second excitation electrode configured to excite and output a second main acoustic wave on the upper surface of the piezoelectric substrate;
a second receiving electrode configured to receive the second main acoustic wave;
a second propagation path configured to allow the second main acoustic wave to propagate along the upper surface of the piezoelectric substrate from the second excitation electrode to the second receiving electrode; and
a sensing portion provided above the first propagation path and the second propagation path, and configured to react to an object substance,
wherein the first propagation path is configured such that the first main acoustic wave passes through the sensing portion a plurality of predetermined times along the first propagation path,
wherein the second propagation path is configured such that the second main acoustic wave passes through the sensing portion a plurality of predetermined times along the second propagation path,
wherein the first receiving electrode is configured to output a first signal in response to the received first main acoustic wave,
wherein the second receiving electrode is configured to output a second signal in response to the received second main acoustic wave, and
wherein the first excitation electrode, the second excitation electrode, the first receiving electrode, and the second receiving electrode are disposed such that the first signal and the second signal are added so as to strengthen each other.

### Claim 2 (depends on 1)

The acoustic wave element according to claim 1,
wherein the sensing portion includes a first outer and a second outer edge, the first outer edge facing the first excitation electrode, the second outer edge facing the first receiving electrode, and
wherein the first propagation path is configured to allow the first main acoustic wave to pass a plurality of times through a region from the first outer edge to the second outer edge of the sensing portion.

### Claim 3 (depends on 1)

The acoustic wave element according to claim 1, further comprising:
a third excitation electrode configured to excite and output a third main acoustic wave on the upper surface of the piezoelectric substrate;
a third receiving electrode configured to receive the third main acoustic wave, and output a third signal in response to the received third main acoustic wave; and
a third propagation path configured to allow the third main acoustic wave to propagate along the upper surface of the piezoelectric substrate from the third excitation electrode to the third receiving electrode,
wherein the sensing portion is provided above the first propagation path, the second propagation path, and the third propagation path,
wherein the third propagation path is configured such that the third main acoustic wave passes through the sensing portion a plurality of times along the third propagation path,
wherein the first excitation electrode is configured to excite and output a fourth main acoustic wave on the upper surface of the piezoelectric substrate, the fourth main acoustic wave passing through the sensing portion only once along the first propagation path,
wherein the first receiving electrode is configured to receive the fourth main acoustic wave and output a fourth signal in response to the received fourth main acoustic wave,
wherein the second excitation electrode is configured to excite and output a fifth main acoustic wave on the upper surface of the piezoelectric substrate, the fifth main acoustic wave passing through the sensing portion only once along the second propagation path,
wherein the second receiving electrode is configured to receive the fifth main acoustic wave and output a fifth signal in response to the received fifth main acoustic wave,
wherein the third excitation electrode is configured to excite a sixth main acoustic wave on the upper surface of the piezoelectric substrate, the sixth main acoustic wave passing through the sensing portion only once along the third propagation path,
wherein the third receiving electrode is configured to receive the sixth main acoustic wave and output a sixth signal in response to the received sixth main acoustic wave, and
wherein the first excitation electrode, the second excitation electrode, the third excitation electrode, the first receiving electrode, the second receiving electrode, and the third receiving electrode are disposed such that the fourth signal, the fifth signal, and the sixth signal are added so as to cancel each other, and that the first signal, the second signal, and the third signal are added so as to strengthen each other.

### Claim 4 (depends on 3)

The acoustic wave element according to claim 3,
wherein the first excitation electrode, the second excitation electrode, and the third excitation electrode are unidirectional electrodes that allow the first main acoustic wave, the second main acoustic wave, and the third main acoustic wave to propagate in directions toward the first receiving electrode, the second receiving electrode, and the third receiving electrode more efficiently than any direction other than the directions toward the first receiving electrode, the second receiving electrode, and the third receiving electrode, respectively, and
wherein the first receiving electrode, the second receiving electrode, and the third receiving electrode are unidirectional electrodes that receive the first main acoustic wave, the second main acoustic wave, and the third main acoustic wave in directions from the first excitation electrode, the second excitation electrode, and the third excitation electrode more efficiently than any direction other than the directions from the first excitation electrode, the second excitation electrode, and the third excitation electrode, respectively.

### Claim 5 (depends on 3)

The acoustic wave element according to claim 3,
wherein each of the first excitation electrode, the second excitation electrode, and the third excitation electrode is an interdigital transducer (IDT) electrode including a pair of comb-shaped electrodes each including a plurality of electrode fingers that interdigitate with each other,
wherein each of the first receiving electrode, the second receiving electrode, and the third receiving electrode is an IDT electrode including a pair of comb-shaped electrodes each including a plurality of electrode fingers that interdigitate with each other,
wherein the sensing portion includes a first outer edge and a second outer edge, the first outer edge facing the first excitation electrode, the second excitation electrode, and the third excitation electrode, the second outer edge facing the first receiving electrode, the second receiving electrode, and the third receiving electrode, and
wherein a direction in which the first outer edge of the sensing portion extends and a direction in which the second outer edge of the sensing portion extends are different from both of a direction in which the plurality of electrode fingers of each of the first excitation electrode, the second excitation electrode, and the third excitation electrode extend and a direction in which the plurality of electrode fingers of each of the first receiving electrode, the second receiving electrode, and the third receiving electrode extend.

### Claim 6 (depends on 3)

The acoustic wave element according to claim 3, further comprising a dielectric layer provided on the upper surface of the piezoelectric substrate for covering the first excitation electrode, the second excitation electrode, the third excitation electrode, the first receiving electrode, the second receiving electrode, and the third receiving electrode.

### Claim 7 (depends on 6)

The acoustic wave element according to claim 6,
wherein the dielectric layer covers the first excitation electrode, the second excitation electrode, the third excitation electrode, the first receiving electrode, the second receiving electrode, the third receiving electrode, the first propagation path, the second propagation path, and the third propagation path, and
wherein the sensing portion is provided on an upper surface of the dielectric layer and above the first propagation path, the second propagation path, and the third propagation path.

### Claim 8 (depends on 7)

The acoustic wave element according to claim 7, wherein the upper surface of the dielectric layer has a recess therein configured to be bound with the object substance.

### Claim 9 (depends on 7)

The acoustic wave element according to claim 7,
wherein the sensing portion includes an adhesion layer provided on the upper surface of the dielectric layer, and
wherein an upper surface of the adhesion layer has a recess therein configured to bond to the object substance.

### Claim 10 (depends on 6)

The acoustic wave element according to claim 6,
wherein an outer edge of the dielectric layer includes a first portion, a second portion, and a third portion opposite to the first receiving electrode, the second receiving electrode, and the third receiving electrode with respect to the first excitation electrode, the second excitation electrode, and the third excitation electrode, respectively
wherein the first excitation electrode is an interdigital transducer (IDT) electrode including a pair of comb-shaped electrodes each including a plurality of electrode fingers that interdigitate with each other,
wherein the second excitation electrode is an IDT electrode including a pair of comb-shaped electrodes each including a plurality of electrode fingers that interdigitate with each other,
wherein the third excitation electrode is an IDT electrode including a pair of comb-shaped electrodes each including a plurality of electrode fingers that interdigitate with each other, and
wherein a direction in which the first portion of the outer edge of the dielectric layer extends, a direction in which the second portion of the outer edge of the dielectric layer extends, and a direction in which the third portion of the outer edge of the dielectric layer extends are different from a direction in which the plurality of electrode fingers of the first excitation electrode extend, a direction in which the plurality of electrode fingers of the second excitation electrode extend, and a direction in which the plurality of electrode fingers of the third excitation electrode extend, respectively.

### Claim 11 (depends on 6)

The acoustic wave element according to claim 6,
wherein an outer edge of the dielectric layer includes a first portion, a second portion, and a third portion opposite to the first excitation electrode, the second excitation electrode, and the third excitation electrode with respect to the first receiving electrode, the second receiving electrode, and the third receiving electrode, respectively,
wherein the first receiving electrode is an interdigital transducer (IDT) electrode including a pair of comb-shaped electrodes each including a plurality of electrode fingers that interdigitate with each other,
wherein the second receiving electrode is an IDT electrode including a pair of comb-shaped electrodes each including a plurality of electrode fingers that interdigitate with each other,
wherein the third receiving electrode is an IDT electrode including a pair of comb-shaped electrodes each having a plurality of electrode fingers that interdigitate with each other, and
wherein a direction in which the first portion of the outer edge of the dielectric layer extends, a direction in which the second portion of the outer edge of the dielectric layer extends, and a direction in which the third portion of the outer edge of the dielectric layer extends are different from a direction in which the plurality of electrode fingers of the first receiving electrode extend, a direction in which the plurality of electrode fingers of the second receiving electrode extend, and a direction in which the plurality of electrode fingers of the third receiving electrode extend, respectively.

### Claim 12 (depends on 1)

The acoustic wave element according to claim 1, further comprising:
third to m-th excitation electrodes (m is an odd number not smaller than three);
third to m-th receiving electrodes; and
third to m-th propagation paths from the third to m-th excitation electrodes to the third to m-th receiving electrodes, respectively,
wherein the third to m-th excitation electrodes are configured to excite and output third to m-th main acoustic waves on the upper surface of the piezoelectric substrate, respectively
wherein the third to m-th receiving electrodes are configured to receive the third to m-th main acoustic waves output from the third to m-th excitation electrodes, respectively
wherein the third to m-th propagation paths are configured to allow the third to m-th main acoustic waves to propagate, respectively,
wherein the sensing portion is provided above the first to m-th propagation paths,
wherein the first to m-th main acoustic waves have a wavelength λ,
wherein two of first to m-th distances which are from the first to m-th excitation electrodes to the first to m-th receiving electrodes, respectively, are different from each other by a difference ranging from λ/m+nλ−λ/18·(m−1) to λ/m+n·λ+λ/18·(m−1) (where n is an integer), and
wherein the third to m-th main acoustic waves pass through the sensing portion a plurality of times along the third to m-th propagation paths, respectively.

### Claim 13 (depends on 1)

The acoustic wave element according to claim 1, further comprising:
a first reflector configured to reflect the first main acoustic wave; and
a second reflector configured to reflect the second main acoustic wave;
wherein the first propagation path is provided between the first receiving electrode and the first reflector,
wherein the second propagation path is provided between the second receiving electrode and the second reflector,
wherein the first excitation electrode is configured to excite and output a third main acoustic wave on the upper surface of the piezoelectric substrate, the third main acoustic wave reaching the first receiving electrode without passing through the sensing portion,
wherein the second excitation electrode is configured to excite and output a fourth main acoustic wave on the upper surface of the piezoelectric substrate, the fourth main acoustic wave reaching the second receiving electrode without passing through the sensing portion,
wherein the output first main acoustic wave passes through the first receiving electrode, then, is reflected by the first reflector along the first propagation path, and reaches the first receiving electrode to be received by the first receiving electrode,
wherein the output second main acoustic wave passes through the second receiving electrode, then, is reflected by the first reflector along the second propagation path, and reaches the second receiving electrode to be received by the second receiving electrode,
wherein the first receiving electrode is configured to receive the third main acoustic wave reaching the first receiving electrode and to output a third signal in response to the third main acoustic wave reaching the first receiving electrode,
wherein the second receiving electrode is configured to receive the fourth main acoustic wave reaching the second receiving electrode and to output a fourth signal in response to the fourth main acoustic wave reaching the second receiving electrode, and
wherein the first excitation electrode, the second excitation electrode, the first receiving electrode, the second receiving electrode, the first reflector, and the second reflector are disposed such that the third signal and the fourth signal are added so as to cancel each other, and that the first signal and the second signal are added so as to strengthen each other.

### Claim 14 (depends on 13)

The acoustic wave element according to claim 13, wherein the first excitation electrode and the second excitation electrode are unidirectional electrodes that allow the first main acoustic wave and the second main acoustic wave to propagate in directions toward the first receiving electrode and the second receiving electrode more efficiently than any direction other than the directions toward the first receiving electrode and the second receiving electrode, respectively.

### Claim 15 (depends on 13)

The acoustic wave element according to claim 13,
wherein the sensing portion includes a first outer edge and a second outer edge, the first outer edge facing the first receiving electrode and the second receiving electrode, the second outer edge facing the first reflector and the second reflector,
wherein each of the first receiving electrode and the second receiving electrode is an interdigital transducer (IDT) electrode including a pair of comb-shaped electrodes each including a plurality of electrode fingers that interdigitate with each other,
wherein each of the first reflector and the second reflector is a grating reflector including a plurality of electrode fingers, and
wherein a direction in which the first outer edge of the sensing portion extends and a direction in which the second outer edge of the sensing portion extends are different from both of a direction in which the plurality of electrode fingers of each of the first receiving electrode and the second receiving electrode extend and a direction in which the plurality of electrode fingers of each of the first reflector and the second reflector extend.

### Claim 16 (depends on 13)

The acoustic wave element according to claim 13, further comprising a dielectric layer provided on the upper surface of the piezoelectric substrate for covering at least the first excitation electrode, the second excitation electrode, the first receiving electrode, the second receiving electrode, the first reflector, and the second reflector.

### Claim 17 (depends on 13)

The acoustic wave element according to claim 13, further comprising
a dielectric layer provided on the upper surface of the piezoelectric substrate for covering at least the first excitation electrode, the second excitation electrode, the first receiving electrode, the second receiving electrode, the first propagation path, and the second propagation path,
wherein the sensing portion is provided on an upper surface of the dielectric layer and above the first propagation path and the second propagation path.

### Claim 18 (depends on 17)

The acoustic wave element according to claim 17, wherein the upper surface of the dielectric layer has a recess therein configured to be bound with the object substance.

### Claim 19 (depends on 17)

The acoustic wave element according to claim 17,
wherein the sensing portion includes an adhesion layer provided on the upper surface of the dielectric layer, and
wherein an upper surface of the adhesion layer has a recess configured to be bound with the object substance.

### Claim 20 (depends on 16)

The acoustic wave element according to claim 16,
wherein an outer edge of the dielectric layer includes a first portion and a second portion opposite to the first receiving electrode and the second receiving electrode with respect to the first excitation electrode and the second excitation electrode, respectively,
wherein the first excitation electrode is an interdigital transducer (IDT) electrode including a pair of comb-shaped electrodes each including a plurality of electrode fingers that interdigitate with each other,
wherein the second excitation electrode is an IDT electrode including a pair of comb-shaped electrodes each including a plurality of electrode fingers that interdigitate with each other, and
wherein a direction in which the first portion of the outer edge of the dielectric layer extends and a direction in which the second portion of the outer edge of the dielectric layer extends are different from a direction in which the plurality of electrode fingers of the first excitation electrode extend and a direction in which the plurality of electrode fingers of the second excitation electrode extend, respectively.

### Claim 21 (depends on 16)

The acoustic wave element according to claim 16,
wherein an outer edge of the dielectric layer includes a first portion and a second portion opposite to the first receiving electrode and the second receiving electrode with respect to the first reflector and the second reflector, respectively,
wherein each of the first reflector and the second reflector is a grating reflector including a plurality of electrode fingers, and
wherein a direction in which the first portion of the outer edge of the dielectric layer extends and a direction in which the second portion of the outer edge of the dielectric layer extends are different from a direction in which the plurality of electrode fingers of the first reflector extend and a direction in which the plurality of electrode fingers of the second reflector extend, respectively.

### Claim 22 (depends on 17)

The acoustic wave element according to claim 17,
wherein an outer edge of the dielectric layer includes a first portion and a second portion opposite to the first receiving electrode and the second receiving electrode with respect to the first excitation electrode and the second excitation electrode, respectively,
wherein the first excitation electrode is an interdigital transducer (IDT) electrode including a pair of comb-shaped electrodes each including a plurality of electrode fingers that interdigitate with each other,
wherein the second excitation electrode is an IDT electrode including a pair of comb-shaped electrodes each including a plurality of electrode fingers that interdigitate with each other, and
wherein a direction in which the first portion of the outer edge of the dielectric layer extends and a direction in which the second portion of the outer edge of the dielectric layer extends are different from a direction in which the plurality of electrode fingers of the first excitation electrode extend and a direction in which the plurality of electrode fingers of the second excitation electrode extend, respectively.

### Claim 23 (depends on 17)

The acoustic wave element according to claim 17,
wherein an outer edge of the dielectric layer includes a first portion and a second portion opposite to the first receiving electrode and the second receiving electrode with respect to the first reflector and the second reflector, respectively,
wherein each of the first reflector and the second reflector is a grating reflector including a plurality of electrode fingers, and
wherein a direction in which the first portion of the outer edge of the dielectric layer extends and a direction in which the second portion of the outer edge of the dielectric layer extends are different from a direction in which the plurality of electrode fingers of the first reflector extend and a direction in which the plurality of electrode fingers of the second reflector extend, respectively.

### Claim 24 (depends on 13)

The acoustic wave element according to claim 13, further comprising a shield electrode provided between each of the first excitation electrode and the second excitation electrode and each of the first receiving electrode and the second receiving electrode.

### Claim 25 (depends on 1)

The acoustic wave element according to claim 1, further comprising:
a first reflector provided on the first propagation path; and
a second reflector provided on the second propagation path,
wherein the first excitation electrode is configured to excite a third main acoustic wave on the upper surface of the piezoelectric substrate, the third main acoustic wave reaching the first receiving electrode after passing through the sensing portion only once along the first propagation path,
wherein the second excitation electrode is configured to excite a fourth main acoustic wave on the upper surface of the piezoelectric substrate, the fourth main acoustic wave reaching the second receiving electrode after passing through the sensing portion only once along the third propagation path,
wherein the first receiving electrode is configured to receive the third main acoustic wave and to output a third signal in response to the received third main acoustic wave,
wherein the second receiving electrode is configured to receive the fourth main acoustic wave and to output a fourth signal in response to the received fourth main acoustic wave,
wherein the first excitation electrode, the second excitation electrode, the first receiving electrode, the second receiving electrode, the first reflector, and the second reflector are disposed such that the third signal and the fourth signal are added so as to cancel each other, and that the first signal and the second signal are added so as to strengthen each other.

### Claim 26 (depends on 25)

The acoustic wave element according to claim 25,
wherein the first excitation electrode and the second excitation electrode are unidirectional electrodes that allow the first main acoustic wave and the second main acoustic wave to propagate in directions toward the first receiving electrode and the second receiving electrode more efficiently than any direction other than the directions toward the first receiving electrode and the second receiving electrode, respectively, and
wherein the first receiving electrode and the second receiving electrode are unidirectional electrodes that receive the first main acoustic waves-wave and the second main acoustic wave in directions from the first excitation electrode and the second excitation electrode more efficiently than any direction other than the directions from the first excitation electrode and the second excitation electrode, respectively.

### Claim 27 (depends on 25)

The acoustic wave element according to claim 25,
wherein the sensing portion includes a first outer edge and a second outer edge, the first outer edge facing the first excitation electrode and the second excitation electrode, the second outer edge facing the first receiving electrode and the second receiving electrode,
wherein each of the first excitation electrode and the second excitation electrode is an interdigital transducer (IDT) electrode including a pair of comb-shaped electrodes each including a plurality of electrode fingers that interdigitate with each other,
wherein each of the first receiving electrode and the second receiving electrode is an IDT electrode including a pair of comb-shaped electrodes each including a plurality of electrode fingers that interdigitate with each other, and
wherein a direction in which the first outer edge of the sensing portion extends and a direction in which the second outer edge of the sensing portion extends are different from both of a direction in which the pluralities of electrode fingers of the first excitation electrode and the second excitation electrode extend and a direction in which the plurality of electrode fingers of the first receiving electrode and the second receiving electrode extend, respectively.

### Claim 28 (depends on 25)

The acoustic wave element according to claim 25, further comprising a dielectric layer provided on the upper surface of the piezoelectric substrate for covering at least the first excitation electrode, the second excitation electrode, the first receiving electrode, the second receiving electrode, the first reflector, and the second reflector.

### Claim 29 (depends on 28)

The acoustic wave element according to claim 28,
wherein the dielectric layer covers the first excitation electrode, the second excitation electrode, the first receiving electrode, the second receiving electrode, the first propagation path, and the second propagation path, and
wherein the sensing portion is provided on an upper surface of the dielectric layer and above the first propagation path and the second propagation path.

### Claim 30 (depends on 29)

The acoustic wave element according to claim 29, wherein the upper surface of the dielectric layer has a recess therein configured to be bound with the object substance.

### Claim 31 (depends on 29)

The acoustic wave element according to claim 29,
wherein the sensing portion includes an adhesion layer provided on the upper surface of the dielectric layer, and
wherein an upper surface of the adhesion layer has a recess therein configured to be bound with the object substance.

### Claim 32 (depends on 28)

The acoustic wave element according to claim 28,
wherein an outer edge of the dielectric layer includes a first portion and a second portion opposite to the first receiving electrode and the second receiving electrode with respect to the first excitation electrode and the second excitation electrode, respectively,
wherein the first excitation electrode is an interdigital transducer (IDT) electrode including a pair of comb-shaped electrodes each including a plurality of electrode fingers that interdigitate with each other,
wherein the second excitation electrode is an IDT electrode including a pair of comb-shaped electrodes each including a plurality of electrode fingers that interdigitate with each other, and
wherein a direction in which the first portion of the outer edge of the dielectric layer extends and a direction in which the second portion of the outer edge of the dielectric layer extends are different from a direction in which the plurality of electrode fingers of the first excitation electrode extend and a direction in which the plurality of electrode fingers of the second excitation electrode extend, respectively.

### Claim 33 (depends on 28)

The acoustic wave element according to claim 28,
wherein an outer edge of the dielectric layer includes a first portion and a second portion opposite to the first excitation electrode and the second excitation electrode with respect to the first receiving electrode and the second receiving electrode, respectively,
wherein the first receiving electrode is an interdigital transducer (IDT) electrode including a pair of comb-shaped electrodes each including a plurality of electrode fingers that interdigitate with each other,
wherein the second receiving electrode is an IDT electrode including a pair of comb-shaped electrodes each including a plurality of electrode fingers that interdigitate with each other, and
wherein a direction in which the first portion of the outer edge of the dielectric layer extends and a direction in which the second portion of the outer edge of the dielectric layer extends are different from a direction in which the plurality of electrode fingers of the first receiving electrode extend and a direction in which the plurality of electrode fingers of the second receiving electrode extend, respectively.

### Claim 34 (depends on 1)

An acoustic wave sensor comprising:
the acoustic wave element according to claim 1; and
a detector configured to detect a characteristic of the first main acoustic wave received by the receiving electrodes.

### Claim 35

An acoustic wave element comprising:
a piezoelectric substrate having an upper surface;
an excitation electrode configured to excite and output a main acoustic wave on the upper surface of the piezoelectric substrate;
a first reflector configured to reflect the main acoustic wave output from the excitation electrode;
a second reflector configured to reflect the main acoustic wave reflected by the first reflector;
a receiving electrode configured to receive the main acoustic wave reflected by the second reflector;
a propagation path configured to allow the main acoustic wave to propagate along the upper surface of the piezoelectric substrate from the excitation electrode to the receiving electrode via the first reflector and the second reflector; and
a sensing portion provided above the propagation path, and configured to react to an object substance,
wherein the propagation path is configured to allow the main acoustic wave to pass through the sensing portion a plurality of times.

### Claim 36 (depends on 35)

The acoustic wave element according to claim 35,
wherein the sensing portion includes a first outer edge and a second outer edge, the first outer edge facing the excitation electrode, the second outer edge facing the receiving electrode, and
wherein the propagation path is configured to allow the main acoustic wave to pass a plurality of times through a region from the first outer edge to the second outer edge of the sensing portion.

### Claim 37 (depends on 35)

The acoustic wave element according to claim 35,
wherein the excitation electrode is a unidirectional electrode that allows the main acoustic wave to propagate in a direction toward the first reflector more efficiently than any direction other than the direction toward the first reflector, and
wherein the receiving electrode is a unidirectional electrode that receives the main acoustic wave in a direction from the second reflector more efficiently than any direction other than the direction from the second reflector.

### Claim 38 (depends on 35)

The acoustic wave element according to claim 35,
wherein the sensing portion includes a first outer edge and a second outer edge, the first outer edge facing the excitation electrode, the second outer edge facing the first reflector,
wherein the excitation electrode is an interdigital transducer (IDT) electrode including a pair of comb-shaped electrodes each including a plurality of electrode fingers that interdigitate with each other,
wherein the first reflector is a grating reflector including a plurality of electrode fingers, and
wherein a direction in which the first outer edge of the sensing portion extends and a direction in which the second outer edge of the sensing portion extends are different from both of a direction in which the plurality of electrode fingers of the excitation electrode extend and a direction in which the plurality of electrode fingers of the first reflector extend.

### Claim 39 (depends on 35)

The acoustic wave element according to claim 35,
wherein the propagation path includes a portion from the excitation electrode to the first reflector,
wherein the sensing portion includes a first outer edge and a second outer edge, the first outer edge facing the excitation electrode, the second outer edge facing the first reflector, and
wherein a direction in which the first outer edge of the sensing portion extends and a direction in which the second outer edge of the sensing portion extends incline with respect to the portion of the propagation path.

### Claim 40 (depends on 35)

The acoustic wave element according to claim 35,
wherein the first reflector is a grating reflector including a plurality of electrode fingers,
wherein the second reflector is a grating reflector including a plurality of electrode fingers,
wherein the sensing portion includes a first outer edge and a second outer edge, the first outer edge facing the first reflector, the second outer edge facing the second reflector, and
wherein a direction in which the first outer edge of the sensing portion extends and a direction in which and the second outer edge of the sensing portion extends are different from both of a direction in which the plurality of electrode fingers of the first reflector extend and a direction in which the plurality of electrode fingers of the second reflector extend.

### Claim 41 (depends on 35)

The acoustic wave element according to claim 35,
wherein the propagation path includes a portion from the first reflector to the second reflector,
wherein the sensing portion includes a first outer edge and a second outer edge, the first outer edge facing the first reflector, the second outer edge facing the second reflector, and
wherein a direction in which the first outer edge of the sensing portion extends and a direction in which the second outer edge of the sensing portion extends incline with respect to the portion of the propagation path.

### Claim 42 (depends on 35)

The acoustic wave element according to claim 35,
wherein the receiving electrode is an interdigital transducer (IDT) electrode including a pair of comb-shaped electrodes each including a plurality of electrode fingers that interdigitate with each other,
wherein the second reflector is a grating reflector including a plurality of electrode fingers,
wherein the sensing portion includes a first outer edge and a second outer edge, the first outer edge facing the receiving electrode, the second outer edge facing the second reflector, and
wherein a direction in which the first outer edge of the sensing portion extends and a direction in which the second outer edge of the sensing portion extends are different from both of a direction in which the plurality of electrode fingers of the receiving electrode extend and a direction in which the plurality of electrode fingers of the second reflector extend.

### Claim 43 (depends on 35)

The acoustic wave element according to claim 35,
wherein the propagation path includes a portion from the second reflector to the receiving electrode,
wherein the sensing portion includes a first outer edge and a second outer edge, the first outer edge facing the receiving electrode, the second outer edge facing the second reflector, and
wherein a direction in which the first outer edge of the sensing portion extends and a direction in which the second outer edge of the sensing portion extends incline with respect to the portion of the propagation path.

### Claim 44 (depends on 35)

The acoustic wave element according to claim 35, further comprising a dielectric layer provided on the upper surface of the piezoelectric substrate for covering the excitation electrode, the receiving electrode, the first reflector, and the second reflector.

### Claim 45 (depends on 44)

The acoustic wave element according to claim 44,
wherein the dielectric layer further covers the propagation path, and
wherein the sensing portion is provided on an upper surface of the dielectric layer.

### Claim 46 (depends on 45)

The acoustic wave element according to claim 45, wherein the upper surface of the dielectric layer has a recess therein configured to be bound with the object substance.

### Claim 47 (depends on 45)

The acoustic wave element according to claim 45,
wherein the sensing portion includes an adhesion layer provided on the upper surface of the dielectric layer, and
wherein the adhesion layer has an upper surface having a recess therein configured to be bound with the object substance.

### Claim 48 (depends on 44)

The acoustic wave element according to claim 44,
wherein the dielectric layer has an outer edge opposite to the first reflector with respect to the excitation electrode,
wherein the excitation electrode is an interdigital transducer (IDT) electrode including a pair of comb-shaped electrodes each including a plurality of electrode fingers that interdigitate with each other, and
wherein a direction in which the outer edge of the dielectric layer extends is different from a direction in which the plurality of electrode fingers of the excitation electrode extend.

### Claim 49 (depends on 44)

The acoustic wave element according to claim 44,
wherein the dielectric layer has an outer edge opposite to the second reflector with respect to the receiving electrode,
wherein the receiving electrode is an interdigital transducer (IDT) electrode including a pair of comb-shaped electrodes each including a plurality of electrode fingers that interdigitate with each other, and
wherein a direction in which the outer edge of the dielectric layer extends is different from a direction in which the plurality of electrode fingers of the receiving electrode extend.

### Claim 50 (depends on 35)

An acoustic wave sensor comprising:
the acoustic wave element according to claim 35; and
a detector configured to detect a characteristic of the main acoustic wave received by the receiving electrode.