# US 9,518,814 B2 · Integrated micro actuator and LVDT for high precision position measurements

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- Number: US 9,518,814 B2
- Document ID: US9518814B2
- Status: Granted
- Kind: B2
- Application number: 13/959,943
- Filed: 2013-08-06
- Published: 2013-11-28
- Granted: 2016-12-13
- Earliest claimed: 2008-10-14
- Assignees: Oxford Instruments Asylum Research Inc
- Applicants: Roger Proksch; Dan Bocek; Jason Cleveland; Matthew Longmire; Matthew Klonowski
- Inventors: Roger Proksch; Dan Bocek; Jason Cleveland; Matthew Longmire; Matthew Klonowski
- Web page: https://patentgrep.com/patent/US9518814B2

## CPC

- G01D 5/2291: {Linear or rotary variable differential transformers (LVDTs/RVDTs) having a single primary coil and two secondary coils}
- G01B 7/14: for measuring distance or clearance between spaced objects or spaced apertures (G01B7/30 takes precedence)
- G01Q 10/04: Fine scanning or positioning
- H01F 21/04: by relative movement of turns or parts of windings
- G01D: MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01Q: SCANNING-PROBE TECHNIQUES OR APPARATUS; APPLICATIONS OF SCANNING-PROBE TECHNIQUES, e.g. SCANNING PROBE MICROSCOPY [SPM]
- H01F: MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES

## Abstract

A single housing with a non-ferromagnetic piezo-driven flexure has primary and secondary coil forms of different diameters, one coaxially inside the other, integrated in the flexure. The cylinders defining the planes of the primary and secondaries do not spatially overlap. The secondary coil forms may be wound in opposite directions and wired to provide a transformer device. Movement of the primary relative to the secondaries in the direction of the central axis of the coils can be differentially detected with high precision.

## Claims

### Claim 1

An LVDT assembly, comprising:
a housing, having a cylindrical shape, having first internal screw threads;
a top portion, having screw threads, said top portion screwed into said first internal screw threads,
said housing having surfaces forming a first internal channel, said first internal channel attached to said first internal screw threads,
a primary coil, wound around said first internal channel of said housing, around a central axis of said housing;
said housing having a second pair of channels, concentric to the first internal channel, and connected to a portion of the housing that does not move as the first internal channel is moved;
a secondary coil, having first and second parts, said secondary coil wound respectively on said pair of channels, coaxially to said primary coil,
and located so that said primary coil and said secondary coil moves along said central axis, relative to one another in a substantially parallel direction; said top portion tightened to said screw threads to preload the assembly,
a first electrical connection to said primary coil, extending through said housing; and
a second electrical connection to said secondary coil, extending through said housing.

### Claim 2 (depends on 1)

An LVDT as in claim 1, wherein said first part of said secondary coil is separated from said primary coil in a first direction along said central axis and said second part of said secondary coil is separated from said primary coil in a second direction opposite to said first direction along said axis.

### Claim 3 (depends on 1)

An LVDT as in claim 1, wherein said first electrical connection comprises a conduit formed in said housing.

### Claim 4 (depends on 1)

An LVDT as in claim 1, wherein said housing includes-structure forming a flexure formed as part of said housing, that allows said top portion to move along said central axis, independently of said second pair of channels, and wherein said top portion tightened to said screw threads preloads the flexure.

### Claim 5 (depends on 1)

An LVDT as in claim 1, further comprising a piezo device pressing against said top portion, and wherein movement of the the piezo device causes movement of the flexure.

### Claim 6 (depends on 5)

An LVDT as in claim 5, wherein said top surface is substantially perpendicular to both said second surface and said first surface.