# US 9,518,323 B2 · Methods, equipment and systems for measuring radio frequency crosstalk > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,518,323 B2 - Document ID: US9518323B2 - Status: Granted - Kind: B2 - Application number: 14/277,011 - Filed: 2014-05-13 - Published: 2015-01-01 - Granted: 2016-12-13 - Earliest claimed: 2013-06-28 - Assignees: Xiamen Tianma Micro-Electronics Co., Ltd.; Tianma Micro-Electronics Co., Ltd. - Applicants: Xiamen Tianma Micro-Electronics Co., Ltd.; Tianma Micro-Electronics Co., Ltd. - Inventors: Weiji Chen; Mingguang Cai; Lei Wang - Web page: https://patentgrep.com/patent/US9518323B2 ## CPC - C23C 16/509: using internal electrodes - G01R 29/0871: {Complete apparatus or systems; circuits, e.g. receivers or amplifiers (G01R29/0878, G01R29/0892 take precedence; dosimeters, warning devices G01R29/0857)} - C23C: COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL (making metal-coated products by extrusion B21C23/22; covering with metal by connecting pre-existing layers to articles, see the relevant places, e.g. B21D39/00, B23K; metallising of glass C03C; metallising mortars, concrete, artificial stone, ceramics or natural stone C04B41/00; enamelling of, or applying a vitreous layer to, metals C23D; treating metal surfaces or coating of metals by electrolysis or electrophoresis C25D; single-crystal film growth C30B; by metallising textiles D06M11/83; decorating textiles by locally metallising D06Q1/04) - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) ## Abstract Method, equipment and systems for measuring a radio frequency crosstalk are disclosed. The method includes: adjusting an impedance value of a matching network associated with a radio frequency electrode (including an anode and a cathode) in a plasma enhanced chemical vapor deposition (PECVD) system, and/or adjusting an impedance value of a radio frequency energy generating equipment associated with the radio frequency electrode, so that the sum of the impedance value of the matching network and the impedance value of the radio frequency electrode is the same as the impedance value of the radio frequency energy generating equipment; measuring an electrical signal received by the radio frequency electrode by the reversibility of energy transfer between the radio frequency electrode and the radio frequency energy generating equipment; and determining the energy of radio frequency crosstalk that the radio frequency electrode is subjected to according to the measured electrical signal. ## Claims ### Claim 1 A method for measuring radio frequency crosstalk, comprising: adjusting an impedance value of a matching network associated with a radio frequency electrode in a plasma enhanced chemical vapor deposition (PECVD) system, and/or adjusting an impedance value of a radio frequency energy generating equipment associated with the radio frequency electrode, so that a sum of the impedance value of the matching network and a impedance value of the radio frequency electrode is substantially the same as the impedance value of the radio frequency energy generating equipment; suspending transmission of radio frequency energy from the radio frequency energy generation equipment to the radio frequency electrode, and detecting the electrical signal received by the radio frequency electrode during the suspending transmission of radio frequency energy from the radio frequency energy generation equipment to the radio frequency electrode; and determining an energy of a radio frequency crosstalk at least based on the electrical signal received. ### Claim 2 (depends on 1) The method according to claim 1, wherein the electrical signal received by the radio frequency electrode comprises one or more types of radio frequency energy radiated by other radio frequency electrodes in the PECVD system and received by the radio frequency electrode and radio frequency energy leaked in a radio frequency transmission line and received by the radio frequency electrode. ### Claim 3 (depends on 1) The method according to claim 1, wherein adjusting the impedance value of the matching network associated with the radio frequency electrode in the PECVD system comprises: fixing an output frequency of the radio frequency energy generating equipment associated with the radio frequency electrode in the PECVD system, and adjusting the impedance value of the matching network associated with the radio frequency electrode in the PECVD system. ### Claim 4 (depends on 1) The method according to claim 1, wherein adjusting the impedance value of the radio frequency energy generating equipment associated with the radio frequency electrode in the PECVD system comprises: fixing the impedance value of the matching network associated with the radio frequency electrode in the PECVD system, and adjusting the impedance value of the radio frequency energy generating equipment associated with the radio frequency electrode in the PECVD system. ### Claim 5 (depends on 1) The method according to claim 1, wherein adjusting the impedance value of the radio frequency energy generating equipment associated with the radio frequency electrode in the PECVD system comprises: fixing the impedance value of the matching network associated with the radio frequency electrode in the PECVD system, and adjusting an output frequency of the radio frequency energy generating equipment associated with the radio frequency electrode in the PECVD system. ### Claim 6 (depends on 5) The method according to claim 5, wherein adjusting the output frequency of the radio frequency energy generating equipment associated with the radio frequency electrode in the PECVD system comprises: adjusting the output frequency of the radio frequency energy generating equipment associated with the radio frequency electrode in the PECVD system within a frequency range of 1 to 1,000 MHz. ### Claim 7 (depends on 1) The method according to claim 1, wherein the received electrical signal comprises a current signal and/or a voltage signal. ### Claim 8 (depends on 1) The method according to claim 1, wherein the determining the energy of the radio frequency crosstalk that the radio frequency electrode is subjected to according to the measured electrical signal comprises: calculating a radio frequency energy value generated by the measured electrical signal according to the measured electrical signal, and taking the calculated radio frequency energy value as the energy of the radio frequency crosstalk that the radio frequency electrode is subjected to. ### Claim 9 An equipment for determining radio frequency crosstalk, comprising: an adjusting module, configured for adjusting an impedance value of a matching network associated with a radio frequency electrode in a plasma enhanced chemical vapor deposition (PECVD) system or adjusting an impedance value of a radio frequency energy generating equipment associated with the radio frequency electrode, so that a sum of the impedance value of the matching network and a impedance value of the radio frequency electrode is substantially the same as the impedance value of the radio frequency energy generating equipment; a measurement module, configured for instructing the radio frequency energy generating equipment to suspend transmission of radio frequency energy to the radio frequency electrode and detecting the electrical signal received by the radio frequency electrode; and measuring an electrical signal received by the radio frequency electrode during radio frequency energy generating equipment suspending transmission of radio frequency energy to the radio frequency electrode; and a calculation module, configured for determining an energy of a radio frequency crosstalk based at least on the electrical signal received. ### Claim 10 (depends on 9) The equipment according to claim 9, wherein the electrical signal received by the radio frequency electrode comprises one or more types of radio frequency energy radiated by other radio frequency electrodes in the PECVD system and received by the radio frequency electrode and radio frequency energy leaked in a radio frequency transmission line and received by the radio frequency electrode. ### Claim 11 (depends on 9) The equipment according to claim 9, wherein the adjusting module is configured for fixing an output frequency of the radio frequency energy generating equipment associated with the radio frequency electrode in the PECVD system and adjusting the impedance value of the matching network associated with the radio frequency electrode in the PECVD system. ### Claim 12 (depends on 9) The equipment according to claim 9, wherein the adjusting module is configured for fixing the impedance value of the matching network associated with the radio frequency electrode in the PECVD system and adjusting an output frequency of the radio frequency energy generating equipment associated with the radio frequency electrode in the PECVD system. ### Claim 13 (depends on 9) The equipment according to claim 9, wherein the adjusting module is configured for fixing the impedance value of the matching network associated with the radio frequency electrode in the PECVD system and adjusting the impedance value of the radio frequency energy generating equipment associated with the radio frequency electrode in the PECVD system. ### Claim 14 A method for determining interference in a PECVD system, the method comprising: measuring a first impedance value of an RF source and an second impedance value of an electrode; providing a matching module, the matching module being electrically coupled to the RF source and electrode, the matching module being characterized by a third impedance value, the third impedance value being adjustable; adjusting the third impedance value at least based on the first impedance value and the second impedance value; suspending transmission of radio frequency energy from the RF source to the electrode, and measuring an electrical signal received by the electrode during suspending transmission of radio frequency energy from the RF source to the electrode; and determining a crosstalk energy based on the electrical signal received. ### Claim 15 (depends on 14) The method claim 14 further comprising adjusting the first impedance value and/or the third impedance value to maximize a plasma energy level associated with the electrode.