# US 9,517,873 B1 · Clean storage packaging article and method for making and using

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- Number: US 9,517,873 B1
- Document ID: US9517873B1
- Status: Granted
- Kind: B1
- Application number: 13/630,129
- Filed: 2012-09-28
- Granted: 2016-12-13
- Earliest claimed: 2012-09-28
- Assignees: Air Liquide Electronics U.S. LP
- Applicants: Air Liquide Electronics U.S. LP
- Inventors: Fuhe Li; James Scott Anderson
- Web page: https://patentgrep.com/patent/US9517873B1

## CPC

- B65D 81/18: providing specific environment for contents, e.g. temperature above or below ambient (with thermal insulation B65D81/38)
- B32B 1/00: Layered products having a non-planar shape
- B32B 27/08: of synthetic resin
- B32B 27/304: {comprising vinyl halide (co)polymers, e.g. PVC, PVDC, PVF, PVDF}
- B32B 27/322: {comprising halogenated polyolefins, e.g. PTFE}
- B65B 55/24: Cleaning of, or removing dust from, containers, wrappers, or packaging {; Preventing of fouling}
- B65D 25/205: {Means for the attachment of labels, cards, coupons or the like; (cards or coupons for the other types of rigid or semi-rigid containers B65D25/36 takes precedence)}
- B65D 85/38: for delicate optical, measuring, calculating or control apparatus
- C08F 114/22: Vinylidene fluoride
- H10P 72/1908: {specially adapted for containing substrates other than wafers}
- H10P 72/1911: {characterised by materials, roughness, coatings or the like}
- B32B 2307/31: Heat sealable
- B32B 2307/41: Opaque
- B32B 2307/414: Translucent
- B32B 2307/546: Flexural strength; Flexion stiffness
- B32B 2307/714: Inert, i.e. inert to chemical degradation, corrosion
- B32B 2439/46: Bags
- B32B 2553/00: Packaging equipment or accessories not otherwise provided for
- B65D: CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS, e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES, DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS; ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR; PACKAGING ELEMENTS; PACKAGES
- B32B: LAYERED PRODUCTS, i.e. PRODUCTS BUILT-UP OF STRATA OF FLAT OR NON-FLAT, e.g. CELLULAR OR HONEYCOMB, FORM
- B65B: MACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING (bundling and pressing devices for cigars A24C1/44; devices for tensioning and securing binders adapted to be supported by the article or articles to be bound B25B25/00; applying closure members to bottles, jars or similar containers B67B1/00-B67B6/00; concurrent cleaning, filling and closing of bottles B67C7/00; emptying bottles, jars, cans, casks, barrels or similar containers B67C9/00)
- C08F: MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVING CARBON-TO-CARBON UNSATURATED BONDS
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

A packing article for the storage and/or transport of items and materials requiring high levels of cleanliness is described. Methods of making and using the packaging article are also described. The packaging article may be used to store or transport, for example, advanced optical components, or materials and components used in the manufacturing of microelectronic devices or optical components. A method of making the packaging article includes contacting the packaging article with organic solvent(s) and acidic solution(s) and rinsing with ultrapure water. Interior cleanliness levels for various contaminants, such as, metals, anionic materials, organic compounds, and particles may be verified and the packaging articles may be labeled and sorted according to cleanliness level.

## Claims

### Claim 1

A method of making a packaging article for clean items, comprising:
providing a packaging article made of a fluoropolymer material;
placing the packaging article in contact with a solution comprising an organic solvent, then rinsing the packaging article with ultrapure water;
placing the packaging article in contact with an acid solution, then rinsing the packaging article with ultrapure water; and
drying the packaging article to produce the packaging article having an interior surface with:
less than 1×1010 atoms/cm2 of each of the following metals: aluminum, calcium, copper, iron, magnesium, potassium, sodium, and zinc;
less than 1×1010 ions/cm2 for each of the following anions: fluoride, chloride, nitrite, sulfate, and phosphate; and
less than 2 nanogram/cm2 of each of the following organic compounds: compounds with seven to ten carbon atoms, compounds with eleven to twenty carbon atoms, and compounds with greater than 20 carbon atoms.

### Claim 2 (depends on 1)

The method of claim 1, wherein the organic solvent comprises isopropyl alcohol (C3H7OH).

### Claim 3 (depends on 1)

The method of claim 1, wherein the acidic solution comprises aqueous nitric acid (HNO3).

### Claim 4 (depends on 1)

The method of claim 1, wherein the contact with the organic solvent includes a stagnant leach step approximately 60 minutes long.

### Claim 5 (depends on 1)

The method of claim 1, wherein the contact with the acidic solution includes a stagnant leach step approximately 60 minutes long.

### Claim 6 (depends on 1)

The method of claim 1, wherein all steps are performed at ambient temperature.

### Claim 7 (depends on 1)

The method of claim 1, wherein drying the packaging article comprises placing the packaging article in a clean hood.

### Claim 8 (depends on 1)

The method of claim 1, further comprising: verifying a cleanliness level of the packaging article.

### Claim 9 (depends on 8)

The method of claim 8, wherein verifying the cleanliness level is done using a laser particle counter.

### Claim 10 (depends on 8)

The method of claim 8, further comprising: sorting the packaging article by the cleanliness level.

### Claim 11

A method for storing clean items, comprising:
obtaining a packaging article made of fluoropolymer material, the packaging article having been cleaned according to a process comprising steps of:
placing the packaging article in contact with a solution comprising an organic solvent, then rinsing the packaging article with ultrapure water;
placing the packaging article in contact with an acid solution, then rinsing the packaging article with ultrapure water; and
drying the packaging article to produce the packaging article having an interior surface with:
less than 1×1010 atoms/cm2 of each of the following metals: aluminum, calcium, copper, iron, magnesium, potassium, sodium, and zinc;
less than 1×1010 ions/cm2 for each of the following anions: fluoride, chloride, nitrite, sulfate, and phosphate; and
less than 2 nanogram/cm2 of each of the following organic compounds: compounds with seven to ten carbon atoms, compounds with eleven to twenty carbon atoms, and compounds with greater than 20 carbon atoms;
placing an item or items inside the packaging article; and
sealing the packaging article.

### Claim 12 (depends on 11)

The method of claim 11, wherein the sealing of the packaging article comprises heat welding.

### Claim 13 (depends on 11)

The method of claim 11, wherein the item placed in the packaging article is an advanced optical component.

### Claim 14

A method of making a packaging article for clean semiconductor and microelectronic devices, components, and sub-assemblies comprising:
providing the packaging article made of a fluoropolymer material;
producing the packaging article having an interior surface with:
less than 1×1010 atoms/cm2 of each of the following metals: aluminum, calcium, copper, iron, magnesium, potassium, sodium, and zinc;
less than 1×1010 ions/cm2 for each of the following anions: fluoride, chloride, nitrite, sulfate, and phosphate; and
less than 2 nanogram/cm2 of each of the following organic compounds: compounds with seven to ten carbon atoms, compounds with eleven to twenty carbon atoms, and compounds with greater than 20 carbon atoms, by contacting the packaging article with a solution comprising an organic solvent, rinsing the packaging article with ultrapure water, contacting the packaging article with an acid solution, and rinsing the packaging article with ultrapure water, and drying the packaging article.

### Claim 15 (depends on 14)

The method of claim 14, wherein the fluoropolymer material is selected from the group consisting of perfluoroalkoxy (PFA), polytetrafluoroethylene (PTFE), fluorinated ethylene propylene (FEP), perfluoropolyether (PFPE), and polyvinylidene fluoride (PVDF).

### Claim 16 (depends on 14)

The method of claim 14, wherein the acid solution is 1% (w/w) aqueous nitric acid (HNO3).

### Claim 17 (depends on 14)

The method of claim 14, wherein the acid solution is a mixture of sulfuric and nitric acids.

### Claim 18 (depends on 14)

The method of claim 14, the acid solution further comprising hydrogen peroxide (H2O2).

### Claim 19

A method of making a packaging article for clean items, comprising:
providing a packaging article made of a fluoropolymer material;
placing the packaging article in contact with a solution comprising an organic solvent selected from the group consisting of methanol, ethanol, acetone and benzene, then rinsing the packaging article with ultrapure water;
placing the packaging article in contact with an acid solution, then rinsing the packaging article with ultrapure water; and
drying the packaging article to produce the packaging article having an interior surface with:
less than 1×1010 atoms/cm2 of each of the following metals: aluminum, calcium, copper, iron, magnesium, potassium, sodium, and zinc;
less than 1×1010 ions/cm2 for each of the following anions: fluoride, chloride, nitrite, sulfate, and phosphate; and
less than 2 nanogram/cm2 of each of the following organic compounds: compounds with seven to ten carbon atoms, compounds with eleven to twenty carbon atoms, and compounds with greater than 20 carbon atoms.
