# US 9,517,494 B2 · Method and system for cleaning photomasks

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- Number: US 9,517,494 B2
- Document ID: US9517494B2
- Status: Granted
- Kind: B2
- Application number: 13/762,499
- Filed: 2013-02-08
- Published: 2014-05-22
- Granted: 2016-12-13
- Earliest claimed: 2012-11-19
- Assignees: Gudeng Precision Industrial Co., Ltd.
- Applicants: Gudeng Precision Industrial Co, Ltd.
- Inventors: Yung-Chin Pan
- Web page: https://patentgrep.com/patent/US9517494B2

## CPC

- G03F 1/82: Auxiliary processes, e.g. cleaning or inspecting
- B08B 3/10: with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B 1/10: characterised by the type of cleaning tool
- G03F: PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR; (phototypographic composing devices B41B; photosensitive materials or processes for photographic purposes G03C; electrophotography, sensitive layers or processes therefor G03G)
- B08B: CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL

## Abstract

A method for cleaning photomasks includes the following steps: provided a cleansing device having a scrubbing unit. The scrubbing unit having a saturated scrubbing surface is use to clean photomasks with the obliquely dispensed fluids. In such a fashion, loosened contaminants are removed. As least one oblique surface is formed on the peripheries of the scrubbing surface to form a channeling region such that fluids can instantly flow away from photomasks after cleaning to prevent re-contamination. The instant disclosure also provides a system for cleaning photomasks.

## Claims

### Claim 1

A photomask cleaning method for cleaning a photomask including a target surface, comprising steps of:
providing a cleansing device including a scrubbing unit;
positioning a retained photomask for arranging a target surface thereof towards the scrubbing unit;
forming a pre-pressed state between the scrubbing unit and the photomask with a predetermined pressure;
cleaning the target surface of the photomask with a moist and partially exposed scrubbing surface of the scrubbing unit;
dispensing fluids obliquely towards the target surface to remove loosen contaminants via the cleansing device so as to establish a non-orthogonal angle between the target surface and the fluid dispensing towards the photomask, the dispensing fluids dispensed from two oblique dispensers arranged on two sides of the scrubbing unit;
forming at least one oblique surface under the obliquely dispensed fluids and facing the target surface, the at least one oblique surface arranged between the scrubbing unit and the two dispensers and surrounding the scrubbing unit and proximate the scrubbing surface, the at least one oblique surface having an inner portion adjacent to the scrubbing unit and an outer portion away from the scrubbing unit, the inner portion approximating the target surface and the outer portion being away from the target surface, such that the at least one oblique surface arranged inclined to the target surface and towards the obliquely dispensed fluids forms a channeling region for channeling away fluids after cleaning from the photomask;
draining the collected fluids after cleaning; and
positioning the photomask to a drying area for blow drying.

### Claim 2 (depends on 1)

The method as recited in claim 1, wherein the obliquely dispensed fluids are dispensed towards two sides of the scrubbing surface.

### Claim 3 (depends on 1)

The method as recited in claim 1, further comprising the step of: adjusting the positioning of scrubbing device to form the pre-pressed state.

### Claim 4 (depends on 1)

The method as recited in claim 1, further comprising the step of: adjusting the positioning of the photomask to form the pre-pressed state.

### Claim 5 (depends on 1)

The method as recited in claim 1, further comprising the step of: providing a cover securely retaining two sides of the scrubbing unit.

### Claim 6 (depends on 5)

The method as recited in claim 5, wherein the two sides of the scrubbing unit are retained by a pair of correspondingly conforming concave and convex surfaces.

### Claim 7 (depends on 5)

The method as recited in claim 5, wherein the scrubbing unit disposed on a direct dispenser by the cover, the scrubbing unit includes a scrubbing sheet and a resilient member which is disposed between the scrubbing sheet and the direct dispenser.