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US 9,513,257 B2Granted
Discharge ionization current detector and method for aging treatment of the same
AssigneeShimadzu Corporation
InventorsShigeyoshi Horiike, Kei Shinada, Takahiro Nishimoto
Life of this patent
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Abstract
An aging treatment is performed by using cleaning gas obtained by mixing inert gas, as an impurity, to plasma gas. Plasma generation by dielectric-barrier discharge is performed until a predetermined period of time has elapsed by applying high AC voltage to an electrode while supplying the cleaning gas to a dielectric tube from a gas inlet.
Claims11
A method for aging treatment of a discharge ionization current detector including:
- a plasma generation section that is configured of a dielectric tube and a plurality of electrodes attached on an outer circumference of the dielectric tube, the plasma generation section continuously generating dielectric-barrier discharge inside the dielectric tube by applying high AC voltage to the electrodes while causing plasma gas to flow through the dielectric tube;
- a sample ionization section that is connected to a downstream end of the dielectric tube and that ionizes components in sample gas by light at a time of discharge generation at the plasma generation section;
- and an ion detection section that detects a sample component ionized by the sample ionization section, the method comprising:
- supplying, as cleaning gas, mixed gas obtained by mixing inert gas with greater atomic weight than the plasma gas in the plasma gas, to the dielectric tube;
- and
- continuously generating the dielectric-barrier discharge over a predetermined period of time by the plasma generation section while supplying the cleaning gas.
3 more elements
A discharge ionization current detector comprising:
- a plasma generation section that is configured of a dielectric tube and a plurality of electrodes attached on an outer circumference of the dielectric tube, the plasma generation section continuously generating dielectric-barrier discharge inside the dielectric tube by applying high AC voltage to the electrodes while causing plasma gas to flow through the dielectric tube;
- a sample ionization section that is connected to a downstream end of the dielectric tube and that ionizes components in sample gas by light at a time of discharge generation at the plasma generation section;
- an ion detection section that detects a sample component ionized by the sample ionization section;
- a plasma gas supply section for supplying the plasma gas;
- a cleaning gas supply section for supplying, as cleaning gas, mixed gas obtained by mixing inert gas with greater atomic weight than the plasma gas in the plasma gas;
- and
- a supply gas switching mechanism that connects the plasma gas supply section or the cleaning gas supply section to the dielectric tube and switches between gases.
4 more elements
Dependencies are inferred from the claim text.