Magnetic annealing apparatus

A magnetic annealing apparatus comprising:

• a magnetic field generating unit configured to conduct a magnetic annealing processing on one or more workpieces to be processed;
• a workpiece boat disposed at a rear side of a cap through a heat insulation portion and configured to hold the workpieces;
• a workpiece conveyance mechanism configured to convey the workpieces between a carrier that accommodates the workpieces and the workpiece boat;
• and
• a transfer mechanism connected to the workpiece boat through a connection unit and configured to transfer the workpiece boat between a first position at a time of conveying the workpieces to the workpiece conveyance mechanism and a second position at a time of performing the magnetic annealing processing on the workpieces,
• wherein at least one of the cap and the heat insulation portion is provided with an angle adjusting mechanism configured to adjust an angle between a main surface of the cap and a longitudinal axis direction of the heat insulation portion in order to adjust an inclined angle of the workpiece boat, one end of the heat insulation portion being connected to the main surface of the cap and the other end of the heat insulation portion being connected to the workpiece boat.

A magnetic annealing apparatus comprising:

• a carrier conveyance region where a carrier that accommodates one or more workpieces to be processed is conveyed;
• a workpiece conveyance region where the workpieces are conveyed;
• and
• an opening/closing door interposed between the carrier conveyance region and the workpiece conveyance region,
• wherein the carrier conveyance region includes:
• a first mounting table on which a carrier carried into the magnetic annealing apparatus is disposed;
• a plurality of second mounting tables on which the carrier is mounted so as to convey the workpieces from the carrier conveyance region to the workpiece conveyance region through the opening/closing door in a hermetically sealed manner;
• a storage unit configured to store a plurality of carriers;
• and
• a carrier conveyance mechanism configured to perform carrying-out/carrying-in of the workpieces among the first mounting table, the second mounting tables, and the storage units,
• wherein the workpiece conveyance region includes:
• an aligner device configured to align the workpieces;
• a workpiece boat configured to hold the workpieces;
• a workpiece conveyance mechanism configured to convey the workpieces among the carrier disposed on the second mounting table, the aligner device, and the workpiece boat;
• a heating unit configured to heat the workpieces;
• a magnetic field generating unit including a horizontal superconducting magnet configured to apply a magnetic field to the workpieces;
• and
• a transfer mechanism connected to the workpiece boat through a connection unit and configured to transfer the workpiece boat between a first position at a time of conveying the workpieces to the workpiece conveyance mechanism and a second position at a time of performing the magnetic annealing processing on the workpieces, and
• wherein at least one of the cap and the heat insulation portion is provided with an angle adjusting mechanism configured to adjust an angle between a main surface of the cap and a longitudinal axis direction of the heat insulation portion in order to adjust an inclined angle of the workpiece boat, one end of the heat insulation portion being connected to the main surface of the cap and the other end of the heat insulation portion being connected to workpiece boat.