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US 9,506,947 B2Granted
System and method for non-contact microscopy for three-dimensional pre-characterization of a sample for fast and non-destructive on sample navigation during nanoprobing
AssigneeDCG Systems, Inc.
InventorsVladimir A. Ukraintsev, Richard Stallcup, Sergiy Pryadkin, Mike Berkmyre, John Sanders
Life of this patent
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Abstract
A system for performing sample probing. The system including an topography microscope configured to receive three-dimensional coordinates for a sample based on at least three fiducial marks; receive the sample mounted in a holder; and navigate to at least a location on the sample based on the at least three fiducial marks and the three-dimensional coordinates.
Claims18
A system for mapping a sample, comprising:
- an optical microscope configured to:
- generate three-dimensional coordinates for said sample based on at least three fiducial marks;
- receive said sample mounted in a holder;
- and
- transmit said three-dimensional coordinates to a tool configured to navigate to at least a location on said sample based on said at least three fiducial marks and said three-dimensional coordinates.
2 more elements
A method of mapping a sample, comprising:
- generating three-dimensional coordinates for said sample based on at least three fiducial marks;
- receiving said sample mounted in a holder;
- and
- transmitting said three-dimensional coordinates to a tool configured to navigate to at least a location on said sample based on said at least three fiducial marks and said three-dimensional coordinates.
1 more element
A system for mapping a sample, comprising:
- a means for generating three-dimensional coordinates for said sample based on at least three fiducial marks;
- a means for receiving said sample mounted in a holder;
- and
- a means for transmitting said three-dimensional coordinates to a tool configured to navigate to at least a location on said sample based on said at least three fiducial marks and said three-dimensional coordinates.
1 more element
Dependencies are inferred from the claim text.