X-ray inspection device, inspection method, and X-ray detector
AssigneeHitachi High-Technologies Corporation
InventorsYuta Urano, Toshifumi Honda, Yasuko Aoki
Life of this patent
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Abstract
The X-ray inspection device includes: an X-ray source with a focal spot size greater than the diameter of a defect for irradiating a sample with X-rays; an X-ray TDI detector arranged near the sample and having long pixels in a direction parallel to the scanning direction of the sample for detecting the X-rays emitted by the X-ray source and passing through the sample as an X-ray transmission image; and a defect-detecting unit for detecting defects based on the X-ray transmission image detected by the X-ray TDI detector.
Claims12
An X-ray inspection device, comprising:
- an X-ray source irradiating X-rays on a sample;
- an X-ray Time Delay Integration (TDI) detector, for detecting X-rays irradiated by said X-ray source and transmitted through said sample as an X-ray transmission image, having a scintillator, an asymmetric fiber optic plate and a square-pixel TDI camera that, in combination, produce flat rectangular detector pixels that are longer in a direction parallel to a scanning direction of said sample, the X-ray TDI detector being arranged adjacent to said sample;
- and
- a defect detection part detecting defects on the basis of X-ray transmission images detected by means of said X-ray TDI detector.
An X-ray inspection method, comprising:
- irradiating X-rays on a sample using an X-ray source;
- detecting X-rays irradiated and transmitted through said sample as an X-ray transmission image using an X-ray TDI detector having a scintillator, an asymmetric fiber optic plate and a square-pixel TDI camera that, in combination, produce flat rectangular detector pixels that are longer in a direction parallel to the scanning direction of said sample, the TDI detector being arranged adjacent to said sample;
- and
- detecting defects on the basis of X-ray transmission images detected.
Dependencies are inferred from the claim text.