US 9,499,411 B2 · Device for producing and method for producing dodecacarbonyl triruthenium

Abstract

The present invention provides a method for producing DCR that can efficiently sublimate a large amount of crude DCR to stably supply DCR. Also, the present invention relates to a sublimation apparatus applicable to the production method. The method for producing an organoruthenium compound for a chemical vapor deposition raw material containing dodecacarbonyl triruthenium (DCR) includes the step for purifying DCR by separating impurity elements from crude DCR by a sublimation method, and in the purification step, crude DCR is heated and sublimated in an atmosphere having a carbon monoxide concentration of 30 to 100% and then cooled to precipitate DCR. According to the present invention, a large amount of crude DCR can be efficiently sublimated, and thus a large amount of DCR can be supplied stably.

Claims8

Dependent claims

A method for producing an organoruthenium compound for a chemical vapor deposition raw material containing dodecacarbonyl triruthenium (DCR) represented by a following formula, comprising the step of:

purifying DCR by separating impurity elements from crude DCR by a sublimation method, wherein the purification step further comprising:
supplying CO gas from the bottom of a sintered filter with filtering accuracy of 5 to 30 μm to crude DCR which is disposed above the sintered filter;
heating and sublimating the crude DCR in an atmosphere having a carbon monoxide concentration of 30 to 100%;
and then cooling the crude DCR to precipitate DCR.

1 more element

Dependencies are inferred from the claim text.

Device for producing and method for producing dodecacarbonyl triruthenium

Life of this patent

Device for producing and method for producing dodecacarbonyl triruthenium

Life of this patent

Abstract

Claims8