Nucleation of III-N on REO templates
AssigneeTranslucent, Inc.
InventorsErdem Arkun, Andrew Clark, Rytis Dargis, Radek Roucka, Michael Lebby
Life of this patent
Estimating the term…
Abstract
A method of fabricating a layer of single crystal III-N material on a silicon substrate includes epitaxially growing a REO template on a silicon substrate. The template includes a REO layer adjacent the substrate with a crystal lattice spacing substantially matching the crystal lattice spacing of the substrate and selected to protect the substrate from nitridation. Either a rare earth oxynitride or a rare earth nitride is formed adjacent the upper surface of the template and a layer of single crystal III-N material is epitaxially grown thereon.
Claims17
A method of fabricating a layer of single crystal III-N material on a silicon substrate comprising:
- providing a single crystal silicon substrate with a crystal lattice spacing;
- epitaxially growing a rare earth oxide REO template on the silicon substrate, the template including a rare earth oxide layer adjacent the substrate with a crystal lattice spacing substantially matching the crystal lattice spacing of the substrate, and selecting the rare earth oxide layer to protect the substrate from nitridation;
- forming one of a rare earth oxynitride or a rare earth nitride adjacent the upper surface of the template;
- and
- epitaxially growing a layer of single crystal III-N material on the one of the rare earth oxynitride or the rare earth nitride.
A method of fabricating a layer of single crystal III-N material on a silicon substrate comprising:
- providing a single crystal silicon substrate with a crystal lattice spacing;
- epitaxially growing a rare earth oxide REO template on the silicon substrate, the template including a first rare earth oxide layer adjacent the substrate with a crystal lattice spacing substantially matching the crystal lattice spacing of the substrate, and the first rare earth oxide layer being substantially impervious to nitridation;
- forming a second layer including one of a rare earth oxynitride or a rare earth nitride adjacent the upper surface of the template;
- and
- epitaxially growing a layer of single crystal III-N material on the second layer.
A single crystal III-N material on a silicon substrate comprising:
- a single crystal silicon substrate with a crystal lattice spacing;
- a rare earth oxide REO template grown on the silicon substrate, the template including a first rare earth oxide layer adjacent the substrate with a crystal lattice spacing substantially matching the crystal lattice spacing of the substrate, and at least a portion of a second rare earth oxide layer including one of a rare earth oxynitride or a rare earth nitride;
- and
- a layer of single crystal III-N material epitaxially grown on the at least a portion of the second rare earth oxide layer, the template designed to prevent nitridation of the silicon substrate and to crystal lattice match the III-N material to the substrate so as to provide an epitaxial relationship between the III-N material and the substrate.
A single crystal III-N material on a silicon substrate comprising:
- a single crystal silicon substrate with a crystal lattice spacing;
- a rare earth oxide REO template grown on the silicon substrate, the template including a first rare earth oxide layer adjacent the substrate with a crystal lattice spacing substantially matching the crystal lattice spacing of the substrate and substantially impervious to nitridation;
- the template including a second rare earth oxide layer grown on the first rare earth oxide layer and at least a portion including one of a rare earth oxynitride or a rare earth nitride;
- and
- a layer of single crystal III-N material epitaxially grown on the at least a portion of the second rare earth oxide layer, the template designed to prevent nitridation of the silicon substrate and to crystal lattice match the III-N material to the substrate so as to provide an epitaxial relationship between the III-N material and the substrate.
Dependencies are inferred from the claim text.