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US 9,494,737 B2Granted
Optical waveguide and method for manufacturing same
AssigneeHon Hai Precision Industry Co., Ltd.
InventorBing-Heng Lee
Life of this patent
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Abstract
In a method, a substrate is provided and is implanted with argon ions to form an argon ion modified layer. Two slots are defined and extend through the argon ion modified layer to form a ridge. The substrate is etched to change the ridge into a beveled ridge. An etching rate of the argon ion modified layer is higher than that of the substrate. The beveled ridge is diffused with metal to form a beveled ridge waveguide.
Claims15
A method for manufacturing an optical waveguide, the method comprising:
- providing a substrate;
- implanting argon ions into the substrate via a top surface of the substrate to form an argon ion modified layer in the substrate;
- defining two slots extending through the argon ion modified layer to form a ridge between the two slots;
- depositing an etching resistance layer on the top surface and bottoms of the slots;
- etching the substrate using a first etching solution, each slot etched into a groove comprising a substantially rhombic section connected with and substantially symmetrical about the argon ion modified layer, the ridge being shaped as a beveled ridge;
- removing the etching resistance layer;
- applying a photo etching layer to fill the grooves and to cover the top surface and an upper surface of the beveled ridge;
- removing a part of the photo etching layer covering the upper surface;
- depositing a metal layer on the photo etching layer and the upper surface;
- removing the photo etching layer;
- and
- diffusing the metal layer left on the upper surface into the beveled ridge to form a beveled ridge waveguide.
9 more elements
An optical waveguide, comprising:
- a substrate comprising a top surface;
- an argon ion modified layer formed within the substrate;
- two grooves defined in the top surface and extending through the argon ion modified layer, each groove comprising a substantially rhombic section that is connected with and substantially symmetrical about the argon ion modified layer;
- and
- a beveled ridge waveguide formed between the grooves, and comprising an upper surface coplanar with the top surface, two side surfaces connected with the upper surface, two beveled surfaces connected with the side surfaces, and a bottom surface connected between the beveled surfaces.
2 more elements
Dependencies are inferred from the claim text.