Apparatus for producing trichlorosilane

An apparatus for producing trichlorosilane, comprising:

• a reaction vessel in which a supply gas containing silicon tetrachloride and hydrogen is supplied to an internal reaction passageway to produce a reaction product gas containing trichlorosilane and hydrogen chloride;
• a heating mechanism including a heater that is disposed outside the reaction vessel, encloses the reaction vessel, and heats the interior of the reaction vessel;
• a gas supply section that supplies the supply gas in the reaction vessel and is formed only at a center of the reaction vessel;
• and
• a plurality of gas discharge sections that each section separately discharges the reaction product gas from the reaction vessel to the outside and are concentrically disposed with the heater and the gas supply section,
• wherein
• the reaction passageway includes:
• a supply side passageway that is connected to the gas supply section at a central portion of the reaction vessel and flows the supply gas toward the outside while meandering in the reaction vessel, where an outlet of the supply side passageway is at outermost and a bottom of the reaction vessel;
• a return passageway that is connected to a downstream end of the supply side passageway and extends to the central portion of the reaction vessel;
• and
• a discharge side passageway that is disposed so as to be connected to a downstream end of the return passageway and to adjoin the supply side passageway of the central portion of the reaction vessel, the discharge side passageway being connected to the plurality of gas discharge sections,
• wherein the gas supply section and the plurality of gas discharge sections are connected to an inlet and the outlet of the reaction passageway, respectively, and
• wherein the reaction vessel includes a plurality of reaction tubular walls that are disposed concentrically with the heater and the gas supply section and constitute a columnar space and a plurality of tubular spaces so as to form the reaction passageway.