# US 9,487,397 B2 · Coatings for relatively movable surfaces

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- Number: US 9,487,397 B2
- Document ID: US9487397B2
- Status: Granted
- Kind: B2
- Application number: 14/844,779
- Filed: 2015-09-03
- Published: 2016-03-03
- Granted: 2016-11-08
- Earliest claimed: 2012-12-18
- Assignees: Texas Instruments Incorporated
- Applicants: Texas Instruments Incorporated
- Inventors: William Robert Morrison; Mark Christopher Fisher; Murali Hanabe; Ganapathy Subramaniam Sivakumar; Simon Joshua Jacobs
- Web page: https://patentgrep.com/patent/US9487397B2

## CPC

- B81C 1/00984: {Methods for avoiding stiction when the device is in use not provided for in groups B81C1/00968 - B81C1/00976}
- B81B 3/0005: {Anti-stiction coatings}
- B81B 7/0032: {Packages or encapsulation (processes for packaging MEMS B81C1/00261; packaging of smart-MEMS B81C1/0023)}
- B81C 1/00261: {Processes for packaging MEMS devices (MEMS packages B81B7/0032, packaging of smart-MEMS B81C1/0023)}
- B81C 1/0096: {For avoiding stiction when the device is in use, i.e. after manufacture has been completed}
- H10P 14/68: Organic materials, e.g. photoresists
- B81C 2201/112: Depositing an anti-stiction or passivation coating, e.g. on the elastic or moving parts
- Y10S 257/914: Polysilicon containing oxygen, nitrogen, or carbon, e.g. sipos
- B81C: PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS (making microcapsules or microballoons B01J13/02; processes or apparatus specially adapted for the manufacture or treatment of piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/01)
- B81B: MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES (piezoelectric, electrostrictive or magnetostrictive elements per se H10N30/00, H10N35/00)
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
- Y10S: TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS

## Abstract

A device has a microelectromechanical system (MEMS) component with at least one surface and a coating disposed on at least a portion of the surface. The coating has a compound of the formula M(CnF2n+1Or), wherein M is a polar head group and wherein n≧2r. The value of n may range from 2 to about 20, and the value of r may range from 1 to about 10. The value of n plus r may range from 3 to about 30, and a ratio of n:r may have a value of about 2:1 to about 20:1.

## Claims

### Claim 1

A method of fabricating a microelectromechanical system (MEMS) device comprising:
forming a MEMS component having a surface; and
coating at least a portion of the surface with a compound of the formula M(CnF2n+1Or), wherein M comprises a polar head group, and wherein n≧2r.

### Claim 2 (depends on 1)

The method of claim 1, wherein the polar head group comprises a central atom having a coordination number of 3, 4, or 5.

### Claim 3 (depends on 2)

The method of claim 2, wherein the polar head group comprises an oxygen atom bound to the central atom.

### Claim 4 (depends on 3)

The method of claim 3, wherein the polar head group comprises a hydroxyl functional group bound to the central atom.

### Claim 5 (depends on 1)

The method of claim 1, wherein the polar head group comprises at least one functional group selected from the group consisting of: a carboxylic acid functional group; a sulfonic acid functional group, a phosphonic acid functional group, an amide functional group, and a hydroxamide functional group.

### Claim 6 (depends on 1)

The method of claim 1, wherein n has a value ranging from 2 to about 20.

### Claim 7 (depends on 1)

The method of claim 1, wherein r has a value ranging from 1 to about 10.

### Claim 8 (depends on 1)

The method of claim 1, wherein n+r ranges from 3 to about 30.

### Claim 9 (depends on 1)

The method of claim 1, wherein a ratio of n:r has a value of about 2:1 to about 20:1.

### Claim 10 (depends on 1)

The method of claim 1, wherein the MEMS component comprises a digital micromirror device.

### Claim 11 (depends on 1)

The method of claim 1, wherein the MEMS component comprises at least one of an actuator, a motor, an RF switch, a sensor, a variable capacitor, an optical modulator, a microgear, an accelerometer, a transducer, a fluid nozzle, a gyroscope, or any combination thereof.

### Claim 12 (depends on 1)

The method of claim 1, wherein the compound is coated on the at least the portion of the surface as a self-assembling monolayer.

### Claim 13 (depends on 1)

The method of claim 1, wherein a polydispersity of the compound is less than about 2.0.

### Claim 14 (depends on 1)

The method of claim 1, wherein the compound comprises at least one material selected from the group consisting of: a perfluoropoly(alkylene) monoether carboxylic acid, a perfluoro(alkylene) monoether sulfonic acid, a perfluoro(alkylene) monoether phosphonic acid, a perfluoro(alkylene) monoether carboxamide, and a perfluoro(alkylene) monoether hydroxamide, a perfluoropoly(alkylene) polyether carboxylic acid, a perfluoro(alkylene)polyether sulfonic acid, a perfluoro(alkylene)polyether phosphonic acid, a perfluoro(alkylene)polyether carboxamide, and a perfluoro(alkylene)polyether hydroxamide.

### Claim 15 (depends on 1)

The method of claim 1, wherein the compound comprises at least one material selected from the group consisting of: perfluoro-3-oxadecanoic acid, perfluoro-2-oxaoctane-sulfonic acid, perfluoro-2-oxaoctane-phosphonic acid, N-hydroxy-perfluoro-2-oxaoctanamide, perfluoro-4-oxaheptanoic acid, perfluoro-4-oxaoctanoic acid, perfluoro-4-oxanonanoic acid, perfluoro-4-oxadecanoic acid, perfluoro-3-oxaundecanoic acid, perfluoro-3,6-dioxadodecanoic acid, perfluoro-3,6,9-trioxatridecanoic acid, and perfluoro-3,6,9,12-tetraoxatetrdecanoic acid.