Nanometer magnetic multilayer film for temperature sensor and manufacturing method therefor

A method for manufacturing a magnetic multilayer film for a temperature sensor comprising:

• depositing a bottom magnetic composite layer on a substrate, the bottom magnetic composite layer having a direct pinning structure, an indirect pinning structure, a synthetic ferromagnetic structure, or a synthetic anti-ferromagnetic structure;
• depositing a spacer layer on the bottom magnetic composite layer;
• depositing a top magnetic composite layer on the spacer layer, the top magnetic composite layer having the direct pinning structure, the indirect pinning structure, the synthetic ferromagnetic structure, or the synthetic anti-ferromagnetic structure;
• and
• performing a magnetic field vacuum annealing on the resulting structure such that a ferromagnetic layer of the bottom magnetic composite layer closest to the spacer layer has a magnetic moment anti-parallel with that of a ferromagnetic layer of the top magnetic composite layer closest to the spacer layer.

A method for manufacturing a magnetic multilayer film for a temperature sensor comprising:

• depositing a first bottom magnetic layer, a bottom non-magnetic metal layer, a second bottom magnetic layer, a middle barrier layer, a first top magnetic layer, a top non-magnetic metal layer, and a second top magnetic layer in this order on a substrate;
• performing a first vacuum annealing on the resulting structure with a first magnetic field perpendicular to the film plane, the first magnetic field being larger than coercivity of any of the first bottom magnetic layer and the second top magnetic layer;
• and
• performing a second vacuum annealing on the resulting structure with a second magnetic field opposite to the first magnetic field, the second magnetic field being larger than coercivity of one of the first bottom magnetic layer and the second top magnetic layer and smaller than coercivity of the other of the first bottom magnetic layer and the second top magnetic layer.