Method of producing optical element forming mold and optical element forming mold
AssigneeCanon Kabushiki Kaisha
InventorsHiroyuki Kubo, Shigeru Hashimoto, Keiji Hirabayashi, Koji Teranishi, Yusuke Owaki
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AssigneeCanon Kabushiki Kaisha
InventorsHiroyuki Kubo, Shigeru Hashimoto, Keiji Hirabayashi, Koji Teranishi, Yusuke Owaki
Estimating the term…
Provided is a method of producing an optical element forming mold, the method including forming a ta-C film 12 on a mold matrix 10 for an optical element forming mold by an FCVA process, in which the mold matrix 10 is kept at a floating potential, a voltage is applied to a mold matrix-holding member 2 for holding the mold matrix via insulating members (3a,3b), and a magnet 4 internally provided in the mold matrix forms a magnetic field for applying a magnetic force in a normal direction of a transfer surface of the mold matrix so as to follow a magnetic force applied by a filter coil 22, thereby homogenizing the film quality.
A method of producing an optical element forming mold, the method comprising:
A method of producing an optical element forming mold, the method comprising:
Dependencies are inferred from the claim text.