Method for manufacturing piezoelectric vibration device
AssigneeMurata Manufacturing Co., Ltd.
InventorsTakeo Sato, Yuichiro Nagamine
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Abstract
A method for manufacturing a piezoelectric vibration device wherein a substrate is prepared, and a piezoelectric resonator element is mounted on the substrate. Before or after a packaging member is joined to the substrate, the piezoelectric resonator element is exposed to an environment at a higher temperature than ambient temperature and a higher humidity than ambient humidity, and then an electrical property is measured to detect attachment of dust and/or foreign matter according to a variation of the electrical property.
Claims9
A method for manufacturing a piezoelectric vibration device, the method comprising:
- mounting a piezoelectric vibration element on a substrate;
- exposing the piezoelectric vibration element to a temperature higher than an ambient temperature and to a humidity higher than an ambient humidity;
- and
- detecting a variation of an electrical property caused by dust or contaminating foreign matter that is attached to the piezoelectric vibration element and that absorbs moisture while the piezoelectric vibration element is kept at the temperature higher than the ambient temperature and at the humidity higher than the ambient humidity.
Dependencies are inferred from the claim text.