Photoresist composition, compound, and production method thereof
AssigneeJsr Corporation
InventorsHayato Namai, Norihiko Ikeda, Takanori Kawakami
Life of this patent
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Abstract
A photoresist composition containing (A) a polymer having a structural unit (I) that includes an acid-labile group, and (I) a compound represented by the following formula (1). In the following formula (1), R1, R2, R3 and R represent a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms. X represents a single bond, an oxygen atom or —NRa—. Ra represents a hydrogen atom, a hydroxy group or a monovalent organic group having 1 to 20 carbon atoms, and optionally taken together represents a ring structure by binding with R each other. A− represents —SO3− or —CO2−. M+ represents a monovalent onium cation.
Claims17
A photoresist composition comprising:
- a polymer comprising a first structural unit that comprises an acid-labile group;
- and
- a first compound represented by formula (2):
- wherein, in the formula (2) represents a hydrogen atom, a hydroxy group or a monovalent organic group having 1 to 20 carbon atoms;
- A− represents —SO3− or —CO2−;
- M+ represents a monovalent onium cation;
- and n is an interger of 0 to 5.
A compound represented by a formula (2):
- wherein, in the formula (2) represents a hydrogen atom, a hydroxy group or a monovalent organic group having 1 to 20 carbon atoms;
- A− represents —SO3− or —CO2−;
- M+ represents a monovalent onium cation;
- and n is an interger of 0 to 5.
A method for producing a compound represented by formula (6) comprising:
- allowing a compound represented by formula (4) to react with NaHSO3;
- and
- allowing the resulting compound to react with a compound represented by formula (5):
- wherein, in the formulae (4) and (6), R1, R2, R3 and R each independently represent a hydrogen atom or a monovalent organic group having 1 to 20 carbon atoms, wherein two of R1, R2, R3 and R optionally taken together represent a ring structure by binding with each other;
- and X represents a single bond, an oxygen atom or —NRa—, wherein Ra represents a hydrogen atom, a hydroxy group or a monovalent organic group having 1 to 20 carbon atoms, and optionally taken together represents a ring structure by binding with R each other:
- in the formulae (5) and (6), M+ represents a monovalent onium cation:
- and in the formula (5), E− represents a monovalent anion.
Dependencies are inferred from the claim text.