Micromachined 3-axis accelerometer with a single proof-mass
AssigneeFairchild Semiconductor Corporation
InventorCenk Acar
Life of this patent
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Abstract
This document discusses, among other things, an inertial measurement system including a device layer including a single proof-mass 3-axis accelerometer, a cap wafer bonded to a first surface of the device layer, and a via wafer bonded to a second surface of the device layer, wherein the cap wafer and the via wafer are configured to encapsulate the single proof-mass 3-axis accelerometer. The single proof-mass 3-axis accelerometer can be suspended about a single, central anchor, and can include separate x, y, and z-axis flexure bearings, wherein the x and y-axis flexure bearings are symmetrical about the single, central anchor and the z-axis flexure is not symmetrical about the single, central anchor.
Claims20
An inertial measurement system, comprising:
- a device layer including a single proof-mass 3-axis accelerometer formed in an x-y plane, the single proof-mass 3-axis accelerometer suspended about a single, central anchor, the single proof-mass 3-axis accelerometer including separate x, y, and z-axis flexure bearings;
- wherein the x and y-axis flexure bearings are symmetrical about the single, central anchor;
- wherein the z-axis flexure bearing defines a pivot line offset from the single, central anchor;
- a cap wafer bonded to a first surface of the device layer;
- and
- a via wafer bonded to a second surface of the device layer, wherein the cap wafer and the via wafer are configured to encapsulate the single proof-mass 3-axis accelerometer.
A micromachined, monolithic inertial sensor apparatus, comprising:
- a single proof-mass 3-axis accelerometer formed in an x-y plane of a device layer, suspended about a single, central anchor, the single proof-mass 3-axis accelerometer including separate x, y, and z-axis flexure bearings;
- and
- wherein the x and y-axis flexure bearings are symmetrical about the single, central anchor;
- and
- wherein the z-axis flexure bearing defines a pivot line offset from the single, central anchor.
Dependencies are inferred from the claim text.