Resonation element, resonator, oscillator, electronic device and moving object
AssigneeSeiko Epson Corporation
InventorAkinori Yamada
Life of this patent
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Abstract
A resonation element includes a basal portion, resonating arms extending out in a Y-axis direction from the basal portion, and a vibration substrate, formed of single crystal silicon, in which a Z-axis direction is set to a thickness direction, and is configured such that the resonating arms are flexurally vibrated in an XY in-plane direction. In addition, when resonation frequencies of the resonating arms are set to F [kHz], widths of the resonating arms are set to W [μm], and lengths of the resonating arms are set to L [μm], at least one expression of the following Expression (1) and the following Expression (2) is satisfied. W<10A×Log(F)+B (1) where, A is −5.006×10−1, and B is 2.451, and L<10C×log(F)+D (2) where, C is −7.507×10−1, and D is 4.268.
Claims17
A resonation element comprising:
- a basal portion;
- at least one resonating arm extending out in a first direction from the basal portion;
- and
- a single crystal silicon substrate in which a length along a second direction perpendicular to the first direction is set to a thickness,
- wherein the resonating arm is flexurally vibrated along a third direction perpendicular to the first direction and the second direction,
- wherein the resonating arm is flexurally vibrated by an electrostatic force,
- wherein the resonating arm includes a region, receiving the electrostatic force, in a region from a tip on an opposite side to the basal portion side toward the basal portion side along the first direction to L/2, when seen in plan view, and
- wherein when a resonation frequency of the resonating arm is set to F [kHz], a width along the third direction of the resonating arm is set to W [μm], and a length along the first direction of the resonating arm is set to L [μm],
- at least one expression of the following Expression (1) and the following Expression (2) is satisfied,
- W<10A×Log(F)+B (1)
- where, A is −5.006×10−1, and B is 2.451, and
- L<10C×log(F)+D (2)
- where, C is −7.507×10−1, and D is 4.268.
Dependencies are inferred from the claim text.