Device for controlling temperature of an optical element
AssigneeCarl Zeiss SMT GmbH
InventorMarkus Hauf
Life of this patent
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Abstract
A device serves for controlling temperature of an optical element provided in vacuum atmosphere. The device has a cooling apparatus having a radiational cooling part, arranged apart from the optical element, for cooling the optical element by radiation heat transfer. A controller serves for controlling temperature of the radiational cooling part. Further, the device comprises a heating part for heating the optical element. The heating part is connected to the controller for controlling the temperature of the heating part. The resulting device for controlling temperature in particular can be used with an optical element in a EUV microlithography tool leading to a stable performance of its optics.
Claims20
A system, comprising:
- an optical element configured to be a component of an EUV microlithography tool;
- a cooling element disposed away from the optical element, the cooling element being configured to cool the optical element via radiation heat transfer;
- a shielding configured to prevent the cooling element from absorbing heat from a component of the system other than the optical element;
- and
- a controller configured to control a temperature of the cooling element,
- wherein the system is configured to control a temperature of the optical element when the optical element is in a vacuum atmosphere.
A system, comprising:
- an optical element configured to be a component of an EUV microlithography tool;
- a heating device configured to heat the optical element;
- a shielding configured to prevent components of the system neighboring the optical element from absorbing heat from the heating device;
- and
- a controller configured to control a temperature of the heating device and/or to control a temperature of the shielding,
- wherein the system is configured to control a temperature of the optical element when the optical element is in a vacuum atmosphere.
Dependencies are inferred from the claim text.