Electron sensitive glass and optical circuits, microstructures formed therein
OwnerLu Han, Andy Shih +3inventors
InventorsLu Han, Andy Shih, Yi-Chi Shih, Ishiang Shih, Cindy X. Qiu
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Abstract
An electron definable glass or an electron sensitive glass for microstructures is provided with microstructures and optical waveguides formed therein. The microstructures are formed by electron beam irradiation in selected areas in the electron definable glass followed by a high temperature heat treatment and chemical etching, whereas the optical waveguides are formed by irradiating the electron definable glass by an electron beam followed by a low temperature heat treatment.
Claims13
An optical circuit having a plurality of optical waveguides in an electron definable glass substrate, wherein said electron definable glass substrate is sensitive to irradiation by electrons in an electron beam to effect an increase of optical refractive index in irradiated substrate regions and to facilitate formation of said optical waveguides, said electron definable glass substrate comprises at least the following main constituent components:
- SiO2, Li2O, K2O, Al2O3, Na2O, ZnO, and Ag2O, each of said optical waveguide has a core diameter and a depth of electron diffusion, wherein said core diameter and depth of electron diffusion are controlled by selecting energy of said electrons.
A microstructure having a plurality of micro cavities in an electron definable glass substrate, wherein said electron definable glass substrate is sensitive to irradiation by electrons in an electron beam to effect a change of optical refractive index in irradiated substrate regions and to facilitate creation of said micro cavities, said electron definable glass substrate comprises at least the following main constituent components:
- SiO2, Li2O, K2O, Al2O3, Na2O, ZnO, Ag2O, wherein each of said micro cavities has a cavity death, the value of said cavity depth is controlled by energy of electrons in said electron beam used to create said micro cavity.
Dependencies are inferred from the claim text.