# US 9,439,294 B2 · Reaction products of heterocyclic nitrogen compounds polyepoxides and polyhalogens

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- Number: US 9,439,294 B2
- Document ID: US9439294B2
- Status: Granted
- Kind: B2
- Application number: 14/254,792
- Filed: 2014-04-16
- Published: 2016-05-19
- Granted: 2016-09-06
- Earliest claimed: 2014-04-16
- Assignees: Rohm and Haas Electronic Materials LLC
- Applicants: Rohm and Haas Electronic Materials LLC
- Inventors: Julia Kozhukh; Zuhra I. Niazimbetova
- Web page: https://patentgrep.com/patent/US9439294B2

## CPC

- C25D 3/32: characterised by the organic bath constituents used
- C08G 59/02: Polycondensates containing more than one epoxy group per molecule
- C08G 59/5046: {heterocyclic}
- C25D 3/30: of tin
- C25D 3/38: of copper
- C25D 3/58: containing more than 50% by weight of copper
- C25D 3/60: containing more than 50% by weight of tin
- C25D 7/00: Electroplating characterised by the article coated
- C25D 7/123: {Semiconductors first coated with a seed layer or a conductive layer}
- H05K 3/18: using precipitation techniques to apply the conductive material
- H05K 3/188: {by direct electroplating}
- H05K 3/42: Plated through-holes {or plated via connections}
- H05K 3/421: {Blind plated via connections (H05K3/422, H05K3/423 and H05K3/425 take precedence)}
- H05K 3/465: {by applying an insulating layer having channels for the next circuit layer}
- C25D: PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C08G: MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- H05K: PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS

## Abstract

Reaction products of heterocyclic nitrogen compounds, polyepoxide compounds and polyhalogen compounds may be used as levelers in metal electroplating baths, such as copper electroplating baths, to provide good throwing power. Such reaction products may plate metal with good surface properties and good physical reliability.

## Claims

### Claim 1

A method comprising:
a) providing a substrate;
b) providing a composition comprising one or more sources of metal ions, an electrolyte and one or more compounds comprising a reaction product of one or more heterocyclic nitrogen compounds comprising at least two reactive nitrogen atoms with the proviso that at least one of the reactive nitrogen atoms is in the ring of the one or more heterocyclic nitrogen compounds; one or more polyepoxide compounds and one or more polyhalogen compounds;
c) contacting the substrate with the composition;
d) applying a current to the substrate and the composition; and
e) depositing a metal on the substrate.

### Claim 2 (depends on 1)

The method of claim 1, wherein the one or more sources or metal ions are chosen from copper salts and tin salts.

### Claim 3 (depends on 1)

The method of claim 1 wherein the substrate comprises a plurality of one or more of through-holes, trenches and vias.