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US 9,438,979 B2Granted
MEMS sensor structure for sensing pressure waves and a change in ambient pressure
AssigneeInfineon Technologies AG
InventorAlfons Dehe
Life of this patent
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Abstract
A sensor structure, including: a first diaphragm structure, an electrode element, and a second diaphragm structure arranged on an opposite side of the electrode element from the first diaphragm structure is disclosed. The sensor structure may also include a chamber formed by the first and second diaphragm structures, where the pressure in the chamber is lower than the pressure outside of the chamber. A method for forming the sensor structure is likewise disclosed.
Claims14
A sensor structure for sensing pressure waves and a change in ambient pressure, comprising:
- a first diaphragm structure;
- an electrode element;
- a second diaphragm structure arranged on an opposite side of the electrode element from the first diaphragm structure;
- and
- a circuit configured to process at least one signal generated by a deflection of the first diaphragm structure and a deflection of the second diaphragm structure;
- wherein the first diaphragm structure and the second diaphragm structure form a chamber where the pressure in the chamber is lower than the pressure outside of the chamber.
3 more elements
Dependencies are inferred from the claim text.