# US 9,437,798 B2 · Combo bio and temperature disposable sensor on flexible foil > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,437,798 B2 - Document ID: US9437798B2 - Status: Granted - Kind: B2 - Application number: 13/929,525 - Filed: 2013-06-27 - Published: 2015-01-01 - Granted: 2016-09-06 - Earliest claimed: 2013-06-27 - Assignees: Stmicroelectronics Pte Ltd - Applicants: STMicroelectronics Pte Ltd. - Inventors: Olivier Le Neel; Suman Cherian; Calvin Leung; Ravi Shankar; Tien Choy Loh; Shian Yeu Kam - Web page: https://patentgrep.com/patent/US9437798B2 ## CPC - H10N 10/01: Manufacture or treatment - G01N 27/3274: {Corrective measures, e.g. error detection, compensation for temperature or hematocrit, calibration (coding of calibration information G01N33/48771)} - Y10T 29/49117: Conductor or circuit manufacturing - H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR - G01N: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES (measuring or testing apparatus or processes other than immunoassay, involving enzymes or microorganisms C12M, C12Q) - Y10T: TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION ## Abstract A bio-fluid sensor is formed by depositing polyimide on a glass substrate. Gold and platinum are deposited on the polyimide and patterned to form fluid sensing electrodes, signal traces, and a temperature sensor. The fluid sensor is then fixed to a flexible tape and peeled off of the glass substrate. ## Claims ### Claim 1 A method for forming a fluid sensor test strip, the method comprising: depositing a first dielectric material; etching a plurality of apertures in the first dielectric material; depositing a first metal layer on the first dielectric material and in the apertures to form a first and a second electrode and contact pads in the apertures; depositing a second metal layer in contact with the first metal layer, the second metal layer being of a material that has a resistance generally proportional to temperature; etching the second metal layer to define a temperature sensing resistor of the second metal layer; depositing a second dielectric material in the apertures adjacent the first and second metal layers; and depositing an enzyme on the first and second electrodes and extending from the first electrode to the second electrode, the enzyme configured to pass a sensor current between the first and the second electrodes indicative of a concentration of a test chemical in a test fluid when the test fluid is placed on the enzyme. ### Claim 2 (depends on 1) The method of claim 1 wherein the first metal layer is gold. ### Claim 3 (depends on 1) The method of claim 1 wherein the second metal layer is platinum. ### Claim 4 (depends on 1) The method of claim 1 wherein depositing the first metal layer includes forming at least one heat conducting electrode in at least one of the apertures, the temperature sensing resistor being thermally coupled to the heat conducting electrode. ### Claim 5 (depends on 1) The method of claim 1 wherein the first and second electrodes are respectively connected to first and second contact pads. ### Claim 6 (depends on 5) The method of claim 5 wherein the temperature sensing resistor is connected to third and fourth contact pads. ### Claim 7 (depends on 6) The method of claim 6 wherein a second current flowing between the third and fourth contact pads is indicative of a temperature of the test fluid. ### Claim 8 (depends on 1) The method of claim 1 wherein the first dielectric material is polyimide. ### Claim 9 (depends on 1) The method of claim 1 wherein top surface of the electrodes, top surfaces of the contact pads, and a top surface of the first dielectric material are planar with each other. ### Claim 10 (depends on 1) The method of claim 1 wherein the second dielectric material is an adhesive tape. ### Claim 11 A method for forming a fluid sensor test strip, the method comprising: depositing a first dielectric material on a surface of a substrate; opening a plurality of apertures in the first dielectric material; forming a first and second electrodes and a plurality contact pads in the apertures by depositing a first metal layer on the first dielectric material and on the surface of the substrate in the apertures; depositing a second metal layer on the first dielectric material; etching the second metal layer to form a temperature sensing resistor connected between respective contact pads of the plurality of contact pads; depositing a second dielectric material on the first and second metal layers; removing the substrate from the first dielectric material, the plurality of contact pads, and the plurality of electrodes; and depositing an enzyme on the first and second electrodes, the enzyme configured to pass a sensor current between the first and the second electrodes indicative of a concentration of a test chemical in a test fluid when the test fluid is placed on the enzyme. ### Claim 12 (depends on 11) The method of claim 11 comprising attaching an adhesive substrate to the second dielectric material, a surface of the adhesive substrate being a backside of the fluid sensor test strip. ### Claim 13 (depends on 11) The method of claim 11 wherein a surface of the second dielectric material is a backside of the fluid sensor test strip. ### Claim 14 (depends on 11) The method of claim 11 wherein the first metal layer is gold. ### Claim 15 (depends on 11) The method of claim 11 wherein the second metal layer is platinum. ### Claim 16 (depends on 11) The method of claim 11 wherein surfaces of the first and second electrodes, the plurality of contact pads, and the first dielectric material are planar with each other. ### Claim 17 A fluid sensor test strip comprising: a substrate; a first dielectric layer on the substrate; a second dielectric layer on the first dielectric layer, the second dielectric layer having a planar top surface; a temperature sensing resistor between the first and second dielectric layers; a plurality of apertures formed in the second dielectric layer; first and second electrodes and a plurality of contact pads each in a respective one of the plurality of apertures and having respective top surfaces planar with the top surface of the second dielectric layer; and an enzyme on the first and second electrodes, the enzyme configured to pass a sensor current between the first and second electrodes indicative of a concentration of a test chemical in a test fluid when the test fluid is placed on the enzyme. ### Claim 18 (depends on 17) The fluid sensor test strip of claim 17 comprising a plurality of metal lines between the first and the second dielectric layers, each metal line electrically connected to a respective one of the first and second electrodes and the temperature sensing resistor. ### Claim 19 (depends on 18) The fluid sensor test strip of claim 18 wherein the first and second electrodes and the plurality of metal lines are of a first metal. ### Claim 20 (depends on 19) The fluid sensor test strip of claim 19 wherein the temperature sensing resistor is of a second metal.