# US 9,437,774 B2 · Deep ultraviolet light emitting diode > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,437,774 B2 - Document ID: US9437774B2 - Status: Granted - Kind: B2 - Application number: 14/935,988 - Filed: 2015-11-09 - Published: 2016-03-03 - Granted: 2016-09-06 - Earliest claimed: 2010-06-18 - Assignees: Sensor Electronic Technology, Inc. - Applicants: Sensor Electronic Technology, Inc. - Inventors: Remigijus Gaska; Maxim S. Shatalov; Michael Shur; Alexander Dobrinsky - Web page: https://patentgrep.com/patent/US9437774B2 ## CPC - H10H 20/812: within the light-emitting regions, e.g. having quantum confinement structures - G06F 30/39: Circuit design at the physical level (physical level design for reconfigurable circuits G06F30/347) - H10H 20/0137: {the light-emitting regions comprising nitride materials} - H10H 20/811: having quantum effect structures or superlattices, e.g. tunnel junctions - H10H 20/814: having reflecting means, e.g. semiconductor Bragg reflectors - H10H 20/8162: {Current-blocking structures} - H10H 20/824: comprising only Group III-V materials, e.g. GaP - H10H 20/825: containing nitrogen, e.g. GaN - H10H 20/831: characterised by their shape - H10H 20/841: Reflective coatings, e.g. dielectric Bragg reflectors - H10H 20/0363: {of optical field-shaping means} - H10H 20/82: Roughened surfaces, e.g. at the interface between epitaxial layers - H10H 20/8314: {extending at least partially onto an outer side surface of the bodies} - H10H 20/835: {Reflective materials} - H10H: INORGANIC LIGHT-EMITTING SEMICONDUCTOR DEVICES HAVING POTENTIAL BARRIERS - G06F: ELECTRIC DIGITAL DATA PROCESSING (computer systems based on specific computational models G06N) ## Abstract A method of fabricating a light emitting diode, which includes an n-type contact layer and a light generating structure adjacent to the n-type contact layer, is provided. The light generating structure includes a set of quantum wells. The contact layer and light generating structure can be configured so that a difference between an energy of the n-type contact layer and an electron ground state energy of a quantum well is greater than an energy of a polar optical phonon in a material of the light generating structure. Additionally, the light generating structure can be configured so that its width is comparable to a mean free path for emission of a polar optical phonon by an electron injected into the light generating structure. ## Claims ### Claim 1 A light emitting heterostructure comprising: an n-type contact layer formed of a group III nitride material; and a light generating structure adjacent to the n-type contact layer, the light generating structure formed within a group III nitride material having an aluminum molar fraction greater than fifty percent and forming a conduction band energy tub with respect to the n-type contact layer and including a plurality of quantum wells, wherein a difference between a conduction band edge energy of the n-type contact layer and an electron ground state energy of a quantum well in the plurality of quantum wells is greater than an energy of a polar optical phonon in a material of the light generating structure, and wherein a width of the light generating structure is comparable to a mean free path for emission of a polar optical phonon by an electron injected into the material forming the conduction band energy tub. ### Claim 2 (depends on 1) The heterostructure of claim 1, wherein the width of the light generating structure exceeds the mean free path for emission of a polar optical phonon by an electron injected into the material forming the conduction band energy tub by less than approximately ten percent, and wherein the difference exceeds the energy of the polar optical phonon by approximately thermal energy. ### Claim 3 (depends on 1) The heterostructure of claim 1, further comprising a blocking layer located on an opposite side of the light generating structure as the n-type contact layer, wherein a difference between a conduction band edge energy of the blocking layer and the electron ground state energy of a quantum well in the plurality of quantum wells is greater than the energy of a polar optical phonon in the material of the light generating structure. ### Claim 4 (depends on 1) The heterostructure of claim 1, wherein the light generating structure further includes a set of barriers alternating with the plurality of quantum wells, the set of barriers including a first barrier immediately adjacent to a first quantum well in the plurality of quantum wells and the n-type contact layer, wherein a thickness of the first barrier is sufficient to accelerate an injected electron in an electric field to reach the energy of the polar optical phonon with respect to the electron ground state energy in the first quantum well, and wherein a thickness of a remainder of the light generating structure exceeds the mean free path for emission of the polar optical phonon. ### Claim 5 (depends on 1) The heterostructure of claim 1, further comprising: an at least partially transparent substrate, wherein the n-type contact is located between the substrate and the light generating structure, and wherein the at least partially transparent substrate and the n-type contact layer are at least partially transparent to the light generated by the light generating structure; and a Bragg reflector structure formed on an opposite side of the light generating structure as the n-type contact, wherein the Bragg reflector structure is configured to reflect light generated by the light generating structure towards the substrate. ### Claim 6 (depends on 5) The heterostructure of claim 5, further comprising an electron blocking layer formed between the light generating structure and the Bragg reflector structure. ### Claim 7 (depends on 5) The heterostructure of claim 5, wherein the n-type contact comprises a short period superlattice. ### Claim 8 (depends on 1) The heterostructure of claim 1, further comprising a composite contact located on an opposite side of the light generating structure as the n-type contact layer, the composite contact comprising: an adhesion layer, wherein the adhesion layer is at least partially transparent to light generated by the light generating structure; and a reflecting metal layer configured to reflect at least a portion of the light generated by the light generating structure. ### Claim 9 (depends on 8) The heterostructure of claim 8, wherein the adhesion layer comprises a thin layer of one of: nickel, palladium, molybdenum, or cobalt, and wherein the reflecting metal layer comprises one of: aluminum, enhanced aluminum, rhodium, or enhanced rhodium. ### Claim 10 (depends on 8) The heterostructure of claim 8, wherein the adhesion layer comprises a non-uniform layer. ### Claim 11 (depends on 10) The heterostructure of claim 10, wherein the non-uniform adhesion layer is configured to form a photonic crystal. ### Claim 12 (depends on 8) The heterostructure of claim 8, further comprising a distributed semiconductor heterostructure Bragg reflector (DBR) structure, wherein the DBR structure is located on an opposite side of the light generating structure as the composite contact. ### Claim 13 (depends on 1) The heterostructure of claim 1, further comprising a composite contact located on an opposite side of the light generating structure as the n-type contact layer, wherein at least one layer of the composite contact is formed of graphene. ### Claim 14 (depends on 1) The heterostructure of claim 1, further comprising a metallic superlattice contact located on an opposite side of the light generating structure as the n-type contact layer, wherein the metallic superlattice includes a plurality of intertwined layers of a first metal and a second metal distinct from the first metal, and wherein the metallic superlattice is at least partially transparent to light generated by the light generating structure. ### Claim 15 A light emitting heterostructure comprising: an n-type contact layer; and a light generating structure adjacent to the n-type contact layer, the light generating structure formed within a material forming a conduction band energy tub with respect to the n-type contact layer and including a plurality of quantum wells, wherein a width of the light generating structure is comparable to a mean free path for emission of a polar optical phonon by an electron injected into the material forming the conduction band energy tub; and a blocking layer located on an opposite side of the light generating structure as the n-type contact layer, wherein a difference between a conduction band edge energy of the blocking layer and an electron ground state energy of a quantum well in the plurality of quantum wells is greater than an energy of a polar optical phonon in a material of the material forming the conduction band energy tub. ### Claim 16 (depends on 15) The heterostructure of claim 15, wherein the width of the light generating structure exceeds the mean free path for emission of a polar optical phonon by an electron injected into the material forming the conduction band energy tub by less than approximately ten percent. ### Claim 17 (depends on 15) The heterostructure of claim 15, wherein the n-type contact layer is formed of a group III nitride material, and wherein the material forming the conduction band energy tub is a group III nitride material having an aluminum molar fraction greater than fifty percent. ### Claim 18 (depends on 15) The heterostructure of claim 15, wherein the light generating structure further includes a set of barriers alternating with the plurality of quantum wells, the set of barriers including a first barrier immediately adjacent to a first quantum well in the plurality of quantum wells and the n-type contact layer, wherein a thickness of the first barrier is sufficient to accelerate an injected electron in an electric field to reach the energy of the polar optical phonon with respect to the electron ground state energy in the first quantum well, and wherein a thickness of a remainder of the light generating structure exceeds the mean free path for emission of the polar optical phonon. ### Claim 19 A light emitting device comprising: an n-type contact layer; a light generating structure adjacent to the n-type contact layer, wherein the light generating structure is formed within a material forming a conduction band energy tub with respect to the n-type contact layer, the light generating structure including: a set of quantum wells, wherein a difference between a conduction band edge energy of the n-type contact layer and an electron ground state energy of a quantum well in the set of quantum wells is greater than an energy of a polar optical phonon in the material forming the conduction band energy tub; and a set of barriers alternating with set of quantum wells, the set of barriers including a first barrier immediately adjacent to a first quantum well in the set of quantum wells and the first side of the light generating structure, wherein a thickness of the first barrier is sufficient to accelerate an injected electron in an electric field to reach the energy of the polar optical phonon with respect to the electron ground state energy in the first quantum well, and wherein a thickness of a remainder of the light generating structure exceeds a mean free path for emission of a polar optical phonon by an electron injected into the material forming the conduction band energy tub; and a composite contact located on an opposite side of the light generating structure as the n-type contact layer, the composite contact comprising: an adhesion layer, wherein a material forming the adhesion layer has a maximum thickness less than five nanometers and allows at least five percent of the light generated by the light generating structure to pass there through; and a reflecting metal layer configured to reflect at least a portion of the light generated by the light generating structure. ### Claim 20 (depends on 19) The device of claim 19, wherein the n-type contact layer is formed of a group III nitride material, and wherein the material forming the conduction band energy tub is a group III nitride material having an aluminum molar fraction greater than fifty percent.