# US 9,437,714 B1 · Selective gate contact fill metallization

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 9,437,714 B1
- Document ID: US9437714B1
- Status: Granted
- Kind: B1
- Application number: 14/963,523
- Filed: 2015-12-09
- Granted: 2016-09-06
- Earliest claimed: 2015-12-09
- Assignees: International Business Machines Corporation
- Applicants: International Business Machines Corporation
- Inventors: Praneet Adusumilli; Alexander Reznicek; Oscar van der Straten; Chih-Chao Yang
- Web page: https://patentgrep.com/patent/US9437714B1

## CPC

- H10D 30/024: {of fin field-effect transistors [FinFET]}
- H10D 64/01318: {the conductor comprising a layer of alloy material, compound material or organic material contacting the insulator, e.g. TiN (comprising a layer of alloys of Si, Ge or C H10D64/01314)}
- H10D 64/017: {using dummy gates in processes wherein at least parts of the final gates are self-aligned to the dummy gates, i.e. replacement gate processes}
- H10D 64/667: {the conductor comprising a layer of alloy material, compound material or organic material contacting the insulator, e.g. TiN workfunction layers (having lateral variation H10D64/671)}
- H10D 64/691: {comprising metallic compounds, e.g. metal oxides or metal silicates (insulators comprising nitrogen H10D64/693)}
- H10D 84/0172: {Manufacturing their gate conductors}
- H10D 84/038: {using silicon technology, e.g. SiGe}
- H10P 50/71: {using masks for conductive or resistive materials}
- H10P 95/00: Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10

## Abstract

Gate metal is selectively deposited on work function material during formation of a replacement metal gate. The work function material is subjected to a hydrogen-based surface treatment to enable the subsequent selective deposition of the gate metal. Work function materials including titanium nitride and tantalum nitride may be processed to facilitate the selective deposition of gate metals, thereby simplifying the gate fabrication process by eliminating the need for subjecting the gate metal to a reactive ion etch or chemical mechanical planarization prior to formation of a dielectric cap.

## Claims

### Claim 1

A method comprising:
obtaining a structure including a channel region comprising semiconductor material, spacers adjoining the channel region, a recess having an upper portion and a lower portion above the channel region and bounded by the spacers, a gate dielectric layer within the recess and adjoining the channel region, and a barrier layer on the gate dielectric layer, the barrier layer having an exposed inner surface comprising a work function material within the lower portion of the recess, the spacers having exposed inner surfaces adjoining the upper portion of the recess above the exposed inner surface of the barrier layer, the exposed inner surface of the barrier layer being selective to deposition of a gate metal with respect to the exposed inner surfaces of the spacers;
selectively depositing the gate metal on the exposed inner surface of the barrier layer, thereby forming a gate metal layer only within the lower portion of the recess, and
forming a dielectric cap over the gate metal and within the upper portion of the recess.

### Claim 2 (depends on 1)

The method of claim 1, wherein obtaining the structure further includes:
forming a sacrificial gate on the channel region;
forming the spacers on the sacrificial gate;
removing the sacrificial gate, thereby forming the recess bounded by the spacers;
forming the gate dielectric layer on the channel region and within the lower portion of the recess;
forming the barrier layer on the gate dielectric layer, and
exposing the structure to hydrogen under process conditions sufficient to render the exposed inner surface of the barrier layer selective to deposition of the gate metal with respect to the exposed inner surfaces of the spacers.

### Claim 3 (depends on 2)

The method of claim 2, wherein obtaining the structure further includes removing a portion of the barrier layer and the gate dielectric layer to expose the inner surfaces of the spacers adjoining the upper portion of the recess.

### Claim 4 (depends on 3)

The method of claim 3, wherein the work function material is selected from the group consisting of titanium nitride and tantalum nitride.

### Claim 5 (depends on 4)

The method of claim 4, wherein the gate metal consists essentially of cobalt.

### Claim 6 (depends on 5)

The method of claim 5, wherein the channel region comprises a portion of a semiconductor fin.

### Claim 7 (depends on 1)

The method of claim 1, wherein the channel region comprises a portion of a semiconductor fin.

### Claim 8 (depends on 7)

The method of claim 7, wherein the gate metal consists essentially of one of ruthenium (Ru), rhodium (Rh), osmium (Os), iridium (Ir), molybdenum (Mo), tungsten (W) and cobalt (Co), further including selectively depositing the gate metal via chemical vapor deposition.

### Claim 9 (depends on 8)

The method of claim 8, wherein obtaining the structure further includes:
forming a sacrificial gate on the channel region;
forming the spacers on the sacrificial gate;
removing the sacrificial gate, thereby forming the recess bounded by the spacers;
forming the gate dielectric layer on the channel region and within the lower portion of the recess;
forming the barrier layer on the gate dielectric layer, and
exposing the structure to hydrogen under process conditions sufficient to render the exposed inner surface of the barrier layer selective to deposition of the gate metal with respect to the exposed inner surfaces of the spacers.

### Claim 10 (depends on 9)

The method of claim 9, wherein the semiconductor fin consists essentially of silicon or silicon germanium.

### Claim 11 (depends on 10)

The method of claim 10, wherein the barrier layer comprises titanium nitride.

### Claim 12 (depends on 11)

The method of claim 11, wherein forming the barrier layer on the gate dielectric layer includes depositing the barrier layer as a conformal layer on the structure and recessing the barrier layer down to the lower portion of the recess.

### Claim 13 (depends on 9)

The method of claim 9, wherein the process conditions include pressure between 0.5-10 torr, temperature between 200-400° C., and hydrogen flow rate between 1-12 slm.

### Claim 14 (depends on 9)

The method of claim 9, further including discontinuing selectively depositing the gate metal after a selected time has elapsed, and forming the dielectric cap on the gate metal without etching the gate metal prior to forming the dielectric cap.

### Claim 15 (depends on 1)

The method of claim 1 wherein forming the dielectric cap within the upper portion of the recess is performed without prior chemical mechanical planarization of the gate metal.

### Claim 16 (depends on 2)

The method of claim 2 wherein forming the dielectric cap within the upper portion of the recess is performed without prior chemical mechanical planarization of the gate metal.