# US 9,437,711 B2 · Methods of forming gate structures for semiconductor devices using a replacement gate technique and the resulting devices > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,437,711 B2 - Document ID: US9437711B2 - Status: Granted - Kind: B2 - Application number: 14/081,019 - Filed: 2013-11-15 - Published: 2015-05-21 - Granted: 2016-09-06 - Earliest claimed: 2013-11-15 - Assignees: Globalfoundries Inc. - Applicants: GLOBALFOUNDRIES Inc. - Inventors: Xiuyu Cai; Xunyuan Zhang - Web page: https://patentgrep.com/patent/US9437711B2 ## CPC - H10D 64/017: {using dummy gates in processes wherein at least parts of the final gates are self-aligned to the dummy gates, i.e. replacement gate processes} - H10D 30/024: {of fin field-effect transistors [FinFET]} - H10D 30/62: Fin field-effect transistors [FinFET] - H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES ## Abstract One method disclosed herein includes, among other things, performing a process operation on an exposed surface of a substrate so as to form an H-terminated silicon surface, selectively forming a sacrificial material layer within a replacement gate cavity but not on the H-terminated silicon surface, forming a high-k layer of insulating material within the replacement gate cavity above the H-terminated silicon surface and laterally between first spaced-apart portions of the sacrificial material layer, and forming a work-function adjusting material layer in the gate cavity, wherein the work-function adjusting material layer has a substantially planar upper surface that extends between second spaced-apart portions of the sacrificial material layer formed on the sidewall spacers. ## Claims ### Claim 1 A method of forming a replacement gate structure for a device above a silicon substrate, comprising: performing at least one first etching process to remove a sacrificial gate structure positioned between two spaced-apart sidewall spacers so as to thereby define a replacement gate cavity that exposes a surface of said substrate; performing a process operation on said exposed surface of said substrate so as to form an H-terminated silicon surface; selectively forming a sacrificial material layer at least on internal surfaces of said sidewall spacers within said replacement gate cavity but not on said H-terminated silicon surface; forming a high-k layer of insulating material within said replacement gate cavity above said H-terminated silicon surface and laterally between first spaced-apart portions of said sacrificial material layer formed on said sidewall spacers; forming at least one work-function adjusting metal layer above said high-k layer of insulating material and laterally between second spaced-apart portions of said sacrificial material layer formed on said sidewall spacers, said at least one work-function adjusting metal having a substantially planar upper surface that extends between said second spaced-apart portions of said sacrificial material layer formed on said sidewall spacers; and after forming said at least one work-function adjusting metal layer, removing said sacrificial material layer. ### Claim 2 (depends on 1) The method of claim 1, wherein performing said process operation comprises performing a dilute HF acid cleaning process on said exposed surface of said substrate so as to form said H-terminated silicon surface. ### Claim 3 (depends on 1) The method of claim 1, wherein selectively forming said sacrificial material layer comprises selectively forming a sacrificial alkylsiloxane layer. ### Claim 4 (depends on 3) The method of claim 3, wherein selectively forming said alkylsiloxane layer comprises immersing said device in an alkyltrichlorosilanes (CH3—(CH2)n−1SiCl3) group solution. ### Claim 5 (depends on 1) The method of claim 1, wherein selectively forming said sacrificial material layer comprises performing a directed self-assembly process to form a self-assembled monolayer of said sacrificial material. ### Claim 6 (depends on 1) The method of claim 1, wherein said device is a FinFET device and said exposed surface of said silicon substrate is part of a fin structure defined in said substrate. ### Claim 7 (depends on 1) The method of claim 1, wherein removing said sacrificial material layer comprises removing said sacrificial material layer so as to form spaces between said sidewall spacers and said at least one work-function adjusting metal and said high-k layer of insulating material. ### Claim 8 (depends on 7) The method of claim 7, further comprising filling said spaces with an insulating material. ### Claim 9 (depends on 8) The method of claim 8, wherein filing said spaces comprises depositing an insulating material in said replacement gate cavity and into said spaces and performing an isotropic etching process so as to leave portions of said deposited insulating material positioned in said spaces. ### Claim 10 (depends on 1) The method of claim 1, further comprising: forming a bulk conductive material within said replacement gate cavity above and in contact with said substantially planar upper surface of said at least one work-function adjusting metal; and forming a gate cap layer within said replacement gate cavity above said bulk conductive material. ### Claim 11 (depends on 1) The method of claim 1, wherein said sidewall spacers are comprised of one of silicon nitride, carbon-doped silicon nitride, boron-doped silicon nitride or silicon dioxide. ### Claim 12 A method forming a replacement gate structure for a device above a silicon substrate, comprising: performing at least one first etching process to remove a sacrificial gate structure positioned between two spaced-apart sidewall spacers so as to thereby define a replacement gate cavity that exposes a surface of said substrate; performing a dilute HF acid cleaning process on said exposed surface of said substrate so as to form an H-terminated silicon surface; selectively forming a sacrificial alkylsiloxane layer at least on internal surfaces of said sidewall spacers within said replacement gate cavity but not on said H-terminated silicon surface by immersing said device in an alkyltrichlorosilanes (CH3—(CH2)n−1SiCl3) group solution; forming a high-k layer of insulating material within said replacement gate cavity above said H-terminated silicon surface and laterally between first spaced-apart portions of said sacrificial alkylsiloxane layer formed on said sidewall spacers; forming at least one work-function adjusting metal layer above said high-k layer of insulating material and laterally between second spaced-apart portions of said sacrificial alkylsiloxane layer formed on said sidewall spacers, said at least one work-function adjusting metal having a substantially planar upper surface that extends between said second spaced-apart portions of said sacrificial alkylsiloxane layer formed on said sidewall spacers; and after forming said at least one work-function adjusting metal layer, removing said sacrificial alkylsiloxane layer. ### Claim 13 (depends on 12) The method of claim 12, wherein removing said sacrificial alkylsiloxane layer comprises removing said sacrificial alkylsiloxane layer so as to form spaces between said sidewall spacers and said at least one work-function adjusting metal and said high-k layer of insulating material. ### Claim 14 (depends on 13) The method of claim 13, further comprising filling said spaces with an insulating material. ### Claim 15 (depends on 14) The method of claim 14, wherein filing said spaces comprises depositing an insulating material in said replacement gate cavity and said spaces and performing an isotropic etching process so as to leave portions of said deposited insulating material positioned in said spaces. ### Claim 16 (depends on 12) The method of claim 12, further comprising: forming a bulk conductive material within said replacement gate cavity above and in contact with said substantially planar upper surface of said at least one work-function adjusting metal; and forming a gate cap layer within said replacement gate cavity above said bulk conductive material. ### Claim 17 (depends on 12) The method of claim 12, wherein selectively forming said sacrificial alkylsiloxane layer comprises performing a directed self-assembly process to form a self-assembled monolayer of said sacrificial alkylsiloxane layer. ### Claim 18 A method of forming a replacement gate structure for a device above a silicon substrate, comprising: performing at least one first etching process to remove a sacrificial gate structure positioned between two spaced-apart sidewall spacers so as to thereby define a replacement gate cavity that exposes a surface of said substrate; performing a process operation on said exposed surface of said substrate so as to form an H-terminated silicon surface; selectively forming a sacrificial material layer at least on internal surfaces of said sidewall spacers within said replacement gate cavity but not on said H-terminated silicon surface, wherein selectively forming said sacrificial material layer comprises performing a directed self-assembly process to form a self-assembled monolayer of said sacrificial material; forming a high-k layer of insulating material within said replacement gate cavity above said H-terminated silicon surface and laterally between first spaced-apart portions of said sacrificial material layer formed on said sidewall spacers; and forming at least one work-function adjusting metal layer above said high-k layer of insulating material and laterally between second spaced-apart portions of said sacrificial material layer formed on said sidewall spacers, said at least one work-function adjusting metal having a substantially planar upper surface that extends between said second spaced-apart portions of said sacrificial material layer formed on said sidewall spacers.