# US 9,437,603 B2 · Wing-type projection between neighboring access transistors in memory devices > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 9,437,603 B2 - Document ID: US9437603B2 - Status: Granted - Kind: B2 - Application number: 14/526,711 - Filed: 2014-10-29 - Published: 2016-04-14 - Granted: 2016-09-06 - Earliest claimed: 2014-10-10 - Assignees: Taiwan Semiconductor Manufacturing Company, Ltd. - Applicants: Taiwan Semiconductor Manufacturing Co., Ltd. - Inventors: Chia-Ta Hsieh; Chi-Wei Ho; Kao-Chao Lin; Josh Lin; Nai-Chao Su; Shih-Jung Tu; Po-Kai Hsu; Shih-Ching Lee; Chen-Ming Huang - Web page: https://patentgrep.com/patent/US9437603B2 ## CPC - H10B 41/40: characterised by the peripheral circuit region - H10B 41/10: characterised by the top-view layout - H10B 41/30: characterised by the memory core region - H10D 62/113: {Isolations within a component, i.e. internal isolations} - H10D 89/10: Integrated device layouts - H10W 20/43: Layouts of interconnections - H10B: ELECTRONIC MEMORY DEVICES - H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES - H10W: GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10 ## Abstract A flash memory device is disposed on a semiconductor substrate. The flash memory device includes flash memory cells arranged in rows and columns. Respective flash memory cells include respective access transistors and respective floating gate transistors. The respective access transistors have respective access gates, and the respective floating gate transistors have respective control gates arranged over respective floating gates. First and second wordlines extend substantially in parallel with one another and correspond to first and second rows which neighbor one another. The first wordline is coupled to access gates of access transistors along the first row. The second wordline is coupled to access gates of access transistors along the second row. Nearest edges of the first and second wordlines include at least one wing which extends laterally outward from a sidewall of one of the first and second wordlines towards a sidewall the other of the first and second wordlines. ## Claims ### Claim 1 A flash memory device disposed on a semiconductor substrate, comprising: a plurality of flash memory cells arranged in rows and columns, wherein respective flash memory cells include respective access transistors coupled to respective floating gate transistors, and wherein the respective access transistors have respective access gates and wherein respective floating gate transistors have respective control gates arranged over respective floating gates; first and second wordlines extending substantially in parallel with one another and corresponding to first and second rows which neighbor one another, wherein the first wordline is coupled to respective access gates of respective access transistors along the first row and the second wordline is coupled to respective access gates of respective access transistors along the second row; and wherein nearest edges of the first and second wordlines include a first wing which extends laterally outward from a sidewall of one of the first and second wordlines towards a sidewall the other of the first and second wordlines. ### Claim 2 (depends on 1) The flash memory device of claim 1, further comprising: a plurality of active regions disposed in the semiconductor substrate and arranged to be perpendicular to the first and second wordlines, wherein neighboring active regions are spaced apart from one another by respective isolation structures; and a contact extending vertically downward to an active region and arranged between the nearest edges of the first and second wordlines. ### Claim 3 (depends on 2) The flash memory device of claim 2, wherein the nearest edges of first and second wordlines are separated by a first perpendicular distance measured through the contact and are separated by a second, smaller perpendicular distance when measured at a position other than through the contact. ### Claim 4 (depends on 1) The flash memory device of claim 1, further comprising: a second wing which extends laterally outward from the sidewall of the other of the first or second wordlines towards the sidewall the one of the first or second wordlines. ### Claim 5 (depends on 4) The flash memory device of claim 4, wherein the first and second wings are symmetric with regards to an axis extending equidistantly between the nearest edges of the first and second wordlines. ### Claim 6 (depends on 4) The flash memory device of claim 4, wherein the first and second wings are asymmetric with regards to an axis extending equidistantly between the nearest edges of the first and second wordlines. ### Claim 7 (depends on 1) The flash memory device of claim 1, further comprising: sidewall spacers that extend along neighboring sidewalls of the first and second wordlines, wherein the sidewall spacers of the first and second wordlines abut one another adjacent to the first wing and are spaced apart from one another at a position spaced apart from the first wing. ### Claim 8 (depends on 1) The flash memory device of claim 1, further comprising: a plurality of control lines extending over the semiconductor substrate in parallel with the first and second wordlines and being coupled to respective control gates of respective floating gate transistors along respective rows. ### Claim 9 (depends on 8) The flash memory device of claim 8, wherein the control lines and wordlines are arranged so pairs of neighboring control lines alternate with pairs of neighboring wordlines in two-by-two fashion, and wherein nearest edges of first and second wordlines of a neighboring pair include a first wing which extends laterally outward from a sidewall of one of the first or second wordlines towards a sidewall the other of the first or second wordlines. ### Claim 10 (depends on 8) The flash memory device of claim 8, wherein a control line couples consecutive control gates along a row to one another, and wherein a wordline couples consecutive access gates along the row to one another. ### Claim 11 (depends on 10) The flash memory device of claim 10, wherein a floating gate and control gate of a flash memory cell are each made of polysilicon and are separated by a dielectric material. ### Claim 12 (depends on 11) The flash memory device of claim 11, wherein the access gate comprises: a lower polysilicon layer having a vertical thickness approximately equal to that of the floating gate; and an upper polysilicon layer abutting an upper surface of the lower polysilicon layer and having vertical thickness approximately equal to that of the control gate. ### Claim 13 (depends on 8) The flash memory device of claim 8, wherein pairs of neighboring control lines alternate with pairs of neighboring wordlines along consecutive rows, and wherein nearest edges of first and second wordlines of a neighboring pair are separated by a first perpendicular distance over an active region and are separated by a second, smaller perpendicular distance over an isolation region. ### Claim 14 A flash memory device disposed on a semiconductor substrate, comprising: a plurality of flash memory cells arranged in rows and columns, wherein respective flash memory cells include respective access transistors coupled to respective floating gate transistors, and wherein the respective access transistors have respective access gates and wherein respective floating gate transistors have respective control gates arranged over respective floating gates; first and second wordlines extending substantially in parallel with one another and corresponding to first and second rows which neighbor one another, wherein the first wordline is coupled to respective access gates of respective access transistors along the first row and the second wordline is coupled to respective access gates of respective access transistors along the second row; wherein nearest edges of the first and second wordlines include a first wing which extends laterally outward from a sidewall of one of the first and second wordlines towards a sidewall the other of the first and second wordlines, and wherein a second wing extends laterally outward from the sidewall of the other of the first or second wordlines towards the sidewall the one of the first or second wordlines; and wherein the first and second wings are symmetric with regards to an axis extending equidistantly between the nearest edges of the first and second wordlines. ### Claim 15 (depends on 14) The flash memory device of claim 14, further comprising: a plurality of control lines extending over the semiconductor substrate in parallel with the first and second wordlines and being coupled to respective control gates of respective floating gate transistors along respective rows. ### Claim 16 (depends on 15) The flash memory device of claim 15, wherein the control lines and wordlines are arranged so pairs of neighboring control lines alternate with pairs of neighboring wordlines in two-by-two fashion, and wherein nearest edges of first and second wordlines of a neighboring pair include a first wing which extends laterally outward from a sidewall of one of the first or second wordlines towards a sidewall the other of the first or second wordlines. ### Claim 17 A flash memory device disposed on a semiconductor substrate, comprising: a plurality of flash memory cells arranged in rows and columns, wherein respective flash memory cells include respective access transistors coupled to respective floating gate transistors, and wherein the respective access transistors have respective access gates and wherein respective floating gate transistors have respective control gates arranged over respective floating gates; first and second wordlines extending substantially in parallel with one another and corresponding to first and second rows which neighbor one another, wherein the first wordline is coupled to respective access gates of respective access transistors along the first row and the second wordline is coupled to respective access gates of respective access transistors along the second row; wherein nearest edges of the first and second wordlines include a first wing which extends laterally outward from a sidewall of one of the first and second wordlines towards a sidewall the other of the first and second wordlines, and wherein a second wing extends laterally outward from the sidewall of the other of the first or second wordlines towards the sidewall the one of the first or second wordlines; and wherein the first and second wings are asymmetric with regards to an axis extending equidistantly between the nearest edges of the first and second wordlines. ### Claim 18 (depends on 17) The flash memory device of claim 17, further comprising: a plurality of control lines extending over the semiconductor substrate in parallel with the first and second wordlines and being coupled to respective control gates of respective floating gate transistors along respective rows. ### Claim 19 (depends on 18) The flash memory device of claim 18, wherein the control lines and wordlines are arranged so pairs of neighboring control lines alternate with pairs of neighboring wordlines in two-by-two fashion, and wherein nearest edges of first and second wordlines of a neighboring pair include a first wing which extends laterally outward from a sidewall of one of the first or second wordlines towards a sidewall the other of the first or second wordlines.